JPS63188947U - - Google Patents
Info
- Publication number
- JPS63188947U JPS63188947U JP1987080595U JP8059587U JPS63188947U JP S63188947 U JPS63188947 U JP S63188947U JP 1987080595 U JP1987080595 U JP 1987080595U JP 8059587 U JP8059587 U JP 8059587U JP S63188947 U JPS63188947 U JP S63188947U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- wafer
- take
- stored
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987080595U JPS63188947U (enExample) | 1987-05-26 | 1987-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987080595U JPS63188947U (enExample) | 1987-05-26 | 1987-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63188947U true JPS63188947U (enExample) | 1988-12-05 |
Family
ID=30931542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987080595U Pending JPS63188947U (enExample) | 1987-05-26 | 1987-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63188947U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384043A (ja) * | 1986-09-26 | 1988-04-14 | Koyo Rindobaagu Kk | ウエハ移載装置 |
-
1987
- 1987-05-26 JP JP1987080595U patent/JPS63188947U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384043A (ja) * | 1986-09-26 | 1988-04-14 | Koyo Rindobaagu Kk | ウエハ移載装置 |