JPH1069748A - Floating head slider - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a slider having few float dispersion by combining an inlet part and outlet part in the same surface and providing with a combining part wherein the spread width of a gas bearing rail surface is narrower than the inlet part and outlet part. SOLUTION: Bitten part are formed in the combining part C, and the rail width W3 of the combining part C is formed narrower than the width W1 of the inlet side part A and the width W2 of the outlet side part B. As the gas entered the gas bearing rail 3 moves from the tilted surface part 31 being a pressure rising means to a flat surface 32, it is rapidly compressed and reached the combining part C, and a large pressure is produced in the side part A. Since the spread width of the rail surface is narrow in the combining part 3, one part of the gas is directly made to flow outside the rail 3. Also, although the residual gas advancing through the combining part C is successively compressed, it easily made to flow out in the rail width direction because of the narrow rail width. As the result of it, the bad affect due to the compressibility of the gas is prevented, the damping characteristic is improved, the suitable pressure is produced in the combining part, next the gas is compressed in the outlet side part to produce a large pressure.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating head slider, such as a magnetic disk drive, which floats on a surface of a running recording medium to a minute flying height, and particularly has a good flying characteristic.
The present invention relates to a floating slider suitable for mass production.

[0002]

2. Description of the Related Art As a conventional floating head slider for a magnetic disk drive, for example, as disclosed in Japanese Patent Publication No. 57-569, a pair of straight lines having a flat portion on both sides of a slider and an inclined surface portion on a gas inflow side are known. A so-called tapered flat slider provided with a gas bearing rail is used. A bleed portion cut between the two gas bearing rails to a sufficient depth so as not to generate a gas bearing effect. The actual depth of the bleed portion is 100 μm or more at the boundary with the gas bearing rail.

Another example is disclosed in Japanese Patent Application Laid-Open No. 62-23 / 1987.
No. 1481 is disclosed. this is,
The rail width on the gas inflow side of the gas bearing rail is wider than the other rail widths.

In such a slider, since the gas bearing rail is straight, the groove of the bleed portion is formed by mechanical grinding such as a slicer, or the slider body has a flat plate having a floating surface formed of glass. It is made by fixing with a fixing agent such as.

[0005]

Recently, there has been a demand for miniaturization of the target flying height in response to the increase in the density of the device. With the miniaturization of the flying height, it has become necessary to reduce the size of the slider and to minimize the intersection of each dimension in order to reduce the fluctuation of the allowable flying height and suppress the variation in the flying height.

As the flying height is reduced, the effect of compressibility on the gas bearing action of the gas bearing rail becomes more and more remarkable. The possibility of occurrence is also emerging.

Further, as the flying height becomes smaller and the slider becomes smaller, the rail width of the gas bearing rail must be narrowed. As a result, it is difficult to mount the thin film head on the outflow end of the gas bearing rail. Become.

Further, in a structure in which the rail width on the gas inflow side of the gas bearing rail is wider than that of the other gas bearing rails, the gas bearing area on the outflow end side is small. Rigidity in the vertical and horizontal directions, as well as in the pitching direction of the slider at the end, is reduced, which causes a problem that the flying height variation increases as compared with the conventional tapered flat slider.

Further, when the slider is manufactured by mechanical grinding, it is difficult to control the dimensional intersection in units of micrometers, and it is easy for defects to occur during the processing.

Further, when the slider is manufactured by fixing the slider body and the flying surface portion which are separately manufactured, there are problems such as an alignment error due to the fixing, deformation of the flying surface, and mass productivity.

As described above, the conventional slider and the method of manufacturing the slider have problems in flying stability and dynamic characteristics of flying, and also have problems in high accuracy and mass productivity.

[0012] An object of the present invention is to reduce the variation in floating,
An object of the present invention is to provide a floating head slider which has good dynamic characteristics of flying (particularly pitching rigidity and damping characteristics of a gas bearing) and can be manufactured with high accuracy and high mass productivity.

Further, the present invention provides a floating head slider which exhibits the same dynamic characteristics of flying and can be machined.

The slider is mass-produced with high precision.
Another object is to provide an inexpensive mass-production method.

[0015]

SUMMARY OF THE INVENTION It is an object of the present invention to provide an inflow side for generating a large pressure on a pair of gas bearing rails for floating a slider, an outflow side for generating a high pressure on an outflow side, and the inflow side. And the outflow side portion are connected on the same surface, and the gas bearing rail surface is composed of three portions having a smaller total width than the inflow side portion and the outflow side portion, and both boundaries in the width direction of each gas bearing rail. One of the two sides is achieved by forming a substantially straight line.

Another object of the present invention is attained by processing the brive portion of the head slider by both etching such as sputtering of a shallow groove and mechanical grinding such as a slicer of a straight deep groove.

Another object of the present invention is achieved by forming a gas bearing rail shape on a slider substrate by forming a sliding resistant film by a printing technique or a thin film manufacturing technique such as sputtering.

The gas bearing rail is composed of three portions, an inflow side portion, an outflow side portion, and a connection portion. The connection portion has a shape in which the total width is narrower than other portions. With this configuration, the gas that has flowed into the gas bearing rail is rapidly compressed from the pressure increasing means such as the inclined surface portion as it progresses to the flat portion, reaches the joint portion, and generates a large pressure on the inflow side portion. Part of the gas directly flows out of the bearing rail because the total width of the rail surface is narrow at the joint. In addition, the remaining gas that proceeds in the joint portion is continuously compressed, but easily flows out in the rail width direction because the rail width is narrow. As a result, the gas compression body is prevented from being adversely affected, damping characteristics are improved, and an appropriate pressure is generated at the joint. At the next outflow side, the gas that has proceeded through the joint because the rail width has been widened again and the gas that has flowed out of the bearing rail at the joint advances to the outflow side and is compressed to generate a large pressure. Here, by reducing the depth of a portion lower than the bearing rail surface provided for forming the coupling portion (for example, several tens μm or less), the damping characteristic can be improved by the effect of reducing the step on the outflow side portion. . In addition, 1kHz
There is also an effect of increasing the gas bearing stiffness for the above frequencies. The phenomenon that the damping characteristics deteriorate due to the adverse effect of the compressibility due to the high compression on the gas bearing rails becomes more remarkable as the flying height becomes smaller.

With this configuration, even if the flying height is reduced (for example, 0.2 μm or less), the degree of compression of the gas is suppressed to a small value, and the gas has high damping characteristics and avoids unstable floating behavior.
Further, a pressure distribution is formed which forms a pressure peak due to the gas bearing action before and after the slider, so that the pitching rigidity of the gas bearing can be increased.

Further, the rolling rigidity of the gas bearing can be increased by providing a straight portion outside the gas bearing rail in the width direction and providing the connecting portion outside the slider in the width direction.

Further, by forming the connecting portion inside the slider in the width direction by setting the inside in the width direction of the gas bearing rail to be a straight line, the connecting portion can be formed by machining.

By forming the boundary between the gas bearing rails with a shallow step, non-machining such as sputter etching becomes possible, and the crossing of each dimension can be reduced, and the variation in flying height can be suppressed.

Further, by providing a straight deep groove bleed portion in the bleed portion, the above-mentioned shallow groove depth can be further reduced, so that the processing time of the shallow groove portion can be reduced and the dimensional accuracy can be improved.

Further, by forming the gas bearing rail by a thin film manufacturing technique such as sputtering, it is possible to accurately form a film having excellent sliding resistance.

Further, by forming the gas bearing rails by the printing technique, a large number of films having excellent sliding resistance can be produced accurately and inexpensively.

In this structure, it is needless to say that the flying attitude of the slider can be controlled without changing the load application position by selecting the shape of the three parts of the gas bearing rail.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. The gas bearing rail 3 is a flat part 3
1 and an inclined surface portion 32 provided on the gas inflow side. The gas bearing rails 3 are provided on both sides of the air bearing surface of the slider body 1.
The recording / reproducing head 2 is arranged at the outflow end of the gas bearing rail 3 according to the gas flow method. The gas bearing rail 3 forms the outer boundary of the slider body 1 with a straight line, and has an inflow side portion A, an outflow side portion B, and a coupling portion C.
It consists of three parts. A biting portion is formed at the connecting portion C, and the rail width W3 of the connecting portion C is smaller than the width W1 of the inflow side portion A and the width W2 of the outflow side portion B (W1 ≒ W2).
> W3) formed. On the other hand, between the pair of gas bearing rails 3 described above, a bleed portion 5 having a boundary with these and having a depth D1 is provided. The value of the depth D1 is 10 to 2
The thickness is about 0 μm, which is smaller than the conventional value of 80 to 200 μm. The boundary between the bleed portion 5 of the shallow groove and the gas bearing rail 3 has a parallel portion having a rail width in a part of the three portions, and the boundary between the portions is connected by a smooth curve.

According to the present embodiment, since the gas bearing rails 3 are formed at the both ends of the slider body 1, the roll rigidity of the gas bearing can be increased, and the fluctuation of the flying height during seeking can be suppressed. Can be. Further, in this configuration, the gas flowing into the gas bearing rail 3 is rapidly compressed as it goes from the inclined surface portion 31 as the pressure increasing means to the flat surface portion 32, reaches the joint portion C, and generates a large pressure on the inflow side portion A. I do. At the joint C, a part of the gas directly flows out of the bearing rail 3 because the total width of the rail surface is configured to be narrow. In addition, the remaining gas traveling through the joint C is continuously compressed, but easily flows out in the rail width direction because the rail width is narrow. As a result, the adverse effect of gas compressibility is prevented, damping characteristics are improved, and an appropriate pressure is generated at the joint. At the next outflow side, the gas that has proceeded through the joint because the rail width has been widened again and the gas that has flowed out of the bearing rail at the joint advances to the outflow side and is compressed to generate a large pressure. Here, by reducing the depth of the bleed portion 5 which is lower than the bearing rail surface provided for forming the coupling portion (for example, several tens μm or less), the damping characteristic is improved by the effect of restricting the step on the outflow side. be able to.

Also, there is an effect of improving the damping characteristic by the throttle effect due to the tightness of the bleed portion 5 on the outflow side portion C.

Next, an outline of the pressure distribution of the present embodiment is shown in FIG. In the figure, the solid line is the pressure distribution of the present embodiment, and the broken line is the pressure distribution of the conventional tapered flat slider. In addition, the horizontal axis represents an arbitrary point d from the leading end point (gas inflow end) a of the inclined surface portion 31 of the gas bearing rail 3 to the rear end point (gas outflow end) of the plane portion 32, and the vertical axis represents pressure. I have.

As can be seen from this figure, in the case of the conventional shape shown by the broken line, the floating amount at the outflow end is reduced with the miniaturization of the floating amount.
The pressure distribution on the gas bearing rail 3 becomes the maximum pressure immediately after the end of the inclined surface portion 31 and then gradually decreases to the outflow end because the influence of the gaseous particle and compressibility is remarkably exhibited at about 2 μm or less. Becomes In this pressure distribution, the rigidity of the air film in the pitching direction (front-back direction) of the slider is small. On the other hand, in the structure of the present embodiment shown by the solid line, the pressure rises at the inclined surface portion 31 of the slider body 1 (point b in the figure), and then, in the narrow portion of the central portion, a part of the gas flows into the gas bearing rail 3. The pressure drops to flow out of the
(Point), the width of the gas bearing rail 3 expands again on the outflow end side, and the pressure also increases (point d in the figure). As a result, the slider body 1
Pressure distribution having a pressure peak before and after the gas bearing rail 3 and the area of the region is also large,
The rigidity of the air film in the pitching direction of the slider can be increased as compared with the conventional tapered flat slider. FIG. 4 shows the relationship between the air film rigidity in the pitching direction and the flying height. In this figure, the horizontal axis represents the flying height of the slider 1, and the vertical axis represents the air film rigidity of the slider in the pitching direction. In the drawing, the solid line shows the characteristics of the slider of the present embodiment, and the broken line shows the characteristics of the conventional slider. The trapezoidal pressure distribution of the conventional slider shown by the broken line is generated as the flying height decreases and the influence of the pressure property becomes remarkable. Therefore, the air film rigidity kp in the pitching direction only slightly increases even when the flying height decreases. On the other hand, since the slider of the present embodiment can have the pressure distribution shown in FIG. 3, as the flying height decreases, the rigidity of the air film in the pitching direction can be increased as compared with the conventional slider.

FIG. 5 shows frequency characteristics of pitching rigidity. In this figure, the horizontal axis indicates frequency, and the vertical axis indicates air film rigidity of the slider in the pitching direction. In the figure, the solid line shows the characteristics of the slider of this embodiment, the broken line shows the characteristics of the conventional tapered flat slider, and the dashed line shows the characteristics of the conventional shaped rail slider. In the slider of the present embodiment, kp is further increased in the high frequency range, and the response to disk protrusions and the like can be improved.

Another problem with miniaturization of the flying height is the flying stability due to the compressibility of gas. FIG.
Figure 6 shows the results of evaluation of flying stability. FIG. 6 shows values calculated from the perturbation solution (bearing rigidity and damping coefficient) of the lubrication equation of the slider and the equation of motion of the slider by the Routh-Hurwitz stability determination. The horizontal axis represents a two-dimensional compression coefficient Ab = 6 μUlx / {pa · (hm) 2} · (lb / lx) 2 representing the degree of compressibility of the slider. , And the vertical axis indicates frequency. The frequency is plotted on the vertical axis because the bearing stiffness and the damping coefficient depend on the frequency. In the figure, SA is a floating stable area, and IA is an unstable area. The slider of the present invention is stable at a two-dimensional bearing compression coefficient Ab of 10 or less (indicated by P2 in the figure), but when it is 10 or more, there is an unstable area IA, and when the compression coefficient Ab is further increased, It can be seen that the area is further expanded. In the case of the conventional slider, when the flying height is about 0.15 μm or less, the compression characteristic Ab becomes a value of about 10 or more (point P1 in the figure), which is an unstable area IA. This tendency is remarkable at small and large loads.

FIG. 7 shows the frequency characteristics of the main components C11 and C22 of the pitching, the upper and lower of the air film attenuation coefficient. In the figure, the horizontal axis represents frequency, and the vertical axis represents air film attenuation coefficient. In the drawing, the solid lines indicate C11 and C11 of the slider of this embodiment.
C22, broken lines indicate C11 and C22 of the conventional taper slider,
The alternate long and short dash line is C11 of the conventional shaped rail slider.
It can be seen that the slider of this embodiment has about three times the attenuation characteristic of the conventional tapered flat slider (TF in the drawing) showing C22 and about twice the attenuation characteristic of other conventional shaped rail sliders.

In the slider of the present embodiment, the equivalent gas bearing rail width can be reduced by improving the damping characteristics and providing the coupling portion C, and the average flying height hm can be increased without changing the pivot position. Bearing compression coefficient Ab
Can be reduced, and occurrence of floating instability under practical operating conditions can be prevented.

The blade portion 5 has a configuration in which the width is widened and narrowed in the gas inflow direction. Practically, the groove depth D1 is suppressed to about 20 .mu.m, which is smaller than that of the conventional type, in consideration of the floating variation with respect to the processing accuracy.

With this configuration, the flying surface shape can be processed by non-machining such as sputter etching, and a slider that has a small flying variation, high pitching rigidity, and stable flying can be obtained by high precision processing.

In addition, with this configuration, the mounting of the thin film transducer is not restricted by the shape of the slider and the rail width of the gas bearing rail 3 due to the pressing load, and the mounting of the thin film head with performance priority can be performed.

Further, in the present configuration, even when the angle between the slider and the medium running direction (hereinafter abbreviated as yaw angle) is formed in the rotary actuator type device, the flying height and the flying characteristics with respect to the yaw angle are hardly deteriorated and the conventional type is used. And better characteristics can be obtained.

Further, by connecting the three components of the gas bearing rail 3 with smooth curves, it is possible to suppress the turbulence and stagnation of the gas flow of the blade portion 5 and to prevent the adhesion and accumulation of dust.

In the embodiment described above, the boundary between the gas bearing rail 3 and the bleed portion 5 is such that the connection C of the gas bearing rail 3 is a straight line parallel to the rail width W3, and the connection C and the inflow side A, The curves are respectively smoothly connected to the outflow side portion B. However, the boundary between the gas bearing rail 3 and the bleed portion 5 is not limited to the above embodiment, and the same operation and effect can be obtained with other configurations.

That is, three partial inflow side portions A and outflow side portions B
The rail widths W1, W2, and W3 of the respective portions of the gas bearing rail 3 including the connecting portion C are formed by parallel straight lines, and are connected so as to eliminate a gradual change in the width at the boundary of each portion and to change rapidly. May be. As a result, the number of coordinate points for determining the rail shape is reduced, and the dimensional accuracy is increased in manufacturing. Except for dust adhesion due to turbulence in gas flow at the sudden change in rail width,
There is an effect similar to that of the above-described embodiment.

Further, the connecting portion C of the gas bearing rail 3 may be formed by a curve that changes gradually. This allows
It has further effects on dust adhesion. Further, the connecting portion C of the gas bearing rail 3 may be configured by a straight line that changes gradually. Further, the rail widths W1, W2 of the inflow side portion A and the outflow side portion B of the gas bearing rail 3 composed of three parts may be widened toward both ends. Further, the rail width W3 of the connecting portion C of the gas bearing rail 3 is set to the outflow side portion B.
The shape may be such that the width gradually decreases toward.

In each of the embodiments described above, the rail widths W 1, W 1,
W2 has the same width, but these rail widths W1
And W2 may be configured to be different.

For example, when the rail width W1 of the inflow side portion A is configured to be wider than the rail width W2 of the outflow side portion B, the attitude angle of the slider body 1 can be made larger and the dimensional accuracy of the flying surface can be reduced. Variation can be reduced. Further, when the rail width W2 of the outflow side portion B is made wider than the rail width W2 of the inflow side portion A, there is an effect that the bearing rigidity at the outflow side portion B is improved and the thin film head is easily mounted.

In each of the embodiments described above, the depth D 1 of the bleed portion 5 (that is, the height of the gas bearing rail 3) may be smaller than the depth D 3 of the tip of the inclined surface 4. With such a configuration, the groove depth D1 of the bleed portion 5 can be set to 5 to 10 μm in a region where the disk speed is low, so that the processing time can be reduced and the processing accuracy can be improved.

FIGS. 8 and 9 show another embodiment of the present invention. In this example, the slider 1 is provided with a linear deep groove bleed part 51 for separating the bleed part 5. The depth D2 of the deep groove bleed part 51 is 40 to
Since it is a portion other than the gas bearing rail 3, high precision is not required because it is a portion other than the gas bearing rail 3. Also, by providing the deep groove bleed part 51,
Since the influence on the floating variation is reduced, the groove depth D1 of the bleed portion 5 can be made shallow to about 5 to 15 μm, and the processing accuracy such as sputter etching of the bleed portion 5 can be reduced and the processing amount can be reduced. There is an improvement effect.

In the example shown in FIG.
A plurality 1 may be provided in the region of the bleed portion 5 with different depths.

In FIG. 8 and the above-mentioned example, the rail width W1 of the inflow side A and the outflow side B of the gas bearing rail 3 are shown.
May be changed. When the rail width W1 is larger than the rail width W2, variations in the dimensional accuracy of the air bearing surface can be reduced. When the rail width W2 is larger than the rail width W1, the bearing rigidity at the outflow side portion B can be improved, and the head can be easily mounted. Become.

In FIG. 8 and the above-described example, the groove depth D 2 of the deep groove bleed portion 51 is changed to the groove depth D 1 of the bleed portion 5.
(Ie, the height of the gas bearing rail 3) and the height of the tip of the inclined surface 4 may be smaller. With this configuration, the processing time of the gas bearing rail 3 can be reduced and the processing accuracy can be improved.

In each of the embodiments described above, the outside of the gas bearing rail 3 is formed linearly from the gas inflow side to the gas outflow side, and the rail width changes on the boundary side with the inside bleed portion. Has formed.

However, the present invention is not limited to this, and may have an inverted shape. That is, the inside of the gas bearing rail 3 of the slider main body 1 may be linear, and a recess may be provided on the outer peripheral side of the coupling portion C on the outer peripheral side to change the rail width. In this configuration, the joint recess can be machined by, for example, vertical axis surface grinding, and the bleed portion 5 can be machined by conventional horizontal axis surface grinding.

FIGS. 10 and 11 show another embodiment of the present invention. In this example, the inflow side portion A, the outflow side portion B, and the joint portion C of the gas bearing rail 3 are formed by the same rail shaft, and the joint portion C has a width between the bleed portion 5 and the gas bearing rail 3. The groove 11 which returns to the bleed portion 5 again without reaching the other end of the groove 11 is provided, whereby the separation rail portion 12 is provided. The separation rail portion 12 has a function of narrowing the rail width and further improving the damping characteristics. Further, the separation rail portion 12 prevents dust from accumulating on the rail width changing portion before and after the joint portion C.

In the example shown in FIG. 10, the groove 11 of the connecting portion C of the gas bearing rail 3 is provided on the bleed portion 5 side. Conversely, the groove 11 of the connecting portion of the gas bearing rail 3 is provided outside the slider body 1. Even if it is provided, it has substantially the same operation and effect as described above.

In each of the embodiments described above, the gas bearing rails 3 are disposed in pairs at both ends of the slider body 1, but the number of rails is not limited to two, and the flying balance is not limited. Considering this, a plurality of lines may be arranged on the object with respect to the center line of the flow, or may be arranged at the center line of the flow.

FIG. 12 shows an embodiment of a slider manufacturing method according to the present invention, in which a gas bearing rail is formed by a thin film manufacturing technique such as sputtering.

This is an example in which a gas bearing rail film 16 is formed on a slider body 13 by a thin film manufacturing technique such as sputtering using a mask 14 provided with gas bearing rail-shaped holes 15. Regardless of the material of the slider body 13, a film having excellent sliding resistance can be manufactured with high precision and with good mass productivity.

FIG. 13 shows another embodiment of the method of manufacturing the slider according to the present invention, in which the shape of the gas bearing rail is formed by a printing technique.

A transfer letterpress 19 for printing in a gas bearing rail shape is set on the printing roller 17.
The slider main body 13 is set on a table 20, pressure-printed by a printing roller 17 via a transfer film tape 18, and a part of the transfer film tape 18 is transferred onto the slider body 13, and the gas bearing rail is used. A film 16 is formed. According to this method, the floating head slider can be mass-produced and manufactured in large quantities at low cost.

FIG. 14 is a plan sectional view of a linear rotary disk storage device to which the floating head slider according to the present embodiment is mounted. The guide arm 9 is connected to the carriage 33, and the head support device 8 is connected to the guide arm 9,
The floating head slider 1 is mounted on the tip of the head support device 8. The slider 1 has a voice coil motor 35.
To move in the radial direction of the rotating disk storage medium 7. According to the present embodiment, the flying height of the slider and the variation in the flying height are small and the flying is stable, so that the flying height of the slider can be reduced, and high-density storage of a storage medium can be realized.

FIG. 15 is a partially crushed perspective view of an in-line type rotary disk storage device to which the floating head slider 1 according to the present embodiment is mounted, which is mounted at the tip of a head support device 8 connected to a carriage 33. 1 shows a floating head slider 1 according to the present invention. A similar effect was obtained by this embodiment.

In each of the embodiments described above, the pressure distribution on the slider flying surface can be polarized at the outermost portion of the slider or at the four corners of the slider, so that high rigidity in the rolling direction or high pitching rigidity can be obtained. or,
By improving the damping characteristics and substantially lowering the two-dimensional compression coefficient, it is possible to avoid floating instability and to stably fly. By performing this configuration by non-mechanical processing such as sputtering, the dimensional accuracy can be increased, and variations in flying height can be reduced.

Further, by forming the bleed portion in two steps of a shallow groove and a deep groove, it is possible to use both non-mechanical processing such as machining of the deep groove and sputtering of the shallow groove. Accuracy can be improved.

Further, by providing the coupling portion recess on the outer portion of the slider body, the gas bearing rail can be formed by machining.

Further, the damping characteristics can be further improved by forming the coupling portion using the groove.

[0066]

As described above, according to the present invention,
It is possible to obtain a slider with little flying variation and good floating dynamic characteristics. Further, the slider can be mass-produced with high accuracy and at low cost.

[Brief description of the drawings]

FIG. 1 is a plan view of one embodiment of the present invention.

FIG. 2 is a sectional view taken along line I-II of FIG.

FIG. 3 is an explanatory diagram showing a pressure distribution on a floating surface.

FIG. 4 is an explanatory diagram showing the relationship between the flying height and the rigidity of the air film in the pitching direction.

FIG. 5 is an explanatory diagram showing a frequency characteristic of the air film rigidity kp in the pitching direction.

FIG. 6 is an explanatory diagram showing a floating stability determination result.

FIG. 7 is an explanatory diagram showing a frequency characteristic of an attenuation coefficient of an air film.

FIG. 8 is a plan view showing another embodiment of the present invention.

FIG. 9 is a sectional view taken along line IX-IX in FIG. 8;

FIG. 10 is a plan view of still another embodiment of the present invention.

FIG. 11 is a sectional view taken along line IX-IX in FIG. 10;

FIG. 12 is a diagram illustrating an example of a method for manufacturing a slider according to the invention.

FIG. 13 is a view for explaining another example of the method for manufacturing a slider according to the present invention.

FIG. 14 is a diagram showing a magnetic disk drive on which the slider of the present invention is mounted.

FIG. 15 is a diagram showing a magnetic disk drive on which the slider of the present invention is mounted.

[Explanation of symbols]

1 ... Slider body, 2 ... Transducer,
3 ... gas bearing rail, 5 ... bleed part, 12 ...
Separation rail section, 14: mask, 16: gas bearing rail film, 17: printing roller, 18: transfer film tape, 20: table, 31: inclined surface portion,
32: flat part, 51: deep groove bleed part.

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Katsuyuki Tanaka 502 Kandachi-cho, Tsuchiura-city, Ibaraki Pref.Mechanical Research Laboratory, Hitachi, Ltd. Within the Storage System Division (72) Inventor Hiroshi Daito 2880 Kozu, Odawara City, Kanagawa Prefecture Within Hitachi Storage Systems Division, Ltd. (72) Inventor Tetsuo Maskawa 2880 Kozu, Kozu, Odawara City, Kanagawa Prefecture Within the Hitachi Storage Systems Division

Claims (9)

[Claims] A slider body disposed opposite to a rotating recording medium; and a slider body formed on a surface of the slider body facing the recording medium, the pressure being generated by a gas flow accompanying the rotation of the recording medium. A floating head slider comprising: a pair of gas bearing rails for floating a gas bearing rail; and a bleed portion formed between the pair of gas bearing rails so as to be depressed from the gas bearing rail surface. An inflow side that generates pressure by an inclined surface portion serving as a pressure increasing means and a flat surface portion that follows the inflow side, an outflow side portion that generates pressure on the outflow side, and the inflow side portion and the outflow side portion are flush with each other. A floating head slider comprising: a connecting portion having a smaller total width of the gas bearing rail surface than the inflow side portion and the outflow side portion. 2. A slider main body arranged to face a rotating recording medium, and a slider main body formed on a surface of the slider main body facing the recording medium, the pressure being generated by a gas flow accompanying the rotation of the recording medium, thereby causing the slider main body to move. A floating head slider comprising: a pair of gas bearing rails to be floated; and a bleed portion formed between the pair of gas bearing rails and having a boundary with the gas bearing rail and formed to be depressed from the gas bearing rail surface. The gas bearing rail of the present invention has an inflow side portion that generates pressure on the inflow side of the gas flow and includes an inclined surface portion that is pressure increasing means and a flat surface portion that follows it, an outflow side portion that generates pressure on the outflow side, and the inflow side. Part and the outflow side part are connected on the same plane, and the gas bearing rail surface has a smaller total width than the inflow side part and the outflow side part. A floating head slider, wherein the bleed portion having the boundary is separated by a linear deep groove bleed portion. 3. The floating head according to claim 1, wherein the gas bearing rail is configured so that a rail width at an inflow side portion and a rail width at an outflow side portion are different. Slider. 4. A slider body disposed opposite to a rotating recording medium, and a slider body formed on a surface of the slider body facing the recording medium, the pressure being generated by a gas flow accompanying the rotation of the recording medium. A floating head slider comprising: a pair of gas bearing rails for floating a gas bearing rail; and a bleed portion formed between the pair of gas bearing rails so as to be depressed from the gas bearing rail surface. An inflow side that generates pressure by an inclined surface portion serving as a pressure increasing means and a flat surface portion that follows the inflow side, an outflow side portion that generates pressure on the outflow side, and the inflow side portion and the outflow side portion are flush with each other. And a groove that returns to the same side again from one of the width directions of the gas bearing rail without standing at the other end, whereby the coupling portion is formed. of A floating head slider, wherein the total width of the surface of the gas bearing rail is narrower than the inflow side portion and the outflow side portion. 5. A head slider having a gas bearing function for mounting a magnetic head, wherein the head slider has a gas bearing action surface of a slider body constituting the head slider, the gas slider having a gas bearing action extending from a gas inflow side to an outflow side of the slider body. A pair of gas bearing rails is provided, and this gas bearing rail is composed of a gas inflow side, a gas outflow side, and a connecting portion for connecting these, and the connecting portion has two side surfaces along the gas flow direction. A floating head slider, characterized in that any one of the side surfaces has a recessed portion, and the rail width of the connecting portion is narrower than the rail width of the inflow side portion and the outflow side portion. 6. A method of manufacturing a floating head slider having a gas bearing function for mounting a magnetic head, comprising: an inflow side portion, an outflow side portion, and a combination thereof on a gas bearing operation surface of a slider body. A mask having a gas bearing rail shape hole having a width smaller than the width of the inflow side portion and the outflow side portion is superimposed, and a thin film forming process is performed on the mask by using a thin film manufacturing technique. And removing the next mask to form a gas bearing rail on the gas bearing working surface of the slider body. 7. A method of manufacturing a floating head slider having a gas bearing function for mounting a magnetic head, wherein the inflow side portion and the outflow side portion are connected to each other, and the width thereof is set to the inflow side portion. And a transfer relief plate in the form of a gas bearing rail comprising a connection portion narrower than the width of the outflow side portion, disposed so as to press the printed body formed on the surface through the transfer film body against the slider body, A part of the transfer film body is transferred to the slider body by pressurizing the print body to the slider body, whereby a gas bearing rail is formed on the gas bearing working surface of the slider body. Production method. 8. A floating head slider having a gas bearing function for mounting a magnetic head, wherein at least two gas bearing rails formed by etching and mechanical grinding are provided between said gas bearing rails. A floating head slider having a bleed part formed by processing. 9. A recording medium on which information is recorded, a head slider for mounting a head for recording information on the recording medium and reproducing the information, a supporting device for supporting the head slider, A carriage for moving the head slider to a predetermined position on the recording medium via a support device, wherein the head slider has a gas bearing rail on a gas bearing working surface thereof; And an outflow side portion, and a coupling portion having a width smaller than the width of the inflow side portion and the outflow side portion.