JPS6319745U - - Google Patents

Info

Publication number
JPS6319745U
JPS6319745U JP10926486U JP10926486U JPS6319745U JP S6319745 U JPS6319745 U JP S6319745U JP 10926486 U JP10926486 U JP 10926486U JP 10926486 U JP10926486 U JP 10926486U JP S6319745 U JPS6319745 U JP S6319745U
Authority
JP
Japan
Prior art keywords
frequency
coil
power
ion source
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10926486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10926486U priority Critical patent/JPS6319745U/ja
Publication of JPS6319745U publication Critical patent/JPS6319745U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10926486U 1986-07-18 1986-07-18 Pending JPS6319745U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10926486U JPS6319745U (US20090163788A1-20090625-C00002.png) 1986-07-18 1986-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10926486U JPS6319745U (US20090163788A1-20090625-C00002.png) 1986-07-18 1986-07-18

Publications (1)

Publication Number Publication Date
JPS6319745U true JPS6319745U (US20090163788A1-20090625-C00002.png) 1988-02-09

Family

ID=30987200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10926486U Pending JPS6319745U (US20090163788A1-20090625-C00002.png) 1986-07-18 1986-07-18

Country Status (1)

Country Link
JP (1) JPS6319745U (US20090163788A1-20090625-C00002.png)

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