JPS63188947U - - Google Patents
Info
- Publication number
- JPS63188947U JPS63188947U JP8059587U JP8059587U JPS63188947U JP S63188947 U JPS63188947 U JP S63188947U JP 8059587 U JP8059587 U JP 8059587U JP 8059587 U JP8059587 U JP 8059587U JP S63188947 U JPS63188947 U JP S63188947U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- wafer
- take
- stored
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 5
- 210000000078 claw Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8059587U JPS63188947U (ko) | 1987-05-26 | 1987-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8059587U JPS63188947U (ko) | 1987-05-26 | 1987-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63188947U true JPS63188947U (ko) | 1988-12-05 |
Family
ID=30931542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8059587U Pending JPS63188947U (ko) | 1987-05-26 | 1987-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63188947U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384043A (ja) * | 1986-09-26 | 1988-04-14 | Koyo Rindobaagu Kk | ウエハ移載装置 |
-
1987
- 1987-05-26 JP JP8059587U patent/JPS63188947U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384043A (ja) * | 1986-09-26 | 1988-04-14 | Koyo Rindobaagu Kk | ウエハ移載装置 |