JPS63199159U - - Google Patents

Info

Publication number
JPS63199159U
JPS63199159U JP4929988U JP4929988U JPS63199159U JP S63199159 U JPS63199159 U JP S63199159U JP 4929988 U JP4929988 U JP 4929988U JP 4929988 U JP4929988 U JP 4929988U JP S63199159 U JPS63199159 U JP S63199159U
Authority
JP
Japan
Prior art keywords
crucible
heater
chamber
nozzle
nozzles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4929988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4929988U priority Critical patent/JPS63199159U/ja
Publication of JPS63199159U publication Critical patent/JPS63199159U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4929988U 1988-04-14 1988-04-14 Pending JPS63199159U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4929988U JPS63199159U (enrdf_load_stackoverflow) 1988-04-14 1988-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4929988U JPS63199159U (enrdf_load_stackoverflow) 1988-04-14 1988-04-14

Publications (1)

Publication Number Publication Date
JPS63199159U true JPS63199159U (enrdf_load_stackoverflow) 1988-12-21

Family

ID=30871620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4929988U Pending JPS63199159U (enrdf_load_stackoverflow) 1988-04-14 1988-04-14

Country Status (1)

Country Link
JP (1) JPS63199159U (enrdf_load_stackoverflow)

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