JP2000353370A - Magnetic head slider capable of controlling floating amount by pressure control groove formed in negative pressure groove, and magnetic disk device having the same loaded - Google Patents

Abstract

PROBLEM TO BE SOLVED: To control the floating amount of a magnetic head slider by a pressure control groove formed in the negative pressure groove of the magnetic head slider. SOLUTION: A slider 1 is provided with rail surfaces 6, 7 and 11, step bearings 5, 8 and 9 deeper than the rail surfaces, a floating surface 3 composed of a negative pressure groove 12 deeper than each of the step bearings, an air inflow end 2, and an air outflow end 4. The slider is further provided with a front pad 13 formed by the rail surface and the step bearing in the air inflow end side, a rear pad formed from the rail surface and the step bearing in the air outflow end side and separated from the front pad by the negative pressure groove 12, a magnetic transducer 19 provided near the air outflow end of the rail surface of the rear pad, and a pressure control groove 30 formed in the negative pressure groove in the air inflow side of the rear pad so as to be deeper than the negative pressure groove. The pressure control groove forms a region surrounded with a straight line or a curve formed in the negative pressure groove, to reduce the amount of floating near the air outflow end.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider, and more particularly, to a magnetic head slider capable of controlling a flying height of a slider by a pressure control groove formed in a negative pressure groove of the magnetic head slider. And a magnetic disk drive equipped with the magnetic head slider.

[0002]

2. Description of the Related Art In a magnetic disk drive, a magnetic head slider that floats on a rotating disk recording medium while maintaining a small interval is used. Usually, a magnetic head slider is provided with a magnetic transducer for recording / reproducing information on / from a disk recording medium at an air outflow end of the slider. In order to increase the recording density, it is necessary to increase the bit density and further increase the track width. It is required to be narrow.

Further, it is required to fly the magnetic head slider in a low flying state as close to the disk recording medium as possible. In order to realize data recording / reproduction with sufficient reliability in a low flying state, it is important to keep the flying height change of the magnetic head slider, that is, the flying height variation small.

In order to reduce the variation in the flying height of the magnetic head slider, it is effective to use a negative pressure slider as the magnetic head slider, and it is widely used. Since the negative pressure slider has a high rigidity of an air film generated between the disk recording medium and the flying surface of the slider, the load, attitude angle of the suspension supporting the slider, vibration of the suspension, undulating vibration of the disk recording medium, etc. The variation in the flying height of the slider caused by the disturbance can be reduced, which is effective for lowering the flying height.

However, the demand for lowering the flying height of the magnetic head slider has been increasing year by year, and it has been required to reduce the flying height as much as possible without causing contact with the disk recording medium. The flying height has reached 20 nm or less. I have.

As a means for realizing such a low flying height, the CSS system in which the magnetic head slider is started and stopped on the conventional disk recording medium has been reviewed, and the load / unload mechanism which retracts the magnetic head slider from the disk recording medium when the apparatus is stopped. The adoption of the load method is progressing. By adopting this load / unload method, it is possible to eliminate the protrusion on the disk recording medium (which comes into contact with the slider when the slider stops), which hinders the low flying of the magnetic head slider, and accelerates the low flying. did. Such a head disk
In the interface, since the magnetic head slider flies very close to the disk recording medium, the flying height variation of the slider must be kept small.

Further, a large rise in the flying height when used at a temperature rise or below atmospheric pressure is also a factor that hinders a low flying height. Therefore, the sensitivity to these environmental changes must be reduced as much as possible. However, it is becoming difficult to satisfy these requirements at the same time in the conventional concept of the negative pressure slider.

In view of the above, as the negative pressure slider meeting the above-mentioned strict requirements, a step bearing having a relatively shallow negative pressure groove as compared with the conventional negative pressure slider and a submicron depth having a higher bearing effect than the taper is adopted. A negative pressure slider has been proposed. Such a negative pressure slider employs a step bearing having a submicron depth with a large air bearing effect, as described in the prior art cited in the related art,
By designing at the depth where the negative pressure generated in the negative pressure groove is maximized, it is possible to reduce the change in the flying height with respect to temperature and atmospheric pressure changes, and by using a large negative pressure compared to the conventional negative pressure slider In addition, it has a feature that the rigidity of the air film is further increased and the variation in the flying height caused by the load of the suspension and the change in the attitude angle is small.

However, the processing accuracy of the step bearing having a submicron depth employed in the negative pressure slider has a large effect on the flying height variation, and accounts for more than half of the causes of the flying height variation. Very strict processing accuracy is required.

[0010] Further, since this step bearing is usually formed by a processing method such as ion milling, the quantity processed at a time is large, and an average shift of the flying height appears in lot units. This causes the quality of the step bearing in the machining process to greatly affect the flying yield of the magnetic head slider, and causes a problem in terms of cost.

Also, there are variations in the flying height due to processing other than the step bearing, and these are also hindrance factors for lowering the flying height of the magnetic head slider. However, time and expense are required to increase the precision of the processing technology, so a method of compensating for the change in flying height caused by the processing of the magnetic head slider in the current processing process will be necessary for lowering the flying height in the future It has been.

[0012]

SUMMARY OF THE INVENTION An object of the present invention is to provide a pressure control groove formed in a negative pressure groove of a magnetic head slider,
It is an object of the present invention to provide a magnetic head slider that controls the flying height of a slider by controlling the size, depth, and formation position, thereby reducing the variation in the flying height of the slider, and a magnetic disk device equipped with the magnetic head slider. is there.

[0013]

In order to solve the above problems, the present invention mainly employs the following configuration.

In a magnetic head slider having a floating surface including a rail surface, a step bearing deeper than the rail surface, and a negative pressure groove deeper than the step bearing surface, an air inflow end and an air outflow end, On the inflow end side, a front pad formed by the rail surface and the step bearing, and on the air outflow end side, formed by the rail surface and the step bearing, and separated by the front pad and the negative pressure groove. A rear pad, a magnetic transducer provided near the air outflow end of the rail surface of the rear pad, and a pressure control groove formed deeper than the negative pressure groove in the negative pressure groove on the air inflow side of the rear pad. The pressure control groove forms a region surrounded by a straight line or a curve in the negative pressure groove, and reduces a floating amount near the air outflow end. Head slider.

A rail surface, a step bearing deeper than the rail surface, a negative pressure groove deeper than the step bearing surface,
A magnetic head slider having an air bearing surface, an air inflow end, and an air outflow end, wherein a front pad formed by the rail surface and the step bearing is provided on the air inflow end side; On the side, a rear pad formed with the rail surface and the step bearing, and separated by the front pad and the negative pressure groove, and a magnetic transducer provided near the air outflow end of the rail surface of the rear pad, A pressure control groove deviated from the air inflow path to the rear pad and having a high pressure gradient in the negative pressure groove, a pressure control groove formed deeper than the negative pressure groove, wherein the pressure control groove has a straight line and / or a curved line. A magnetic head slider that forms an enclosed area in the negative pressure groove and increases a flying height near the air outflow end.

A rail surface, a step bearing deeper than the rail surface, a negative pressure groove deeper than the step bearing surface,
A magnetic head slider having an air bearing surface, an air inflow end, and an air outflow end, wherein a front pad formed by the rail surface and the step bearing is provided on the air inflow end side; On the side, a rear pad formed with the rail surface and the step bearing, and separated by the front pad and the negative pressure groove, and a magnetic transducer provided near the air outflow end of the rail surface of the rear pad, A negative pressure groove surrounded by the front pad, a pressure control groove formed deeper than the negative pressure groove, wherein the pressure control groove forms a region surrounded by a straight line and / or a curve in the negative pressure groove; And a magnetic head slider for reducing the flying height on the air inflow end side.

A rail surface, a step bearing deeper than the rail surface, a negative pressure groove deeper than the step bearing surface,
A magnetic head slider having an air bearing surface, an air inflow end, and an air outflow end, wherein a front pad formed by the rail surface and the step bearing is provided on the air inflow end side; On the side, a rear pad formed with the rail surface and the step bearing, and separated by the front pad and the negative pressure groove, and a magnetic transducer provided near the air outflow end of the rail surface of the rear pad, A first groove formed deeper than the negative pressure groove in the negative pressure groove on the air inflow side of the rear pad;
A pressure control groove, and a negative pressure groove surrounded by the front pad, a second pressure control groove formed deeper than the negative pressure groove, the first pressure control groove is a straight or curved line An enclosed area is formed in the negative pressure groove, a floating amount near the air outflow end is reduced, and the second pressure control groove forms an area surrounded by a straight line and / or a curve in the negative pressure groove. And a magnetic head slider for reducing the flying height on the air inflow end side.

A rail surface, a step bearing deeper than the rail surface, a negative pressure groove deeper than the step bearing surface,
A magnetic head slider having an air bearing surface, an air inflow end, and an air outflow end, wherein a front pad formed by the rail surface and the step bearing is provided on the air inflow end side; On the side, a rear pad formed with the rail surface and the step bearing, and separated by the front pad and the negative pressure groove, and a magnetic transducer provided near the air outflow end of the rail surface of the rear pad, The negative pressure groove on the air inflow side of the rear pad includes a pressure control groove formed deeper than the negative pressure groove, and the pressure control groove forms a region surrounded by a straight line or a curve in the negative pressure groove. The magnetic head slider is formed such that the depth of the pressure control groove is related to a shape or a dimension that changes a flying height near the air outflow end.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A magnetic head slide according to a first embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a perspective view showing a magnetic head slider according to the first embodiment of the present invention, and FIG. 2 is a view showing a typical magnetic head slider in which the present invention can exhibit an effective effect.

The magnetic head slider 1 shown in FIG. 2 is provided with an air inflow end 2, a floating surface 3, and an air outflow end 4. Here, the floating surface 3 is formed by a front step bearing 5 formed continuously from the air inflow end 2, a pair of side rail surfaces 6 and 7 formed continuously from the front step bearing 5, and continuously formed from the side rail surfaces. A front pad 13 including a pair of side step bearings 8 and 9 having the same depth as the front step bearing 5 and a negative pressure groove deeper than the front step bearing 5, and a center rail surface on the air outflow end 4 side of the slider 1. And a center pad 14 comprising a rear step bearing 10 formed so as to surround the center rail surface 11 at the same depth as the front step bearing 5.

The length of the magnetic head slider 1 shown in FIG.
25mm, width is 1.0mm, thickness is 0.3mm,
The distance from the air inflow end 2 of the front step bearing 5 to the pair of rail surfaces 6 and 7 is 0.08 mm, and the depth δs of the front step bearing based on the pair of side rail surfaces 6 and 7 and the center rail surface 11 is: 150 nm. The maximum length of the pair of side rail surfaces 6 and 7 in the slider longitudinal direction is 0.45 mm, the maximum width in the slider short direction is 0.305 mm, and the maximum width is 0.6 with respect to the maximum length.
It is eight times.

FIG. 3 shows the side rail surfaces 6, 7, the center rail surface 11, the front step bearing 5, the side step bearings 7, 8, the rear step bearing 10, and the negative pressure groove 1.
FIG. 3 is a cross-sectional view taken along line AA ′ in FIG. 2 for explaining a relative relationship of FIG. In FIG. 3, the depth of the pair of side step bearings 8, 9 and the rear step bearing 10 is, as described above, the depth δs of the front step bearing 5 = 150n.
m (hereinafter, may be collectively referred to as a step bearing).

The depth R of the negative pressure groove 12 with reference to the pair of side rail surfaces 6 and 7 and the center rail surface 11 (hereinafter, may be collectively referred to as a rail surface) is 1 μm. On the center rail surface 11 of the center pad 14, a magnetic transducer 19 for recording / reproducing information on / from a disk recording medium 25 is provided.

FIG. 4 is a plan view of a magnetic disk drive 28 on which the magnetic head slider shown in FIG. 2 is mounted. The magnetic disk device 28 has a 2.5-inch disk recording medium 25 with a yaw angle change of approximately + 7 ° to −15 °. Here, the yaw angle is determined such that the slider 1 is positioned opposite the disk recording medium 25 and the slider 1 is oscillated by the rotary actuator 27 so that the slider 1 has
Is the angle between the direction in which air flows in along the circumference of the slider and the longitudinal direction of the slider 1.

The sign of the yaw angle indicates that the direction in which air flows in from the inner peripheral side of the disk recording medium 25 with respect to the longitudinal direction of the slider 1 is positive. The magnetic disk drive 28 includes a disk recording medium 25 mounted on a spindle 26 rotating at a rotational speed of 4200 rpm, and a slider 1 mounted on the tip of a suspension 20 from a rotary actuator 27 via a carriage 24 and a suspension 20. It is composed of

The slider 1 is pressed against the disk recording medium 25 by the suspension 20 with a force of 2.7 gf, and the flow of air generated by the rotation of the disk recording medium 25 enters between the slider 1 and the disk recording medium 25, thereby causing the slider 1 to move. 1 floats from the disk recording medium 25 with a flying height of about 22 nm. The slider 1 is accurately positioned on the disk recording medium 25 at an arbitrary radius of approximately 15 to 29 mm by the rotary actuator 27, and is moved by the magnetic transducer 19 mounted on the center pad 14 of the slider 1. Recording / reproduction of information is performed at an arbitrary position with respect to 25.

The air outflow end 4 of the center rail surface 11 with respect to the depth δs of the step bearing of the magnetic head slider 1 shown in FIG. 2 used in the magnetic disk device 28 shown in FIG.
FIG. 5 shows changes in the flying height in the vicinity. On the vertical axis of FIG. 5, the slider moves away from the medium as the + number increases, and the slider approaches the medium as the -number increases.

The change in the flying height shown in FIG. 5 indicates that the slider 1 is positioned on the disk recording medium 25 at a radial position of 15 mm (inner circumference), 22 mm.
(Middle circumference) and 29 mm (outer circumference). Here, the depth δ of the step bearing
The reason why s was selected as the horizontal axis is that the influence of the change in the machining amount of the step bearing on the flying height is another factor (for example, the flatness of the rail surface (usually managed as a crown / camber), the area of the slider 1, Length, etc.). The ratio accounts for nearly 60% of the flying height variation of the slider 1 in the existing processing accuracy.

This is clearly shown in the graph of FIG. Step bearing depth δs design (nominal)
When the variation from the value is ± 20 nm, the variation in the flying height ranges from 2 to 3 nm on the inner circumference, and from 4 to 5 nm on the middle and outer circumferences. In detail, the side where the step bearing depth δs becomes deeper (A in FIG. 5)
On the side), a flying profile (hereinafter simply referred to as a flying profile) representing a change in the flying height when the slider 1 moves to the inner circumference, the middle circumference, and the outer circumference on the disk recording medium 25.
Is almost constant by design, becomes higher by about 2 to 3 nm on the inner circumference, and rises further on the outer circumference. This change in the flying profile is not preferable because it causes a decrease in output when recording / reproducing information of the magnetic transducer 19 mounted on the slider 1.

On the other hand, on the side where the depth δs of the step bearing becomes shallower (side B in FIG. 5), the flying profile of the slider 1 is lower by about 2 to 3 nm on the inner circumference and further lower on the outer circumference, so that the outer circumference decreases. Become. This change in the flying profile increases the risk of contact between the slider 1 and the disk recording medium 25, and is therefore not preferable.

Generally, the slider 1 is manufactured with a certain degree of processing variation, and like the above-described step bearing,
The processing variation changes the flying height of the slider 1. In order to reduce the flying height of the slider 1, it is essential to reduce the variation in the flying height. To this end, it is conceivable to improve the processing accuracy such as the depth δs of the step bearing. However, improvement of processing accuracy requires investment in high-precision processing equipment and the like.

Therefore, a magnetic head slider having a function of controlling the flying height of the slider 1 was devised as a new method for reducing the flying height variation under the current processing equipment and processing accuracy while keeping the cost increase small. Hereinafter, the contents of the present invention will be described with reference to some embodiments.

FIG. 1 is a perspective view showing a first embodiment of a magnetic head slider according to the present invention, FIG. 6 is a plan view thereof, and FIG.
FIG. 7 is a sectional view taken along line AA ′ in FIG. 6. As shown, the magnetic head slider 1 according to the present invention needs to have the configuration of the typical magnetic head slider 1 shown in FIG.

The magnetic head slider 1 according to the present invention has a pressure control groove 30 deeper than the negative pressure groove 12 in the negative pressure groove 12 extending on the air inflow side of the rear step bearing 10 of the center pad 14. The magnetic head slider according to the present invention enables the flying height of the slider 1 to be controlled by the shape, depth, area, formation position and number of the pressure control grooves 30.

First, the pressure control groove 30 formed in the negative pressure groove 12 of the magnetic head slider 1 shown in FIG. 1 or FIG.
The length of the short side in the longitudinal direction is 0.08 mm, and the length of the long side in the short direction of the slider 1 is the center pad 14 (this pad 14
Is located at the center of the slider and is called a center pad, but is also located behind the slider,
(Also referred to as a rear pad in comparison with a front pad).

The pressure control groove 3 formed in the negative pressure groove 12
0 long side and rear step bearing 10 of center pad 14
Is 30 μm, and the long side of the pressure control groove 30 is parallel to the air inflow end of the rear step bearing 10. Here, the minimum distance Dr represents a distance between the air inflow end face of the step bearing and a portion closest to the pressure control groove on a perpendicular line thereof.
If the pressure control groove has a circular shape, it means the distance between the end face of the step bearing air inflow and the point on the circular circumference closest to the end face.

The pressure control groove 30 is merely an example, and the shape may be a circle, a polygon having three or more sides, or a shape forming an arbitrary closed curve. Also, the long side of the area and the pressure control groove 30 formed in the negative pressure groove 12 and the rear pad 14
Is preferably 0 μm <Dr <100 μm (this value has been verified by computer simulation), and is closely related to the shape or area. Further, the pressure control grooves 30 may exist at two or more locations.

The depth Rcavity of the pressure control groove 30 based on the rail surface can be arbitrarily set according to the flying height to be controlled. When the magnetic head slider 1 according to the first embodiment of the present invention shown in FIG. 6 is used in the magnetic disk drive of FIG. 4, the depth of the pressure control groove 30 of the flying height near the air outflow end 4 of the center rail surface 11 is shown. FIG. 8 shows the change with respect to Rcavity. As shown in FIG.
It can be seen that a depth Rcavity of 0 acts in the direction of decreasing the flying height of the slider 1 (in FIG. 8, the larger the value on the vertical axis, the smaller the flying height and the slider approaches the medium). .

On the inner circumference, the effect is small, and Rcavi
ty is 2 μm, that is, 2 times smaller than the depth R of the negative pressure groove 12.
The effect of lowering the flying height by about 2 nm at twice the depth is shown. However, the decrease in the flying height of the slider 1 is smaller than 2 μm.
Cavity is saturated, and the amount of decrease in the flying height cannot be increased.

On the other hand, the depth Rcavity of the pressure control groove 30 where the amount of decrease in the flying height is saturated at the middle and outer circumferences tends to be large, and the amount of decrease in the flying amount tends to be large. The maximum decrease in the flying height is about 6 nm on the outer circumference, and the depth of the pressure control groove 30 is 3 μm. Such a characteristic that the amount of decrease in the flying height varies depending on the radial position can be used.

That is, the depth δs of the step bearing as described above becomes too deep due to excessive machining,
Of the pressure control groove 30 acting on the decrease of the floating amount shown here when the floating profile of
By setting the cavity in accordance with the flying height to be corrected, it is possible to correct the increase in the flying height caused by the excessive machining again to an appropriate flying height.

Use of this function is effective in reducing the variation in the flying height of the magnetic head slider 1.
By controlling the depth δs of the step bearing which has the highest sensitivity to the flying height, and when the pressure control groove 30 is applied too deeply beyond a certain control value, a very small flying height variation can be obtained. The flying height of the magnetic head slider 1 can be reduced by the reduced flying height variation. If this method is preferably performed in the same step as ion milling for forming a groove, an effect of keeping the average value of the flying height of the magnetic head slider 1 constant can be obtained.

In the above description, the depth δs of the step bearing is cited as a factor that changes the flying height. However, other factors such as the flatness of the rail surface, the depth of the negative pressure groove, the thickness of the rail, and the like may be used. Also, it is confirmed that the flying height changes although it is smaller than the depth δs of the step bearing. Therefore, the shape that changes these flying heights,
The depth of the pressure control groove can also be determined in relation to factors such as dimensions.

When the flying height to be corrected is relatively large, the sensitivity of the flying height to the depth Rcavity of the pressure control groove 30 is small as shown in FIG. small. For example, looking at the outer periphery showing the highest sensitivity in FIG. 8, the depth Rcavity of the pressure control groove 30 when correcting the flying height by about 4.2 nm is 1.8 μm, and the sensitivity in the vicinity is 3 nm / μm. It is about. To control the flying height to be corrected with an accuracy of 1 nm, a processing accuracy of 0.33 μm is required. This processing accuracy is about 18% of the processing amount (100 × 0.33 / 1.8), and can be realized with a margin according to the ion milling processing.

The pressure control groove 30 controls the flying height of the slider 1 by changing the pressure state in the negative pressure groove 12 and the center pad 14. In forming the pressure control groove 30, the planar shape of the rail surface or the step bearing surface needs to be kept small. This is because, when the change in the planar shape is large, the planar shape also causes a change in the flying height, which makes it difficult to realize accurate flying height controllability.

Therefore, the method of forming the pressure control groove 30 is preferably the same processing method for forming the step bearing and the negative pressure groove 12, for example, ion milling, and other existing processing methods that minimize the occurrence of processing distortion. Need to be formed. Japanese Patent Application Laid-Open No. 7-153050 discloses a method of actively adjusting the flatness by scribing the negative pressure groove of the slider or the back surface of the slider with a laser or a diamond cutter or the like. In addition, the plane shapes of the rail surface and the step bearing greatly change, and it is considered difficult to realize high-precision flying height controllability.

Another embodiment of the present invention in which the flying height is controlled by the pressure control groove 30 formed in the negative pressure groove 12 of the magnetic head slider 1 as described above will be described below.

FIG. 9 is a plan view showing a magnetic head slider according to a second embodiment of the present invention. The magnetic head slider 1 according to the second embodiment of the present invention has the same configuration as the magnetic head slider 1 shown in FIG. 2 as in the first embodiment, and is characterized by a pressure control groove formed in the negative pressure groove 12. 30 is a point composed of five circular patterns. The diameter of each of the pressure control grooves 30 in the circular pattern is 50 μm, and the minimum distance Dr between the contour of the pressure control groove 30 in the circular pattern and the air inflow end of the rear step bearing 10 is 30 μm.

In this case, five pressure control grooves 30 having a circular pattern are formed.
The distance from the air inflow end to 0 is the same for all five patterns (the distance between each side of the air inflow end in FIG. 9 and the closest part of the circular pattern by a line perpendicular to the side. The sides of the air inflow end corresponding to the five circular patterns are:
In the case of FIG. 9, there are three sides). The pitch between centers of the pressure control grooves 30 of each circular pattern is 80 μm.
m. By forming a plurality of independent circular patterns as described above around the center pad 14, the flying height of the slider 1 is controlled by the depth Rcavity of the pressure control groove 30, as in the magnetic head slider 1 of the first embodiment. It is possible to

Next, the pressure control groove 30 which is more effective in controlling the flying attitude angle than controlling the flying height of the slider 1 will be described with reference to an embodiment. FIG. 10 is a plan view showing a magnetic head slider according to the third embodiment of the present invention.

The magnetic head slider according to the third embodiment has the same configuration as the typical magnetic head slider 1 shown in FIG. 2, similarly to the first embodiment. The feature of the magnetic head slider of the third embodiment is that the pressure control groove 30 formed in the negative pressure groove 12 is
Is to be formed. The pressure control groove 30 formed at this position has a function of slightly increasing the negative pressure generated in the negative pressure groove 12, and the flying height of the slider 1 on the air inflow end 2 side decreases (closes to the medium). On the other hand, it hardly affects the pressure generated at the center pad 14 on the air outflow end 4 side of the slider 1.

Therefore, a function of reducing the flying attitude angle is produced. By utilizing this function, the flying attitude angle can be controlled in the same manner as the flying height.

In the background where such a pattern for controlling the flying attitude angle is required, in the magnetic head sliders of the first and second embodiments, the negative pressure groove 12 around the center pad 14 is provided. The flying height decreases due to the effect of the pressure control groove 30 to be formed, but the flying height on the air inflow end 2 side does not change. Therefore, since the floating attitude angle increases, it is necessary to perform an operation of controlling only the increase of the floating attitude angle and not changing the floating amount near the outflow end.

FIG. 11 is a plan view showing a magnetic head slider according to a fourth embodiment of the present invention. In the fourth embodiment, the magnetic head slider shown in the second embodiment is a configuration example in which the effect of controlling the flying attitude angle can be realized by a circular pattern.

FIG. 12 is a plan view showing a magnetic head slider according to a fifth embodiment of the present invention. The magnetic head slider 1 of the fifth embodiment differs from the magnetic head slider 1 shown in FIG. 2 in the pads located on the air outflow end 2 side. In the magnetic head slider 1 according to the fifth embodiment, there are a pair of side pads 14a and 14b, respectively, side rear step bearings 10a and 10b, and a side rail surface 11a formed following the side rear step bearings 10a and 10b. , 11b.

Side rear step bearings 10a, 10b
Is the depth of the front step bearing 5 δs = 150
Identical in nm. The magnetic transducer 19 for recording / reproducing information on / from the disk recording medium 25 is formed on one or both of the pair of side pads. In the magnetic head slider 1 according to the fifth embodiment,
The flying height control function of the magnetic head slider according to the first and second embodiments is realized by the pressure control groove 30 formed in the negative pressure groove 12 extending on the air inflow side of the side rear step bearing of the pair of side pads 14a and 14b. It is. The shape of the pressure control groove 30 and the side rear step bearing 1
The minimum distance Dr between the air inflow ends 0a and 10b is 30.
μm.

The pressure control grooves 30 of the magnetic head slider 1 according to the fifth embodiment have different left and right shapes, so that not only the flying height is controlled but also the flying height is unbalanced, that is, in the slider short direction. The floating attitude angle can also be controlled. Therefore, there is no limitation on the symmetry of the left and right pressure control grooves 30.

FIG. 13 is a plan view showing a magnetic head slider according to the sixth embodiment of the present invention. The magnetic head slider 1 according to the sixth embodiment has almost the same configuration as the fifth embodiment. The difference is that the pressure control groove 30 is formed in a plurality of circular patterns, and the flying height and the control effect in the slider short direction are the same.

FIG. 14 is a plan view showing a magnetic head slider according to a seventh embodiment of the present invention, FIG. 15 is a plan view showing an eighth embodiment, and FIG. 16 is a plan view showing a ninth embodiment. FIG. 17 is a plan view showing the tenth embodiment.

The seventh to tenth shown in FIG. 14 to FIG.
The magnetic head slider 1 according to the embodiment has a function of acting in the direction of increasing the flying height (moving the slider away from the medium). This function is the opposite of the flying height reducing action shown in the first to sixth embodiments of the present invention. This operation is achieved by changing the position of the pressure control groove 30 formed in the negative pressure groove 12 from the air inflow side to the air outflow side from the negative pressure groove 12 surrounded by the side step bearings 8 and 9 to the negative pressure transition to the atmospheric pressure. This can be realized by forming the pressure control groove 30 in a region where the pressure control is performed. This action is caused by the function of the pressure control groove 30 to reduce the negative pressure generation region and increase the region near the atmospheric pressure in the negative pressure groove 12 from the air inflow side to the air outflow side.

In addition, regarding the floating action when the pressure control groove is formed in the negative pressure groove, if the pressure control groove is provided, the negative pressure generated in the negative pressure groove is reduced and the slider is moved away from the medium. The first operation and the second operation of lowering the pressure generation at the pad due to the provision of the pressure control groove to bring the slider closer to the medium are achieved. The effect of the first and second actions is different. That is, as shown in FIG.
If the pressure control groove is placed immediately before the center pad, the second
Is more effective than the first effect, and the slider approaches the medium. On the other hand, as shown in FIG. 14, when a pressure control groove is provided at a place where the pressure gradient such as a transition from the negative pressure to the atmospheric pressure is large and away from the pad, the negative pressure is further reduced and the first operation is performed. Is more effective than the second action, and the slider moves away from the medium.

Examples of the pressure control grooves 30 formed in the negative pressure grooves 12 acting in the direction of increasing the flying height will be described with reference to seventh to tenth embodiments. In the magnetic head slider 1 according to the seventh embodiment shown in FIG. 14, a rectangular pressure control groove 30 having a long side in the longitudinal direction of the slider of 150 μm and a short side in the lateral direction of the slider of 80 μm is formed in the rectangular longitudinal direction of the slider. The center portion is located near the end of the side step bearing, and the center line of the pressure control groove 30 is located at the center of the interval between the inner side of the slider of the side step bearings 8 and 9 and the outer side of the slider 1 of the center pad 14. In such a position, the pressure control groove 30 is also provided in a symmetric position.

The action of increasing the flying height by the pressure control groove 30 is insensitive to the depth, and its controllability is small as compared with the above-described action of decreasing the flying height.

Therefore, when the step depth is too small in the example of the step depth, it can be used to increase the floating amount in the state where the floating amount generated on the B side in FIG. 5 is small. In other words, the slide is moved away from the medium by the installation of the pressure control groove shown in FIG. 14 as much as the slider approaches the medium with the underdepth of the step bearing shown in FIG. At this time, the pressure control groove 30 to be processed
The depth Rcavity may be about 1.5 times the negative pressure groove 12, and the processing can be performed with low processing accuracy because the change in the flying height is saturated with respect to the processing amount.

The magnetic head slider 1 of the eighth embodiment is different from the magnetic head slider 1 of the seventh embodiment in that the pressure control groove 3
Instead of a rectangular pattern as 0, circular patterns having a diameter of 50 μm are arranged in series at a pitch of 80 μm. This embodiment can also achieve the effect of increasing the flying height.

Furthermore, the magnetic head slider 1 according to the ninth and tenth embodiments is an example having side pads 14a and 14b instead of the center pad 14. In the position where the pressure control groove 30 is formed, the center of the distribution is the end of the side step in the longitudinal direction of the slider, and the center of the slider in the lateral direction of the slider. Each of the pressure control grooves 30 has a rectangular shape and a plurality of circular patterns, but may have other shapes. The magnetic head slider according to these embodiments also has a depth Rca of the pressure control groove 30.
If the duty is formed to be about 1.5 times the negative pressure groove 12, the effect of increasing the flying height can be obtained, which can be used for controlling the flying height.

The above is the embodiment of the magnetic head slider in which the flying height can be controlled by the pressure control groove 30 formed in the negative pressure groove 12 according to the present invention. Lastly, the effectiveness of the present invention will be described using a specific example in which the flying height is controlled using the present invention.

FIG. 18 is a plan view showing an eleventh embodiment of the magnetic head slider according to the present invention. In the eleventh embodiment, in order to control the flying height of the magnetic head slider 1 shown in FIG. 2, the magnetic head slider 1 is formed in the negative pressure groove 12 extending toward the air inflow end side of the center pad 14 described in the first embodiment. And a polygonal front pressure control groove 30b formed in the negative pressure groove 12 of the front pad 13 for the purpose of controlling the floating attitude angle.

Here, the minimum distance Dr between the rear pressure control groove 30a and the air inflow end of the rear step bearing 10 is 30 μm.
m, and the minimum distance Df between the front pressure control groove 30b and the air outflow end of the front step bearing 5 is 100 μm.
It is.

The magnetic head slider 1 according to the eleventh embodiment
Is used in the magnetic disk device 28 shown in FIG. First, a sample in which the rear pressure control groove 30a and the front pressure control groove 30b are not formed, that is,
FIG. 19 shows a flying profile of a typical magnetic head slider 1 as shown in FIG. 2 as a sample at the time of design. On the other hand, the flying profile of a sample in which the step bearing depth δs is excessively processed by 20 nm with respect to the nominal 150 nm is also shown.

In order to control the flying height of the above-mentioned sample in which the depth of the step bearing was excessively processed, the rear pressure control groove of 1.6 μm was used for the magnetic head slider 1 of the eleventh embodiment. FIG. 19 shows a comparison of the flying profile of the sample formed with the front pressure control groove 30b and the front pressure control groove 30b.

In FIG. 19, the flying profile of the sample at the time of design rises by about 1.8 nm from the inner circumference to the outer circumference. On the other hand, in the sample in which the step depth is excessively processed by 20 nm from the design, the flying height is increased by 1.8 nm on the inner periphery and by 6 nm on the outer periphery, resulting in a rising profile on the outer periphery.

On the other hand, the pressure control groove 3 according to the present invention
0 is formed at a depth of 1.6 μm as in the eleventh embodiment, so that the flying height is corrected to a value almost equal to the design value on the inner circumference and to a value about 0.8 nm higher than the design value on the outer circumference. The effectiveness of the present invention is shown.

Next, a method of manufacturing the magnetic head slider according to the embodiment of the present invention will be described. After cutting the wafer and lapping the air bearing surface / back surface, a deep groove is formed to form a negative pressure groove 12 as shown in FIG. Subsequently, shallow grooves are formed to form step bearings 5, 8, 9, and 10 as shown in FIG. Next, the depth of the step bearing is measured to determine the shift amount from the design value. The pressure control groove 3 based on the depth measurement value and the shift amount
0 is formed, and the depth Rcavity of the pressure control groove at that time is formed based on data as shown in FIG. Thus, the rail surface 11 of the step bearing
The depth δs of the pressure control groove 30 is determined based on the measured value, and the depth Rcavity of the pressure control groove 30 is determined.

The installation of the pressure control groove 30 shown in FIG. 14 has an effect of moving the slider away from the medium, and the location of the pressure control groove is different from that of FIG. The procedure is the same as that of FIG. Further, the manufacturing procedure for providing the flying attitude angle 30b shown in FIG. 18 is the same as that for the pressure control groove 30a.

As described above, the embodiment of the present invention includes the following configuration examples.

An air inlet end, a floating surface, and an air outlet end, wherein the floating surface is formed continuously from the air inlet end and has a sub-micron depth, and is formed continuously from the front step bearing. Formed from the rail surface, a negative pressure groove deeper than the front step bearing continuously formed from the rail surface, and a side step bearing having the same depth as the front step bearing continuously formed from the rail surface. A front pad, a rear step bearing separated from the front pad by the negative pressure groove and having the same depth as the front step bearing, and a rail surface continuously formed from the rear step bearing. At least one rear pad having at least one rear pad near the air outflow end of the rail surface In a magnetic head slider having a magnetic transducer, the negative pressure groove extending on the air inflow side of the rear pad has a pressure control groove formed at a depth deeper than the negative pressure groove, and a boundary with the negative pressure groove. A magnetic head slider having at least one pressure control groove whose line is a closed curve or a polygon having three or more sides.
By setting the shape, depth, and formation position of the pressure control groove formed here according to the flying height, the flying height of the magnetic head slider is controlled, and variations in the flying height are reduced.

[0078]

As described above, when the flying height of the magnetic head slider changes due to processing, the depth, position and shape of the negative pressure groove 12 can be determined according to the flying height to be controlled as the pressure control groove 30. If this is the case, the flying height of the magnetic head slider can be controlled to an appropriate value, and consequently the flying height variation can be reduced.

[Brief description of the drawings]

FIG. 1 is a perspective view of a magnetic head slider according to a first embodiment of the present invention.

FIG. 2 is a plan view of a typical magnetic head slider in which the present invention can exert an effective effect.

FIG. 3 is a sectional view taken along line A-A 'in FIG.

FIG. 4 is a plan view of a magnetic disk drive equipped with a magnetic head slider according to the present invention.

5 is a graph showing a relationship between a shift amount of a step bearing depth δs of the magnetic head slider shown in FIG. 2 from a design value (nominal value) and a change amount of a flying height from a design value.

FIG. 6 is a plan view of the magnetic head slider according to the first embodiment of the present invention.

FIG. 7 is a sectional view taken along line A-A 'in FIG.

FIG. 8 is a graph showing the relationship between the depth of the pressure control groove and the flying height in the magnetic head slider according to the first embodiment.

FIG. 9 is a plan view of a magnetic head slider according to a second embodiment of the present invention.

FIG. 10 is a plan view of a magnetic head slider according to a third embodiment of the present invention.

FIG. 11 is a plan view of a magnetic head slider according to a fourth embodiment of the present invention.

FIG. 12 is a plan view of a magnetic head slider according to a fifth embodiment of the present invention.

FIG. 13 is a plan view of a magnetic head slider according to a sixth embodiment of the present invention.

FIG. 14 is a plan view of a magnetic head slider according to a seventh embodiment of the present invention.

FIG. 15 is a plan view of a magnetic head slider according to an eighth embodiment of the present invention.

FIG. 16 is a plan view of a magnetic head slider according to a ninth embodiment of the present invention.

FIG. 17 is a plan view of a magnetic head slider according to a tenth embodiment of the present invention.

FIG. 18 is a plan view of a magnetic head slider according to an eleventh embodiment of the present invention.

FIG. 19 is a graph comparing the effects of the present invention with a flying profile using the eleventh embodiment as a configuration example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Slider 2 Air inflow end 3 Floating surface 4 Air outflow end 5 Front step bearing 6,7 A pair of rail surfaces 8,9 A pair of side step bearings 10 Rear step bearings 10a, 10b A pair of side rear step bearings 11 Center rail surface 11a , 11b A pair of side rail surfaces 12 Negative pressure groove 13 Front pad 14 Center pad 14a, 14b A pair of rear side pads 19 Magnetic transducer 20 Suspension 24 Carriage 25 Disk recording medium 26 Spindle 27 Rotary actuator 28 Magnetic disk device 30 Pressure control Groove 30a Rear pressure control groove 30b Front pressure control groove

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masayoshi Endo 2880 Kozu, Kozuhara, Kanagawa Prefecture Inside the Storage Systems Division of Hitachi, Ltd. (72) Inventor Masahiro Atsumi 2880 Kozu, Kozu, Odawara-shi, Kanagawa Hitachi F-term in storage system division (reference) 5D042 NA02 PA01 PA05 QA02

Claims (11)

[Claims] 1. A magnetic head slider comprising: a floating surface including a rail surface, a step bearing deeper than the rail surface, and a negative pressure groove deeper than the step bearing surface; an air inflow end; and an air outflow end. A front pad formed by the rail surface and the step bearing on the air inflow end side; and a front pad formed by the rail surface and the step bearing on the air outflow end side; A magnetic transducer provided near the air outflow end of the rail surface of the rear pad; and a pressure control formed deeper in the negative pressure groove on the air inflow side of the rear pad than the negative pressure groove. And a groove, wherein the pressure control groove forms a region surrounded by a straight line or a curve in the negative pressure groove, and reduces a floating amount near the air outflow end. Magnetic head slider, characterized in that. 2. A magnetic head slider comprising: a floating surface including a rail surface, a step bearing deeper than the rail surface, and a negative pressure groove deeper than the step bearing surface; an air inflow end; and an air outflow end. A front pad formed by the rail surface and the step bearing on the air inflow end side; and a front pad formed by the rail surface and the step bearing on the air outflow end side; A magnetic pad provided near the air outflow end of the rail surface of the rear pad; and A pressure control groove formed deeper than the pressure groove, wherein the pressure control groove forms a region surrounded by a straight line and / or a curve in the negative pressure groove. Magnetic head slider, characterized in that to increase the flying height of the air outlet end vicinity. 3. A magnetic head slider comprising: a floating surface including a rail surface, a step bearing deeper than the rail surface, and a negative pressure groove deeper than the step bearing surface; an air inflow end; and an air outflow end. A front pad formed by the rail surface and the step bearing on the air inflow end side; and a front pad formed by the rail surface and the step bearing on the air outflow end side; A rear pad separated by: a magnetic transducer provided near an air outflow end of the rail surface of the rear pad; and a pressure control groove formed deeper than the negative pressure groove in a negative pressure groove surrounded by the front pad. The pressure control groove forms a region surrounded by a straight line and / or a curve in the negative pressure groove, and reduces the floating amount on the air inflow end side. The magnetic head slider according to claim and. 4. A magnetic head slider comprising: a floating surface comprising a rail surface, a step bearing deeper than the rail surface, and a negative pressure groove deeper than the step bearing surface; an air inflow end; and an air outflow end. A front pad formed by the rail surface and the step bearing on the air inflow end side; and a front pad formed by the rail surface and the step bearing on the air outflow end side; A magnetic transducer provided in the vicinity of an air outflow end of the rail surface of the rear pad; a first deeper formed in the negative pressure groove on the air inflow side of the rear pad than the negative pressure groove; And a second pressure control groove formed deeper in the negative pressure groove surrounded by the front pad than the negative pressure groove; The pressure control groove forms a region surrounded by a straight line or a curve in the negative pressure groove, and reduces a floating amount near the air outflow end. The second pressure control groove is surrounded by a straight line and / or a curve. A magnetic head slider, wherein a raised area is formed in the negative pressure groove to reduce a flying height on the air inflow end side. 5. A magnetic head slider comprising: a floating surface including a rail surface, a step bearing deeper than the rail surface, and a negative pressure groove deeper than the step bearing surface; an air inflow end; and an air outflow end. A front pad formed by the rail surface and the step bearing on the air inflow end side; and a front pad formed by the rail surface and the step bearing on the air outflow end side; A magnetic pad provided near the air outflow end of the rail surface of the rear pad; and a pressure control formed deeper than the negative pressure groove in the negative pressure groove on the air inflow side of the rear pad. Wherein the pressure control groove forms an area surrounded by a straight line or a curve in the negative pressure groove, and the depth of the pressure control groove is the air outflow end. A magnetic head slider formed in association with a shape or dimension that changes the flying height in the vicinity. 6. A magnetic head slider comprising: a floating surface including a rail surface, a step bearing deeper than the rail surface, and a negative pressure groove deeper than the step bearing surface; an air inflow end; and an air outflow end. A front pad formed by the rail surface and the step bearing on the air inflow end side; and a front pad formed by the rail surface and the step bearing on the air outflow end side; A magnetic pad provided near the air outflow end of the rail surface of the rear pad; and a pressure control formed deeper than the negative pressure groove in the negative pressure groove on the air inflow side of the rear pad. Wherein the pressure control groove forms a region surrounded by a straight line or a curve in the negative pressure groove, and the depth of the pressure control groove is the step axis. A magnetic head slider formed in association with a depth of a receiver from a rail surface. 7. The magnetic head slider according to claim 1, wherein a distance Dr between an air inflow end surface of the step bearing of the rear pad and a portion of the pressure control groove which is closest to the perpendicular line thereof is: A magnetic head slider, wherein 0 μm <Dr <100 μm. 8. The magnetic head slider according to claim 3, wherein an air outflow end of a step bearing of the front pad;
A magnetic head slider characterized in that a distance Df between the pressure control groove and a portion closest to the pressure control groove on the perpendicular line is 0 μm <Df <200 μm. 9. The magnetic head slider according to claim 1, wherein the pressure control groove has a depth Rca with respect to the rail surface.
A magnetic head slider according to claim 1, wherein a ratio of a height to a depth R of said negative pressure groove with respect to said rail surface is 1 <(Rcavity / R) <100. 10. The magnetic head slider according to claim 1, wherein the pressure control groove is formed of a polygonal shape having three or more sides or a group of a plurality of circular shapes. Magnetic head slider. 11. A magnetic disk drive equipped with the magnetic head slider according to claim 1.