JPS63188947U - - Google Patents

Info

Publication number
JPS63188947U
JPS63188947U JP8059587U JP8059587U JPS63188947U JP S63188947 U JPS63188947 U JP S63188947U JP 8059587 U JP8059587 U JP 8059587U JP 8059587 U JP8059587 U JP 8059587U JP S63188947 U JPS63188947 U JP S63188947U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
wafer
take
stored
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8059587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8059587U priority Critical patent/JPS63188947U/ja
Publication of JPS63188947U publication Critical patent/JPS63188947U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
JP8059587U 1987-05-26 1987-05-26 Pending JPS63188947U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8059587U JPS63188947U (ko) 1987-05-26 1987-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8059587U JPS63188947U (ko) 1987-05-26 1987-05-26

Publications (1)

Publication Number Publication Date
JPS63188947U true JPS63188947U (ko) 1988-12-05

Family

ID=30931542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8059587U Pending JPS63188947U (ko) 1987-05-26 1987-05-26

Country Status (1)

Country Link
JP (1) JPS63188947U (ko)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6384043A (ja) * 1986-09-26 1988-04-14 Koyo Rindobaagu Kk ウエハ移載装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6384043A (ja) * 1986-09-26 1988-04-14 Koyo Rindobaagu Kk ウエハ移載装置

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