JPS63193588U - - Google Patents

Info

Publication number
JPS63193588U
JPS63193588U JP8092987U JP8092987U JPS63193588U JP S63193588 U JPS63193588 U JP S63193588U JP 8092987 U JP8092987 U JP 8092987U JP 8092987 U JP8092987 U JP 8092987U JP S63193588 U JPS63193588 U JP S63193588U
Authority
JP
Japan
Prior art keywords
solvent
tank
cleaning
device characterized
evaporation tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8092987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529113Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8092987U priority Critical patent/JPH0529113Y2/ja
Publication of JPS63193588U publication Critical patent/JPS63193588U/ja
Application granted granted Critical
Publication of JPH0529113Y2 publication Critical patent/JPH0529113Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP8092987U 1987-05-29 1987-05-29 Expired - Lifetime JPH0529113Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8092987U JPH0529113Y2 (enExample) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8092987U JPH0529113Y2 (enExample) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63193588U true JPS63193588U (enExample) 1988-12-13
JPH0529113Y2 JPH0529113Y2 (enExample) 1993-07-26

Family

ID=30932191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8092987U Expired - Lifetime JPH0529113Y2 (enExample) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0529113Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05123658A (ja) * 1991-10-17 1993-05-21 Japan Field Kk 被洗浄物の洗浄方法およびその装置
DE19515566A1 (de) * 1995-03-16 1996-10-31 Chugai Ro Kogyo Kaisha Ltd Reinigungsgerät

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108687016A (zh) * 2018-03-28 2018-10-23 安徽尼古拉电子科技有限公司 一种微电子机械清洗装置
CN108325915A (zh) * 2018-03-28 2018-07-27 安徽尼古拉电子科技有限公司 一种电子元器件表面氧化膜清洗装置及方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05123658A (ja) * 1991-10-17 1993-05-21 Japan Field Kk 被洗浄物の洗浄方法およびその装置
DE19515566A1 (de) * 1995-03-16 1996-10-31 Chugai Ro Kogyo Kaisha Ltd Reinigungsgerät
DE19515566C2 (de) * 1995-03-16 1998-10-08 Chugai Ro Kogyo Kaisha Ltd Reinigungsgerät

Also Published As

Publication number Publication date
JPH0529113Y2 (enExample) 1993-07-26

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