JPS63187478A - Head slider - Google Patents

Head slider

Info

Publication number
JPS63187478A
JPS63187478A JP1843987A JP1843987A JPS63187478A JP S63187478 A JPS63187478 A JP S63187478A JP 1843987 A JP1843987 A JP 1843987A JP 1843987 A JP1843987 A JP 1843987A JP S63187478 A JPS63187478 A JP S63187478A
Authority
JP
Japan
Prior art keywords
bearing
slider
groove
rail
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1843987A
Other languages
Japanese (ja)
Inventor
Yoshinori Takeuchi
芳徳 竹内
Yuzo Yamaguchi
雄三 山口
Shoji Suzuki
昇二 鈴木
Katsuyuki Tanaka
勝之 田中
Mikio Tokuyama
幹夫 徳山
Hiroshi Daito
大東 宏
Sukeo Saito
斉藤 翼生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1843987A priority Critical patent/JPS63187478A/en
Publication of JPS63187478A publication Critical patent/JPS63187478A/en
Pending legal-status Critical Current

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  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)

Abstract

PURPOSE:To obtain a head slider having less dust sticking by providing a slot not reaching a flowing end along a lengthwise direction to an air bearing and providing a throughhole reaching a face except the air bearing face of the slider to an groove so as to attain excellent bearing dynamic characteristic and stable floating. CONSTITUTION:Two air bearing rails 5 as a floating means by the air bearing of a slider member 1 consist of a bearing tilting face 4 and a bearing plane part 3 formed to the gas intake side 5a. The both are separated into two while the flowout end 5b of the rails 5 is left by the groove 7 and the throughhole 8 reaching the rear part 1a of the air bearing rails 5 of the slider member 1 from the flowout end 7b of the slot 7 is provided. Nearly the same atmospheric pressure is provided to the groove 7 and the throughhole 8 and the pressure at the bearing plane up to the flowout end 7b after the groove 7 is small and the gas bearing rail 5 acts as the assembling of the two gas bearing rails. Thus, the bearing dynamic characteristic is excellent and stable floating is attained, then the head slider having less dust sticking is obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、磁気ディスク等の記録媒体上にヘッドを浮動
させて情報の再生を行なうヘッドスライダに係り、特に
、低荷重、低浮上量で、安定浮上させるのに好適な磁気
ヘッドスライダに関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a head slider that reproduces information by floating a head above a recording medium such as a magnetic disk, and particularly relates to a head slider that reproduces information by floating a head above a recording medium such as a magnetic disk. , relates to a magnetic head slider suitable for stable flying.

〔従来の技術〕[Conventional technology]

磁気ヘッドスライダは、磁気ヘッドを取付けたスライダ
を磁気ディスク等の磁気記録媒体上に配置し、この磁気
記録媒体を回転することにより、回転媒体に添って生成
される空気流にて、上記磁気ヘッドスライダを浮揚させ
、上記磁気ヘッドにより磁気記録媒体に情報を記録ある
いは磁気記録媒体に記録された情報を再生する。磁気ヘ
ッドスライダの従来の構造はたとえば、特開昭49−1
21514号公報に記載されており、第11図及び。
In a magnetic head slider, a slider with a magnetic head attached is placed on a magnetic recording medium such as a magnetic disk, and by rotating this magnetic recording medium, the magnetic head is moved by an air flow generated along the rotating medium. The slider is levitated and the magnetic head records information on the magnetic recording medium or reproduces information recorded on the magnetic recording medium. The conventional structure of a magnetic head slider is, for example, disclosed in Japanese Patent Application Laid-Open No. 49-1
It is described in Japanese Patent No. 21514, and is shown in FIGS.

第12図に示すように浮上手段としてテーパフラット形
スライダが用いられている。スライダ1は。
As shown in FIG. 12, a tapered flat slider is used as the floating means. Slider 1 is.

双胴形をしており、軸受平面部3と軸受傾斜面4とから
なる気体軸受レール5が空気流の方向に沿ってスライダ
の両側端に、各1本形成されている。
The slider has a double-barrel shape, and gas bearing rails 5 each consisting of a flat bearing section 3 and an inclined bearing surface 4 are formed at both ends of the slider along the direction of air flow.

磁気ヘッド6は、スライダめ中央に設けたもう−本のレ
ールであるセンターレール10の流出端に設けられる。
The magnetic head 6 is provided at the outflow end of a center rail 10, which is another rail provided at the center of the slider.

円板状の磁気記録媒体20の回転により、気体の粘性を
利用した気体軸受レール5の軸受作用によりスライダ1
を記録媒体に対し微小すきまをもって浮上させる。
Due to the rotation of the disc-shaped magnetic recording medium 20, the slider 1 is
is floated with a minute gap relative to the recording medium.

また他の公知例として、蕾膜磁気ヘッドを用いた場合は
例えばエレクトロニックデザイン5号、1980年3月
1日の第60〜63頁 (ELECTRONICDESIGN 5  、  阿
arch 1  、 1 9 8 0  #p60〜6
:う)に記載されており、第13図および第14図に示
すごとく、双胴形のスライダ1の気体軸受レール5の流
出端面に薄膜磁気ヘッド8を設けている。
In addition, as another known example, when a bud magnetic head is used, for example, Electronic Design No. 5, March 1, 1980, pages 60-63 (ELECTRONIC DESIGN 5, Arch 1, 1980 #p60-6)
As shown in FIGS. 13 and 14, a thin film magnetic head 8 is provided on the outflow end surface of the gas bearing rail 5 of the twin-barrel slider 1.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記従来技術の第1の問題点は、スライダの気体軸受膜
の剛性及び、減衰などの軸受動特性が十分でなく特に高
周波の減衰特性については考慮されておらず、浮上量が
微小化すると気体軸受膜共振点での共振倍率が増加しス
ライダの追従特性が悪化し、空気膜共振点での共振倍率
を非常に増加させることであった。
The first problem with the above conventional technology is that the stiffness of the gas bearing film of the slider and the shaft passive characteristics such as damping are insufficient, and the high frequency damping characteristics are not particularly taken into account. The resonance magnification at the bearing film resonance point increased, the slider's tracking characteristics deteriorated, and the resonance magnification at the air film resonance point increased significantly.

また、従来の第2の問題点は気体軸受レールに侵入した
塵挨の付着によりスライダの浮上特性が悪化し、スライ
ダ記録媒体と接触する事故が発生している。これらの点
については考慮されていなかった。
A second problem with the prior art is that the flying characteristics of the slider deteriorate due to the adhesion of dust that has entered the gas bearing rail, resulting in accidents in which the slider comes into contact with the recording medium. These points were not considered.

さらに従来の第3の問題点は、薄膜磁気ヘッドを気体軸
受レールの流出端に実装したスライダにおいて、低浮上
量化する場合、レール幅を小さくできないため、従来の
押付力ではむずかしく、高荷重化する必要があり、スラ
イダと円板の接緋、摺動時の装置の信頼性が低下するこ
とである。
Furthermore, the third problem with conventional methods is that when lowering the flying height of a slider in which a thin film magnetic head is mounted on the outflow end of a gas bearing rail, it is difficult to reduce the rail width, making it difficult to use conventional pressing force and increasing the load. This reduces the reliability of the device when the slider and disk are connected or slid together.

本発明の目的は、軸受動特性が優れ安定浮上し、塵挨付
着の少ないヘッドスライダを提供することにある。
An object of the present invention is to provide a head slider with excellent shaft passive characteristics, stable flying, and less dust adhesion.

〔問題点を解決するための手段〕[Means for solving problems]

上記目的は、気体軸受による浮上手段に浮上手段の長手
方向に沿って、流出端まで達しない一本以上の溝を設け
この溝に、スライダの気体軸受面以外の面まで達する貫
通孔を設けることにより達成される。
The above purpose is to provide one or more grooves that do not reach the outflow end of the levitation means using a gas bearing along the longitudinal direction of the levitation means, and provide in these grooves a through hole that reaches a surface other than the gas bearing surface of the slider. This is achieved by

〔作用〕[Effect]

気体軸受による浮上手段に設けた長手方向溝により、浮
上手段は実質上分離された2本の浮上手段として動作す
る。それによって、記録媒体の回転に伴なう空気の粘性
による流れは、浮上手段の長手方向へ圧縮されながら進
むと同時に、より多くのサイドフローを生じ、この流れ
が高周波の減衰などの軸受動特性を高める。さらに、こ
の溝にスライダ部材の気体軸受面の他の面へ達する貫通
孔を設けることにより、溝内の気体を貫通孔を通し外部
に積極的に排出し、軸受動特性をさらに高める。この貫
通孔により、溝部はほぼ雰囲気圧となり、溝後端から浮
上手段の流出端までの平面部に発生する圧力は小さく押
さえられる。
Due to the longitudinal grooves provided in the gas-bearing levitation means, the levitation means essentially operates as two separate levitation means. As a result, the flow due to the viscosity of the air accompanying the rotation of the recording medium is compressed in the longitudinal direction of the floating means, and at the same time generates more side flows. Increase. Further, by providing this groove with a through hole that reaches the other surface of the gas bearing surface of the slider member, the gas in the groove is actively discharged to the outside through the through hole, further improving the shaft passive characteristics. Due to this through hole, the pressure in the groove becomes almost atmospheric, and the pressure generated in the flat area from the rear end of the groove to the outflow end of the flotation means is suppressed to a small level.

また1貫通孔による気体の流れにより、浮上手段に侵入
した塵挨などをスライダ外部へ排出でき、塵挨付着によ
る浮上特性の悪化を小さく押さえることができる。
Further, due to the gas flow through the one through hole, dust that has entered the floating means can be discharged to the outside of the slider, and deterioration of flying characteristics due to dust adhesion can be suppressed to a small level.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図及び第2図を参照して
説明する。スライダ部材1の2本の気体軸受による浮上
手段としての気体軸受レール5は気体流入側5aに形成
された軸受傾斜面4と軸受平面部3とからなり、これら
両者は溝7によりレール5の流出端部側5bを残し2つ
に分離され、さらに、前記溝7の流出端側7bからスラ
イダ部材1の気体軸受レール5の背面部1aへ達する。
An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. The gas bearing rail 5, which serves as a floating means using two gas bearings of the slider member 1, consists of a bearing inclined surface 4 and a bearing flat portion 3 formed on the gas inflow side 5a, both of which are connected by grooves 7 to allow the rail 5 to flow out. It is separated into two parts except for the end side 5b, and further reaches the back side 1a of the gas bearing rail 5 of the slider member 1 from the outflow end side 7b of the groove 7.

ば通孔8を設けた構成となっている。It has a configuration in which a through hole 8 is provided.

気体軸受レール5に気体の粘性により流入する流れは、
最終的には、レール流出端5bに達する流れとサイドフ
ローと、溝7と貫通孔8を通って流れる3つの流れとな
る。溝7と貫通孔8は雰囲気圧とほぼ同じになり、溝7
の後方の流出端7bまでの軸受平面部での圧力発生は小
さく、気体軸受レール5を実質上2つの気体軸受レール
の集合として働く。
The flow flowing into the gas bearing rail 5 due to the viscosity of the gas is
Ultimately, there are three flows: a flow that reaches the rail outflow end 5b, a side flow, and a flow that flows through the groove 7 and the through hole 8. The pressure in the groove 7 and the through hole 8 is almost the same as that of the atmosphere, and the pressure in the groove 7
The pressure generated in the bearing flat portion up to the rear outflow end 7b is small, and the gas bearing rail 5 essentially functions as a collection of two gas bearing rails.

第15図に記録媒体の回転速度Uが一定速度、スライダ
の浮上ihが一定浮上量での、スライダレール幅ρRと
押付荷重Wの関係を示す。押付荷重Wはレール幅QRに
対しおよそW cc Q Raの関係にあり、浮上量り
が小さい場合増加する。図中実線は浮上量かhl、破線
は浮上量かh2でhx>h2である。本実施例では流出
端レール幅はQRであるが、実質上ΩaのレールとQb
のレールの2本のレールとして働くため、押付荷重は小
さくなり、流出端レール端Qn を大きくしても押付荷
重Wをふやすことなく低浮上化が可能となる。
FIG. 15 shows the relationship between the slider rail width ρR and the pressing load W when the rotation speed U of the recording medium is constant and the flying height ih of the slider is constant. The pressing load W has a relationship of approximately W cc Q Ra with respect to the rail width QR, and increases when the flying height is small. In the figure, the solid line indicates the flying height, hl, and the broken line indicates the flying height, h2, where hx>h2. In this embodiment, the outflow end rail width is QR, but in reality the rail width is Ωa and the rail width is Qb.
Since it works as two rails of the rail, the pressing load is small, and even if the outflow end rail end Qn is increased, it is possible to lower the floating level without increasing the pressing load W.

第16図に単位押付荷重に対する気体軸受膜の減衰係数
(代表としてC1lを示す)とレール幅QRの関係を示
す。レール幅aRを小さくすることにより、減衰係数は
増加し、特に高周波数の領域で顕著になる。この傾向は
、気体軸受膜の他の軸受特性の成分についてもいえる。
FIG. 16 shows the relationship between the damping coefficient of the gas bearing membrane (C1l is shown as a representative) and the rail width QR for a unit pressing load. By reducing the rail width aR, the damping coefficient increases, especially in the high frequency range. This tendency also applies to other bearing characteristic components of the gas bearing membrane.

そのため本実施例によれば全レール幅は大きいが、押付
荷重は、小さくできる。さらに先の3つの流れのうち、
溝7と貫通孔8による流れにより、軸受動特性の向上し
、スライダ追従特性が良くなり安定浮上する。
Therefore, according to this embodiment, although the total rail width is large, the pressing load can be reduced. Of the three flows further ahead,
The flow generated by the grooves 7 and the through holes 8 improves the shaft passive characteristics, improves the slider tracking characteristics, and allows stable floating.

また、この流れは、気体軸受レール5に侵入した塵埃の
排出を積極的に行ない、気体軸受レール5への塵埃付着
の低減効果がある。
Further, this flow actively discharges dust that has entered the gas bearing rail 5, and has the effect of reducing dust adhesion to the gas bearing rail 5.

さらに、低浮上のスライダに対し気体軸受レール5の流
出端部側5bのレール幅を比較的広くとれるので、この
端面に薄膜磁気ヘッドを設けることが容易に行なうこと
ができる。
Furthermore, since the rail width on the outflow end side 5b of the gas bearing rail 5 can be made relatively wide for a low-flying slider, a thin film magnetic head can be easily provided on this end surface.

第3図及び第4図に本発明の他の実施例を示す。Other embodiments of the present invention are shown in FIGS. 3 and 4.

溝7を軸受平面部内だけに設けた例であり、同様の効果
がある。
This is an example in which the groove 7 is provided only within the flat surface of the bearing, and the same effect can be obtained.

第5図及び第6図に本発明の他の実施例を示す。Other embodiments of the present invention are shown in FIGS. 5 and 6.

溝7で区切られた軸受平面部の各レール幅Qa。Each rail width Qa of the bearing flat portion separated by the groove 7.

QbをQa#Qb、Qa’≠Qb’ とした例である。This is an example in which Qb is Qa#Qb, Qa'≠Qb'.

第7図及び第8図に本発明の他の実施例を示す。Other embodiments of the present invention are shown in FIGS. 7 and 8.

溝7にスライダの流入側と流出側に各1つずつ旦つの貫
通孔8を設けた例である。
This is an example in which one through hole 8 is provided in the groove 7, one each on the inflow side and the outflow side of the slider.

第9図及び第10図に本発明の他の実施例を示す。軸受
平面部内に設けた溝7部の流入側7aと流出側7bにそ
れぞれ貫通孔8を設けた例である。
Other embodiments of the present invention are shown in FIGS. 9 and 10. This is an example in which through-holes 8 are provided on the inflow side 7a and the outflow side 7b of the groove 7 provided in the flat surface of the bearing.

以上のように楕成することにより、第1の効果として、
実質上のレール幅を小さくすることにより、スライダの
浮上時の軸受特性、特に高周波数領域の特性を向上でき
、スライダを安定浮上させることができる。
By forming an ellipse as described above, the first effect is,
By reducing the actual rail width, the bearing characteristics when the slider is floating can be improved, especially the characteristics in the high frequency region, and the slider can be stably floated.

第2の効果として、溝部に設けた貫通孔により気体軸受
レール部に侵入した塵埃類の排出が可能となるため、塵
埃付着が少なくでき、信頼性向上の効果がある。
The second effect is that the through holes provided in the grooves make it possible to discharge dust that has entered the gas bearing rail, reducing the amount of dust attached and improving reliability.

第3の効果として、溝を気体軸受レールの流出端まで通
じない構造としているため、気体軸受レール流出端面に
薄膜ヘッドを実装可能であり、流出端部の気体軸受レー
ルのレール幅をせまくすることなしに、押付荷重をふや
すことなしに、低浮上量が達成、できる。
As a third effect, since the groove does not reach the outflow end of the gas bearing rail, it is possible to mount a thin film head on the outflow end surface of the gas bearing rail, making it possible to narrow the rail width of the gas bearing rail at the outflow end. A low flying height can be achieved without increasing the pressing load.

〔発明の効果〕〔Effect of the invention〕

以上説明したように1本発明によれば、軸受動特性が侵
れ安定浮上し、塵埃付着の少ないヘッドスライダを得る
ことができる。
As described above, according to the present invention, it is possible to obtain a head slider that has a stable shaft-passive characteristic, floats stably, and has little dust adhesion.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の平面図、第2図は第1図の
n−n’線断面図、第3図は本発明の他の実施例の平面
図、第4図は第3図の側面図、第5図は本発明の更に他
の実施例の平面図、第6図は第5図のVI−Vl’線断
面図、第7図は本発明の更に他の実施例の平面図、第8
図は第7図の■−■′線断面図、第9図は本発明の更に
他の実施例の平面図、第10図は第9図の側面図、第1
1図は、従来のスライダの斜視図、第12図は第11図
の側面図、第13図は他の従来のスライダの平面図、第
14図は第13図の側面図、第15図はスライダのレー
ル幅と押付荷重の関係の説明図、第16図は、スライダ
レール幅と軸受減衰係数の関係を示す説明図である。 1・・・スライダ、2・・・スロット、3・・・軸受平
面部。 4・・・軸受傾斜面、5・・・気体軸受レール、6・・
・磁気ヘッド、7・・・溝、8・・・貫通孔、9・・・
薄膜磁気ヘツ第1図 V 第 Z 図 慕3図 74図 第 5 図 百6図 冨 7riU ’gg図 Z q 図 /b 羽 lρ 図 111図 772図 %  13  目 第14  図 3  津山べt+ar9p   6 ン撃ガ莢う4俵々
しヘヅp藁 15  図 し−ルア昌  Jg (川m9
FIG. 1 is a plan view of one embodiment of the present invention, FIG. 2 is a sectional view taken along line nn' in FIG. 1, FIG. 3 is a plan view of another embodiment of the present invention, and FIG. 3 is a side view, FIG. 5 is a plan view of still another embodiment of the present invention, FIG. 6 is a sectional view taken along the line VI-Vl' of FIG. 5, and FIG. 7 is a still another embodiment of the present invention. Plan view, No. 8
The figures are a sectional view taken along the line ■-■' of FIG. 7, FIG. 9 is a plan view of still another embodiment of the present invention, FIG. 10 is a side view of FIG.
Figure 1 is a perspective view of a conventional slider, Figure 12 is a side view of Figure 11, Figure 13 is a plan view of another conventional slider, Figure 14 is a side view of Figure 13, and Figure 15 is a side view of Figure 11. FIG. 16 is an explanatory diagram showing the relationship between slider rail width and pressing load. FIG. 16 is an explanatory diagram showing the relationship between slider rail width and bearing damping coefficient. 1...Slider, 2...Slot, 3...Bearing flat part. 4... Bearing inclined surface, 5... Gas bearing rail, 6...
・Magnetic head, 7... Groove, 8... Through hole, 9...
Thin film magnetic head Figure 1 V Figure Z Figure 3 Figure 74 Figure 5 Figure 106 Figure 7riU 'gg Figure Z q Figure/b Feather lρ Figure 111 Figure 772 Figure % 13th Figure 14 Figure 3 Tsuyama bet+ar9p 6 Shooting pods 4 bales of hedup straw 15 diagram - Lua Masa Jg (kawa m9

Claims (1)

【特許請求の範囲】 1、ヘッドと、このヘッドを、回転する記録媒体に対向
して保持するための気体軸受による浮上手段を有するヘ
ッドスライダにおいて、 前記浮上手段に、この浮上手段の長手方向に沿つて流出
端まで達しない少くとも1つ以上の溝を設け、この溝部
にスライダ部材の浮上手段の面以外の面まで達する貫通
孔を1つ以上設けたことを特徴とするヘッドスライダ。 2、貫通孔を、スライダ部材の浮上手段面の背面に貫通
させたことを特徴とする特許請求の範囲第1項記載のヘ
ッドスライダ。 3、貫通孔を、浮上手段の長手方向溝の流出端側に設け
たことを特徴とする特許請求の範囲第1項又は第2項記
載のヘッドスライダ。
[Claims] 1. In a head slider having a head and a floating means using a gas bearing for holding the head facing a rotating recording medium, the floating means has the following features: 1. A head slider characterized in that at least one groove is provided along the slider member that does not reach the outflow end, and the groove portion is provided with one or more through holes that reach a surface other than the surface of the floating means of the slider member. 2. The head slider according to claim 1, wherein the through hole is formed through the back surface of the floating means surface of the slider member. 3. The head slider according to claim 1 or 2, wherein the through hole is provided on the outflow end side of the longitudinal groove of the floating means.
JP1843987A 1987-01-30 1987-01-30 Head slider Pending JPS63187478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1843987A JPS63187478A (en) 1987-01-30 1987-01-30 Head slider

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1843987A JPS63187478A (en) 1987-01-30 1987-01-30 Head slider

Publications (1)

Publication Number Publication Date
JPS63187478A true JPS63187478A (en) 1988-08-03

Family

ID=11971671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1843987A Pending JPS63187478A (en) 1987-01-30 1987-01-30 Head slider

Country Status (1)

Country Link
JP (1) JPS63187478A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6744601B2 (en) * 2000-10-04 2004-06-01 Seagate Technology Llc Slider having leading surface for contaminant deflection
KR100441417B1 (en) * 2001-08-01 2004-07-22 김대은 Contamination reduction structure of optical for Information storage Device head
US9704523B1 (en) * 2016-01-07 2017-07-11 Western Digital Technologies, Inc. Slider with tunnel feature

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59186170A (en) * 1983-04-08 1984-10-22 Toshiba Corp Floating head slider
JPS59221870A (en) * 1983-05-31 1984-12-13 Mitsubishi Electric Corp Floating slider

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59186170A (en) * 1983-04-08 1984-10-22 Toshiba Corp Floating head slider
JPS59221870A (en) * 1983-05-31 1984-12-13 Mitsubishi Electric Corp Floating slider

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6744601B2 (en) * 2000-10-04 2004-06-01 Seagate Technology Llc Slider having leading surface for contaminant deflection
KR100441417B1 (en) * 2001-08-01 2004-07-22 김대은 Contamination reduction structure of optical for Information storage Device head
US9704523B1 (en) * 2016-01-07 2017-07-11 Western Digital Technologies, Inc. Slider with tunnel feature
US9865284B2 (en) 2016-01-07 2018-01-09 Western Digital Technologies, Inc. Fabrication process for slider with extended three-dimensional air-bearing surface
US9886976B2 (en) 2016-01-07 2018-02-06 Western Digital Technologies, Inc. Slider with extended three-dimensional air-bearing surface

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