JPS63191U - - Google Patents
Info
- Publication number
- JPS63191U JPS63191U JP9289786U JP9289786U JPS63191U JP S63191 U JPS63191 U JP S63191U JP 9289786 U JP9289786 U JP 9289786U JP 9289786 U JP9289786 U JP 9289786U JP S63191 U JPS63191 U JP S63191U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- pump device
- turbo
- rotating body
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 1
- 239000010687 lubricating oil Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9289786U JPS63191U (US20020128544A1-20020912-P00008.png) | 1986-06-18 | 1986-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9289786U JPS63191U (US20020128544A1-20020912-P00008.png) | 1986-06-18 | 1986-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63191U true JPS63191U (US20020128544A1-20020912-P00008.png) | 1988-01-05 |
Family
ID=30954996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9289786U Pending JPS63191U (US20020128544A1-20020912-P00008.png) | 1986-06-18 | 1986-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63191U (US20020128544A1-20020912-P00008.png) |
-
1986
- 1986-06-18 JP JP9289786U patent/JPS63191U/ja active Pending
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