JPS63191630U - - Google Patents

Info

Publication number

JPS63191630U

JPS63191630U JP8426787U JP8426787U JPS63191630U JP S63191630 U JPS63191630 U JP S63191630U JP 8426787 U JP8426787 U JP 8426787U JP 8426787 U JP8426787 U JP 8426787U JP S63191630 U JPS63191630 U JP S63191630U

Authority

JP

Japan

Prior art keywords

semiconductor device

protective film

upper layer

utility

model registration

Prior art date

1987-05-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 8
• 230000001681 protective effect Effects 0.000 claims description 4
• CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 150000004767 nitrides Chemical class 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1