JPS63192458U - - Google Patents

Info

Publication number
JPS63192458U
JPS63192458U JP8305187U JP8305187U JPS63192458U JP S63192458 U JPS63192458 U JP S63192458U JP 8305187 U JP8305187 U JP 8305187U JP 8305187 U JP8305187 U JP 8305187U JP S63192458 U JPS63192458 U JP S63192458U
Authority
JP
Japan
Prior art keywords
electron beam
electron
thermoelectrons
cover
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8305187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523565Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8305187U priority Critical patent/JPH0523565Y2/ja
Publication of JPS63192458U publication Critical patent/JPS63192458U/ja
Application granted granted Critical
Publication of JPH0523565Y2 publication Critical patent/JPH0523565Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP8305187U 1987-05-29 1987-05-29 Expired - Lifetime JPH0523565Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8305187U JPH0523565Y2 (enExample) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8305187U JPH0523565Y2 (enExample) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63192458U true JPS63192458U (enExample) 1988-12-12
JPH0523565Y2 JPH0523565Y2 (enExample) 1993-06-16

Family

ID=30936279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8305187U Expired - Lifetime JPH0523565Y2 (enExample) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0523565Y2 (enExample)

Also Published As

Publication number Publication date
JPH0523565Y2 (enExample) 1993-06-16

Similar Documents

Publication Publication Date Title
JPS63192458U (enExample)
JPH03118600U (enExample)
JPS5912258U (ja) 電子線照射装置
JPS62157968U (enExample)
JPS6423869U (enExample)
JPS63137450U (enExample)
JPS6073216U (ja) 磁性膜作製装置
JPS58144750U (ja) イオン打込機のイオン源部
JPS58101164U (ja) 発光分光分析装置に於る試料導入装置
JPS642352U (enExample)
JPS6013661U (ja) 荷電粒子線発生装置
JPH11295497A (ja) 偏極電子線発生装置
JPS61174162U (enExample)
JPS60181366U (ja) 複数の電子ビ−ムにより材料を加熱する装置
JPS6169266U (enExample)
JPH01152075U (enExample)
JPH0189454U (enExample)
JPH0230100U (enExample)
JPS647754U (enExample)
JPH0294250U (enExample)
JPS60121252U (ja) 質量分析装置用イオン源
JPS63109433U (enExample)
JPS61199860U (enExample)
JPH0339245U (enExample)
JPS61206257U (enExample)