JPS63197803U - - Google Patents

Info

Publication number
JPS63197803U
JPS63197803U JP8797187U JP8797187U JPS63197803U JP S63197803 U JPS63197803 U JP S63197803U JP 8797187 U JP8797187 U JP 8797187U JP 8797187 U JP8797187 U JP 8797187U JP S63197803 U JPS63197803 U JP S63197803U
Authority
JP
Japan
Prior art keywords
vacuum chamber
bell crank
sealing
drive rod
stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8797187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8797187U priority Critical patent/JPS63197803U/ja
Publication of JPS63197803U publication Critical patent/JPS63197803U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Vacuum Packaging (AREA)
JP8797187U 1987-06-05 1987-06-05 Pending JPS63197803U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8797187U JPS63197803U (OSRAM) 1987-06-05 1987-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8797187U JPS63197803U (OSRAM) 1987-06-05 1987-06-05

Publications (1)

Publication Number Publication Date
JPS63197803U true JPS63197803U (OSRAM) 1988-12-20

Family

ID=30945671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8797187U Pending JPS63197803U (OSRAM) 1987-06-05 1987-06-05

Country Status (1)

Country Link
JP (1) JPS63197803U (OSRAM)

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