JPS6319833A - 半導体集積回路の試験方法 - Google Patents

半導体集積回路の試験方法

Info

Publication number
JPS6319833A
JPS6319833A JP61163882A JP16388286A JPS6319833A JP S6319833 A JPS6319833 A JP S6319833A JP 61163882 A JP61163882 A JP 61163882A JP 16388286 A JP16388286 A JP 16388286A JP S6319833 A JPS6319833 A JP S6319833A
Authority
JP
Japan
Prior art keywords
ray
test
irradiation
integrated circuit
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61163882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0344415B2 (enrdf_load_stackoverflow
Inventor
Masataka Kato
正高 加藤
Takahiro Okabe
岡部　隆博
Kikuo Watanabe
渡辺　喜久雄
Minoru Nagata
永田　穰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61163882A priority Critical patent/JPS6319833A/ja
Publication of JPS6319833A publication Critical patent/JPS6319833A/ja
Publication of JPH0344415B2 publication Critical patent/JPH0344415B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP61163882A 1986-07-14 1986-07-14 半導体集積回路の試験方法 Granted JPS6319833A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61163882A JPS6319833A (ja) 1986-07-14 1986-07-14 半導体集積回路の試験方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61163882A JPS6319833A (ja) 1986-07-14 1986-07-14 半導体集積回路の試験方法

Publications (2)

Publication Number Publication Date
JPS6319833A true JPS6319833A (ja) 1988-01-27
JPH0344415B2 JPH0344415B2 (enrdf_load_stackoverflow) 1991-07-05

Family

ID=15782586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61163882A Granted JPS6319833A (ja) 1986-07-14 1986-07-14 半導体集積回路の試験方法

Country Status (1)

Country Link
JP (1) JPS6319833A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7025807B2 (en) 2001-10-31 2006-04-11 Advanced Production And Loading As Method for absorbing vapors and gases from pressure vessels
US7295773B2 (en) 2000-03-22 2007-11-13 Ricoh Company, Ltd. Camera, an image inputting apparatus, a portable terminal device, and a method for transforming the camera configuration
JP2010091334A (ja) * 2008-10-06 2010-04-22 Toyota Motor Corp 半導体装置の放射線照射試験方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081165U (enrdf_load_stackoverflow) * 1973-11-30 1975-07-12
JPS5683955A (en) * 1979-12-13 1981-07-08 Nec Corp Manufacturing of semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081165U (enrdf_load_stackoverflow) * 1973-11-30 1975-07-12
JPS5683955A (en) * 1979-12-13 1981-07-08 Nec Corp Manufacturing of semiconductor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7295773B2 (en) 2000-03-22 2007-11-13 Ricoh Company, Ltd. Camera, an image inputting apparatus, a portable terminal device, and a method for transforming the camera configuration
US7800689B2 (en) 2000-03-22 2010-09-21 Ricoh Company, Ltd. Camera, an image inputting apparatus, a portable terminal device, and a method for transforming the camera configuration
US7025807B2 (en) 2001-10-31 2006-04-11 Advanced Production And Loading As Method for absorbing vapors and gases from pressure vessels
JP2010091334A (ja) * 2008-10-06 2010-04-22 Toyota Motor Corp 半導体装置の放射線照射試験方法

Also Published As

Publication number Publication date
JPH0344415B2 (enrdf_load_stackoverflow) 1991-07-05

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