JP3243698B2 - Negative pressure floating head slider and rotating disk storage device - Google Patents
Negative pressure floating head slider and rotating disk storage deviceInfo
- Publication number
- JP3243698B2 JP3243698B2 JP11696493A JP11696493A JP3243698B2 JP 3243698 B2 JP3243698 B2 JP 3243698B2 JP 11696493 A JP11696493 A JP 11696493A JP 11696493 A JP11696493 A JP 11696493A JP 3243698 B2 JP3243698 B2 JP 3243698B2
- Authority
- JP
- Japan
- Prior art keywords
- positive pressure
- outflow
- pressure generating
- inflow
- negative pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、磁気ディスク装置及び
光磁気ディスク装置等の走行する記憶媒体面上を微小な
浮上隙間で浮上する浮動ヘッドスライダに係り、特に浮
上面形状を改良し、リニア及びロータリー等のアクセス
機構に関係なく任意の半径位置で浮上量を概ね一定に
し、スライダの浮上特性を向上することのできる負圧利
用浮動ヘッドスライダ、磁気スライダ及び回転円板記憶
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating head slider which flies over a surface of a running storage medium such as a magnetic disk drive and a magneto-optical disk drive with a small floating gap, and more particularly to a floating head slider having an improved floating surface shape, Also, the present invention relates to a negative pressure utilizing floating head slider, a magnetic slider, and a rotating disk storage device capable of making the flying height substantially constant at an arbitrary radial position irrespective of an access mechanism such as a rotary and improving the flying characteristics of the slider.
【０００２】[0002]
【従来の技術】従来の正圧を利用した磁気ディスク装置
用浮動ヘッドスライダは、例えば特開平2-101688号公報
に記載されているテーパフラット形スライダのように、
スライダの浮上面は傾斜面と平面部とを有する２本のサ
イドレールとセンターレールとからなる。センターレー
ルは流入端幅が狭く流出端幅が広くなり、流出端の端面
にトランスデューサを搭載している。サイドレールは流
入端における幅を越えずかつ流出端まで達してなく、各
レールは幅がほぼ一定のブリード部を介し隔離された構
造である。2. Description of the Related Art A conventional floating head slider for a magnetic disk drive utilizing positive pressure is, for example, a taper flat type slider described in Japanese Patent Application Laid-Open No. 2-101688.
The flying surface of the slider is composed of two side rails having an inclined surface and a flat portion, and a center rail. The center rail has a narrow inflow end and a wide outflow end, and a transducer is mounted on the end face of the outflow end. The side rails do not exceed the width at the inflow end and do not reach the outflow end, and each rail is of a structure separated by a bleed portion having a substantially constant width.
【０００３】類似の例として特開平4-17176号公報によ
る開示がある。３つの浮上面を前後に分離し流入側の両
側端にテーパフラットレールを配置し、中央流出端部の
みに平板レールを配置する構造である。また、従来の負
圧利用浮動ヘッドスライダとして特開昭60-101781号公
報による開示がある。スライダのクロスレールの流出側
に負圧発生用の負圧ポケットを設け、スライダの両サイ
ドに設けたサイドレールの長手方向中央部のレール幅を
流入側、流出側より狭くした構造である。A similar example is disclosed in Japanese Patent Application Laid-Open No. 4-17176. In this structure, the three floating surfaces are separated back and forth, tapered flat rails are arranged at both ends on the inflow side, and flat rails are arranged only at the center outflow end. A conventional negative pressure utilizing floating head slider is disclosed in Japanese Patent Application Laid-Open No. 60-101781. A negative pressure pocket for generating a negative pressure is provided on the outflow side of the cross rail of the slider, and the rail width at the center in the longitudinal direction of the side rail provided on both sides of the slider is narrower than the inflow side and the outflow side.
【０００４】類似の例として米国特許(USP)5062017号の
開示がある。負圧凹部の両サイドのサイドレールのくび
れ部を流入端から約１／３の位置にし、くびれ部の幅を
レール幅の約１／２にし、くびれ部及びクロスレールの
深さを負圧凹部より浅い第２の段差で構成する構造であ
る。[0004] A similar example is disclosed in US Patent No. 5062017. The constricted portions of the side rails on both sides of the negative pressure concave portion are positioned at about 1/3 from the inflow end, the width of the constricted portion is set to approximately 1/2 of the rail width, and the depth of the constricted portion and the cross rail is set to the negative pressure concave portion. This is a structure constituted by a second step which is shallower.
【０００５】その他の類似の例として米国特許(USP)480
2042号による開示がある。スライダの流出端に全幅に渡
ってヘッド部さらにクロスバーを設けた構造である。負
圧凹部は、流出端まで達してなくヘッド部又はクロスバ
ーの前に横溝を設けている。Another similar example is US Pat.
There is disclosure by 2042. This is a structure in which a head portion and a crossbar are provided over the entire width at the outflow end of the slider. The negative pressure concave portion does not reach the outflow end but has a lateral groove in front of the head portion or the crossbar.
【０００６】また、その他の類似例として特開昭60-211
671号公報による開示がある。スライダの両サイドに設
けた正圧サイドレールと負圧凹部とをグルーブにより分
離し、負圧凹部はバッファパッドにより形成する構造で
ある。[0006] Another similar example is disclosed in Japanese Patent Application Laid-Open No. 60-211.
No. 671 discloses the disclosure. The positive pressure side rail and the negative pressure recess provided on both sides of the slider are separated by grooves, and the negative pressure recess is formed by a buffer pad.
【０００７】これらスライダを搭載するアクセス機構と
して、従来はディスクの半径方向に直線的に移動して位
置決めするリニア方式と、回転軸を中心に揺動して所定
の半径位置に位置決めするロータリー方式とがある。Conventionally, as an access mechanism mounting these sliders, there are a linear system in which the slider is moved linearly in the radial direction of the disk and a positioning system, and a rotary system in which the slider is swung about a rotating shaft and positioned at a predetermined radial position. There is.
【０００８】従来の磁気ディスク装置は、小形化、大容
量化の傾向にあり、その実現手段の一つとして面記録密
度を高める方法がある。特に線密度を高めるためスライ
ダの浮上量を狭小化する必要があり、ディスク上のトラ
ックから他のトラックへの移動動作であるシーク時の加
振や、円板うねりによる加振等の各種外乱に対し、浮上
量変動を小さく押える必要がある。さらに、再生ヘッド
に高密度記録に適した磁気抵抗素子（以下、ＭＲヘッド
と称す）を用いた場合や、内周から外周にわたって線記
録密度をほぼ一定にする記録方式（以下、一定密度記録
方式と称す）においてはディスク上の任意の位置の浮上
量をほぼ一定にする技術が重要になる。Conventional magnetic disk drives tend to be smaller and have larger capacities, and one of the means for achieving this is to increase the areal recording density. In particular, it is necessary to reduce the flying height of the slider in order to increase the linear density, and it can be used for various disturbances such as vibration during seek, which is a movement operation from a track on the disk to another track, and vibration due to disk undulation. On the other hand, it is necessary to keep the fluctuation of the flying height small. Furthermore, when a magnetoresistive element (hereinafter referred to as an MR head) suitable for high-density recording is used as a reproducing head, or a recording method for making the linear recording density substantially constant from the inner circumference to the outer circumference (hereinafter, a constant density recording method) In this case, a technique for making the flying height at an arbitrary position on the disk almost constant is important.
【０００９】そのためには、スライダの基本浮上特性の
うち、ディスクの内周と外周の速度差による浮上量の変
化（以下、浮上の速度特性と称す）がない又は小さい特
性やディスク回転時のディスク接線方向に対するスライ
ダ長手方向（流出入方向）とのなす角（以下、ヨー角と
称す）が付いた時のスライダ浮上量の低下（以下、ヨー
角特性と称す）がないか又は小さい特性が要求される。
ところが、正圧のみを使う従来技術、例えば、特開平2-
101688号公報に記載されているテーパフラット形スライ
ダは一般的に正圧力が速度とともに増加するため、内周
と外周との速度が２倍になると浮上量は約１．５から
１．６倍となり、リニア方式アクセス機構では、ディス
クの内外周で浮上量を一定にすることは不可能である。
またヨー角特性も悪く、ヨー角が付いたときのスライダ
浮上量の低下も大きい。For this purpose, among the basic flying characteristics of the slider, there is no or small change in the flying height (hereinafter referred to as flying speed characteristics) due to the difference in speed between the inner and outer circumferences of the disk, and the disk during rotation of the disk. It is required that there be no or small reduction in slider flying height (hereinafter, referred to as yaw angle characteristic) when an angle (hereinafter, referred to as yaw angle) between the tangent direction and the slider longitudinal direction (outflow / inflow direction) is provided. Is done.
However, conventional techniques using only positive pressure, for example,
In the taper flat type slider described in Japanese Patent Publication No. 101688, since the positive pressure generally increases with the speed, if the speed between the inner circumference and the outer circumference is doubled, the flying height becomes about 1.5 to 1.6 times. In the linear access mechanism, it is impossible to make the flying height constant at the inner and outer circumferences of the disk.
Further, the yaw angle characteristics are poor, and the slider flying height when the yaw angle is applied is greatly reduced.
【００１０】従来ロータリー方式では、外周側の浮上の
速度特性による浮上量の増加をヨー角特性による浮上量
の低下で相殺して浮上量を一定にする手段が取られてい
た。しかしシーク動作中にスライダに流入する気体はデ
ィスク速度に対しシーク速度分だけヨー角が加わる（以
下、シーク時ヨー角と称す）こととなり大きな浮上量低
下を招く。今後の低浮上量の装置ではディスクとの接触
頻度が急増し、最悪の場合は接触による損傷が発生す
る。特開平4-17176号公報記載のスライダも同様であ
る。In the conventional rotary system, means for increasing the flying height due to the flying speed characteristic on the outer peripheral side is offset by a decrease in the flying height due to the yaw angle characteristic, thereby keeping the flying height constant. However, the yaw angle of the gas flowing into the slider during the seek operation is increased by the seek speed with respect to the disk speed (hereinafter, referred to as the yaw angle at the time of seek), resulting in a large decrease in the flying height. The frequency of contact with the disk will increase rapidly in a device with a low flying height in the future, and in the worst case, damage due to contact will occur. The same applies to the slider described in JP-A-4-17176.
【００１１】一方、浮上の速度特性を改良するため負圧
を利用する手段がある。従来のサイドレール後端にヘッ
ドを搭載する負圧利用浮動ヘッドスライダとして例えば
特開昭60-101781号公報による開示がある。サイドレー
ルが一定幅のテーパフラット形で問題のあるヨー角特性
の改善を、正圧レールの中央部幅を狭くし前後の幅を十
分広く取る形状で実現している。しかしこのためサイド
レールの実質的レール中心間距離が縮小し、スライダ長
手方向の回転軸回りの空気膜剛性（以下、ロール剛性と
称す）の大幅な減少を招いた。具体的には、（a）実質
的レール中心間距離の約２乗に比例する減少、（b）く
びれ部位置より流出側が平板軸受化することによって空
気膜反力自体が減少する、の２点である。ロール剛性の
低下は、シーク時のシーク加速度によってスライダ重心
と回転中心との相違に起因したロール方向（幅方向）の
浮上量低下（以下、加速度沈み込みと称す）を増大し、
最悪の場合、ディスクとの接触による損傷が発生する。
本方式の負圧利用スライダではヨー角特性とロール剛性
とがトレードオフの関係にあり両立が困難であった。ま
た、ロール剛性の低下は、スライダの加工、組み立てで
発生するスライダ幅方向の誤差に対して大きな浮上量の
変化又は低下をもたらし、生産の観点から問題である。On the other hand, there is a means for utilizing a negative pressure in order to improve the flying speed characteristics. A conventional negative pressure utilizing floating head slider having a head mounted on the rear end of a side rail is disclosed, for example, in Japanese Patent Application Laid-Open No. 60-101781. The problem of improving the yaw angle characteristics, which has a problem with the tapered flat side rails having a fixed width, is realized by reducing the center width of the positive pressure rail and widening the front and rear widths sufficiently. However, for this reason, the substantial center distance between the rails of the side rails was reduced, and the rigidity of the air film around the rotation axis in the longitudinal direction of the slider (hereinafter referred to as roll rigidity) was significantly reduced. Specifically, there are two points: (a) a decrease in proportion to the square of the substantial rail center distance, and (b) the air film reaction force itself is reduced by making the outflow side a flat plate bearing from the constricted portion position. It is. The decrease in roll stiffness increases a decrease in the flying height in the roll direction (width direction) due to the difference between the center of gravity of the slider and the rotation center due to the seek acceleration during seek (hereinafter, referred to as acceleration sinking).
In the worst case, damage due to contact with the disc occurs.
In the negative pressure utilizing slider of this method, it is difficult to achieve both the yaw angle characteristic and the roll rigidity because of a trade-off relationship. Further, the reduction in roll rigidity causes a large change or reduction in the flying height with respect to an error in the slider width direction generated during processing and assembly of the slider, which is a problem from the viewpoint of production.
【００１２】また、コンタクトスタートストップ時にク
ロスレールがディスク面の粗さや突起を削り、発塵の原
因になること、及び浮上中クロスレール部に進入した塵
埃の排出部がなく、クロスレール流入側端部への付着成
長やクロスレール部への進入による塵埃を介した接触に
よるディスク面の損傷があった。In addition, the cross rail cuts the roughness and protrusions of the disk surface at the start and stop of the contact, causing dust, and there is no discharge portion for the dust entering the cross rail during floating, so the cross rail inflow end There was damage to the disk surface due to contact growth via dust due to adhesion growth to the portion and entry into the cross rail portion.
【００１３】米国特許（ＵＳＰ）５０６２０１７号もほ
ぼ同様である。ただし、サイドレールのくびれ部及びク
ロスレール部と負圧部の深さとを異なって構成してい
る。これには２種類のマスクを使って２回加工する必要
があり、マスクの位置合わせや深さ加工誤差による浮上
特性のばらつき、また製作時間による加工コストの増加
等の点で問題となる点について考慮がされていなかっ
た。クロスレールの深さが１〜２μｍと浅く塵埃の問題
は同様である。[0013] United States Patent (USP) 5062017 is substantially similar. However, the constricted portion and the cross rail portion of the side rail are different from the depth of the negative pressure portion. This requires two processings using two types of masks, which are problematic in terms of variations in floating characteristics due to mask positioning and depth processing errors, and an increase in processing costs due to manufacturing time. No consideration was given. The problem of dust is the same as the cross rail having a shallow depth of 1-2 μm.
【００１４】その他の負圧利用スライダとして、米国特
許（ＵＳＰ）４８０２０４２号、特開昭６０−２１１６
７１号による開示がある。これらは、ヨー角特性に対す
る配慮がされておらず浮上量変動の点で問題がある。ロ
ータリー方式の場合は浮上量を一定にすることもできな
い。Other sliders utilizing negative pressure are disclosed in US Pat. No. 4,802,042 and Japanese Patent Laid-Open No. Sho 60-2116.
No. 71 discloses. These do not take into account the yaw angle characteristics, and have a problem in terms of flying height variation. In the case of the rotary system, the flying height cannot be made constant.
【００１５】以上の従来技術スライダでは正圧発生面の
流入側に傾斜面を有するテーパフラット形を用いてい
る。テーパフラット形スライダでは、テーパ部に浮上隙
間の増加に起因する塵埃が付着し正圧発生の減少により
浮上量の低下が起こることが知られている。そしてこの
テーパ部に付着した塵埃はコンタクト スタート スト
ップ（以下、ＣＳＳと称す）しても容易には取れない。
負圧利用スライダにおいて正圧レールのテーパ部へ塵埃
が付着した場合、負圧力の発生はほとんど変化しないた
め浮上量の低下はさらに急激なものとなり、ディスクと
の接触による損傷が発生の可能性が高く信頼性が確保で
きない。また、スライダの小形化（例えば長さ２mm以
下）によって浮上面が大幅に減少した場合の負圧力の確
保が問題となる。従来のテーパフラット形スライダがレ
ール幅の３乗に比例し、最大値に上限がないのに対し、
負圧力は面積にほぼ比例し、また最大値も大気圧雰囲気
では-1kg/cm2の制限がある。スライダの小形化によって
正圧力に対し負圧力を確保できなくなる。The above-mentioned prior art slider uses a tapered flat type having an inclined surface on the inflow side of the positive pressure generating surface. It is known that in a tapered flat slider, dust due to an increase in a floating gap adheres to a tapered portion, and a decrease in a positive pressure reduces a flying height. Dust adhered to the tapered portion cannot be easily removed even by contact start / stop (hereinafter referred to as CSS).
If dust adheres to the tapered part of the positive pressure rail in the negative pressure slider, the negative pressure is hardly changed, so the flying height decreases more rapidly, and there is a possibility that damage due to contact with the disk may occur. High reliability cannot be secured. In addition, there is a problem in securing a negative pressure when the flying surface is significantly reduced due to downsizing of the slider (for example, a length of 2 mm or less). Whereas the conventional tapered flat slider is proportional to the cube of the rail width and the maximum value has no upper limit,
The negative pressure is almost proportional to the area, and the maximum value is limited to -1 kg / cm 2 in an atmospheric pressure atmosphere. The miniaturization of the slider makes it impossible to secure a negative pressure for a positive pressure.
【００１６】[0016]
【発明が解決しようとする課題】従来の負圧利用浮動ヘ
ッドスライダにあっては、記憶媒体の小形化、大容量化
に伴い線密度を高めるため浮上量を狭小化する必要があ
り、サイドレールが一定幅のテーパフラット形でヨー角
特性の改善を、正圧レールの中央部幅を狭くし前後の幅
を十分広く取る形状として実現しているが、サイドレー
ルの実質的なレール中心間距離が縮小してロール剛性の
大幅な減少を招き、かつ加速度沈み込みを増大し、ディ
スクとの接触による損傷が発生し問題となる点について
考慮がされていなかった。またロール剛性の低下は、ス
ライダの加工、組み立てで発生するスライダ幅方向の誤
差に対して大きな浮上量の変化又は低下をもたらし、生
産の観点から問題である。In the conventional negative pressure utilizing floating head slider, it is necessary to reduce the flying height in order to increase the linear density with the miniaturization and large capacity of the storage medium. Has improved the yaw angle characteristics with a constant width taper flat type by narrowing the center part width of the positive pressure rail and making the front and rear widths wide enough, but the substantial rail center distance of the side rails However, no consideration has been given to the fact that the size of the roller causes a reduction in roll stiffness, an increase in acceleration sink, and damage due to contact with the disk. In addition, a decrease in roll rigidity causes a large change or decrease in the flying height with respect to an error in the slider width direction generated during processing and assembly of the slider, and is a problem from the viewpoint of production.
【００１７】そしてコンタクト スタート ストップ時
にクロスレールがディスク面の粗さや突起を削り発塵の
原因になること、浮上中にクロスレールに進入した塵埃
の排出部がなく、クロスレール流入端部への付着成長や
クロスレールへの進入による塵埃を介した接触によるデ
ィスク面の損傷の問題点が考慮されていなかった。At the start and stop of the contact, the cross rail cuts the roughness and protrusions of the disk surface and causes dust. Also, there is no discharge portion for dust entering the cross rail during floating, and the dust adheres to the cross rail inflow end. No consideration has been given to the problem of disk surface damage due to contact through dust due to growth or entry into the crossrail.
【００１８】さらにサイドレールのくびれ部及びクロス
レールと負圧部の深さとを異なって形成した構成では、
２種類のマスクを使って２回加工する必要があり、マス
クの位置合わせや深さ加工誤差による浮上特性のばらつ
き、製作時間による加工コストの増加等の点で問題とな
る点について考慮がされていなかった。Further, in the configuration in which the constricted portion and the cross rail of the side rail and the depth of the negative pressure portion are formed differently,
It is necessary to perform processing twice using two types of masks, and consideration is given to problems such as variations in floating characteristics due to mask positioning and depth processing errors, and an increase in processing costs due to manufacturing time. Did not.
【００１９】その他の負圧利用スライダでは、ヨー角特
性に対する配慮がされておらず浮上量変動の点で問題が
あり、ロータリー方式の場合は浮上量を一定にすること
もできず問題である。Other sliders utilizing negative pressure do not take yaw angle characteristics into consideration, and thus have a problem in terms of flying height variation. In the case of the rotary system, the flying height cannot be made constant, which is a problem.
【００２０】テーパフラット形スライダでは、テーパ部
への塵埃付着による正圧発生の減少により浮上量の低下
が起こり、ディスクとの接触による損傷が発生の可能性
が高く信頼性確保の観点から問題となる点が考慮されて
いなかった。また、スライダの小形化によって正圧力に
対し負圧力を確保できなくなる点が考慮されていなかっ
た。In the taper flat type slider, the flying height is reduced due to the decrease in the positive pressure due to the adhesion of dust to the tapered portion, and the possibility of damage due to contact with the disk is high. Was not taken into account. In addition, no consideration has been given to the point that the negative pressure cannot be secured for the positive pressure due to the downsizing of the slider.
【００２１】本発明の目的は、小型化したスライダの浮
上の速度特性と、ヨー角特性とが優れ、アクセス機構の
方式に関係なくディスク上の任意の位置の浮上量をほぼ
一定にし、かつ浮上量変動を小さく押え安定浮上する低
浮上量に適した負圧利用浮動ヘッドスライダ、磁気スラ
イダ及び回転円板記憶装置を提供することにある。An object of the present invention is to provide a slider having a reduced flying speed characteristic and an excellent yaw angle characteristic, to make the flying height at an arbitrary position on the disk almost constant irrespective of the type of the access mechanism, and to raise the flying height. An object of the present invention is to provide a negative pressure utilizing floating head slider, a magnetic slider, and a rotating disk storage device which are suitable for a low flying height which stably floats with a small amount of fluctuation.
【００２２】また、本発明の他の目的は、スライダの流
入側の気体軸受面への塵埃付着を回避し低浮上量に適
し、また浮上特性が良好で耐摺動性に優れた負圧利用浮
動ヘッドスライダ、磁気スライダ及び回転円板記憶装置
を提供することにある。Another object of the present invention is to use a negative pressure which is suitable for a low flying height by preventing dust from adhering to the gas bearing surface on the inflow side of the slider, and which has good floating characteristics and excellent sliding resistance. An object of the present invention is to provide a floating head slider, a magnetic slider, and a rotating disk storage device.
【００２３】[0023]
【課題を解決するための手段】前記の目的を達成するた
め、本発明に係る負圧利用浮動ヘッドスライダは、回転
する記憶媒体に対向して配置され、流出入方向と交叉す
る幅方向のそれぞれの側に設けた一対の正圧発生面と、
幅方向の中央に流出端まで延設されかつ流出端面にトラ
ンスデューサを搭載した中央正圧発生面と、それぞれの
正圧発生面と中央正圧発生面とに流入側で同一浮上面を
形成して接続するクロスレールとよりなる気体軸受面を
有し、かつクロスレールとそれぞれの正圧発生面と中央
正圧発生面のそれぞれに囲まれた逆ステップ状の凹部を
有する負圧利用浮動スライダにおいて、それぞれの正圧
発生面の浮上面は、流出入方向のほぼ中央に設けた一つ
のくびれ部により流入側より流出側に向けて浮上面幅を
狭めたのち浮上面幅が広がり、かつ流出端より離間する
位置に至る形状を有し、中央正圧発生面は、ほぼ中央よ
り流出側に向けて浮上面幅が広がる形状を有し、クロス
レールは、流入端より凹部に至る全幅を正圧発生面に形
成されている構成とする。In order to achieve the above object, a negative pressure utilizing floating head slider according to the present invention is arranged to face a rotating storage medium and has a width direction crossing a flow direction. A pair of positive pressure generating surfaces provided on the side of
A central positive pressure generating surface extending to the outflow end at the center in the width direction and having a transducer mounted on the outflow end surface, and forming the same floating surface on the inflow side of each of the positive pressure generating surface and the central positive pressure generating surface. In a negative pressure utilizing floating slider having a gas bearing surface comprising a cross rail to be connected, and having an inverted step-shaped recess surrounded by the cross rail and each of the positive pressure generating surface and the central positive pressure generating surface, The air bearing surface of each positive pressure generating surface is reduced in width from the inflow side to the outflow side by one constriction provided at the approximate center of the outflow / inflow direction, and then the airway surface width is widened, and from the outflow end The center positive pressure generating surface has a shape that extends from the center toward the outflow side, and the cross rail generates positive pressure over the entire width from the inflow end to the recess. Configuration formed on the surface To.
【００２４】そして回転する記憶媒体に対向して配置さ
れ、流出入方向と交叉する幅方向のそれぞれの側に設け
た一対の正圧発生面と、幅方向の中央に流出端まで延設
されかつ流出端面にトランスデューサを搭載した中央正
圧発生面と、それぞれの正圧発生面と中央正圧発生面と
に流入側で同一浮上面を形成して接続するクロスレール
とよりなる気体軸受面を有し、かつクロスレールとそれ
ぞれの正圧発生面と中央正圧発生面のそれぞれに囲まれ
た逆ステップ状の凹部を有する負圧利用浮動スライダに
おいて、それぞれの正圧発生面の浮上面は、流出入方向
のほぼ中央に設けた一つのくびれ部により流入側より流
出側に向けて浮上面幅を狭めたのち浮上面幅が広がり、
かつ流出端より離間する位置に至る形状を有し、中央正
圧発生面は、ほぼ中央より流出側に向けて浮上面幅が広
がる形状を有し、クロスレールに、流入端部のそれぞれ
の側に凹部とほぼ同じ深さの第２の凹部を設けるととも
に、それぞれの第２の凹部より凹部に至る範囲を正圧発
生面で形成した構成でもよい。A pair of positive pressure generating surfaces provided on each side in the width direction intersecting with the inflow / outflow direction and opposed to the rotating storage medium; and a center extending in the width direction extending to the outflow end; It has a gas bearing surface consisting of a central positive pressure generating surface with a transducer mounted on the outflow end surface, and a cross rail which forms the same floating surface on the inflow side and connects to each positive pressure generating surface and the central positive pressure generating surface. And the floating surface of each positive pressure generating surface has an outflow surface in a negative pressure utilizing floating slider having a cross rail, a reverse step-shaped concave portion surrounded by each of the positive pressure generating surface and the central positive pressure generating surface. One constricted part provided at the approximate center of the entry direction reduces the air bearing surface width from the inflow side to the outflow side, and then increases the air bearing surface width,
And a shape extending to a position away from the outflow end, and the central positive pressure generating surface has a shape in which the floating surface width increases from substantially the center toward the outflow side, and each side of the inflow end portion is provided on the cross rail. The second concave portion having substantially the same depth as that of the concave portion may be provided, and a range from each second concave portion to the concave portion may be formed by a positive pressure generating surface.
【００２５】またクロスレールは、流入端部に傾斜面を
設けてある構成でもよい。The cross rail may have a configuration in which an inclined surface is provided at the inflow end.
【００２６】さらに気体軸受面は、記憶媒体側でかつ流
出方向に凸曲率を有する曲面で形成されている構成でも
よい。Further, the gas bearing surface may be formed as a curved surface having a convex curvature in the outflow direction on the storage medium side.
【００２７】そして磁気ヘッドスライダにおいては、前
記いずれか一つの負圧利用浮動ヘッドスライダに、磁気
抵抗素子を搭載した構成とする。The magnetic head slider has a configuration in which a magnetoresistive element is mounted on any one of the negative pressure utilizing floating head sliders.
【００２８】また回転円板記憶装置においては、前記い
ずれか一つの負圧利用浮動ヘッドスライダを装着した構
成とする。Further, in the rotating disk storage device, any one of the above-mentioned negative pressure utilizing floating head sliders is mounted.
【００２９】さらに回転円板記憶装置においては、前記
いずれか一つの負圧利用浮動ヘッドスライダを装着し、
記憶媒体は半径方向に記録エリアを分割し、それぞれの
記録エリアの記録密度がほぼ等しく記録再生されている
構成とする。Further, in the rotating disk storage device, any one of the negative pressure utilizing floating head sliders is mounted,
The storage medium has a configuration in which the recording area is divided in the radial direction, and the recording density of each recording area is approximately equal to that of the recording area.
【００３０】[0030]
【作用】本発明によれば、スライダの両側の一対の正圧
発生面の流入側にテーパ部がない構造は、浮上中に浮上
面に塵埃付着が発生してもＣＳＳもしくはディスク面へ
の近接により取り除くことが可能となり、テーパ部への
塵埃付着による正圧発生の減少による浮上量の低下がな
くなる。また、浮上面の両側に窪み（凹部）を設け、テ
ーパ部を減らす構造でも正の圧力発生へのテーパ部の寄
与率を低くしているためテーパ部への塵埃付着による正
圧発生の減少により浮上量の低下が小さく押えられる。According to the present invention, the structure in which there is no tapered portion on the inflow side of the pair of positive pressure generating surfaces on both sides of the slider can be used even if dust adheres to the air bearing surface during flying, even if it is close to the CSS or the disk surface. , And the decrease in the flying height due to the decrease in the generation of the positive pressure due to the adhesion of dust to the tapered portion is eliminated. In addition, even with a structure in which the tapered portion is reduced by providing dents (concave portions) on both sides of the air bearing surface, the contribution of the tapered portion to the generation of the positive pressure is reduced. The decrease in the flying height is kept small.
【００３１】また、スライダの両側の一対の正圧発生面
の流入側にテーパ部がないもしくは両側窪み（第２の凹
部）を設け、テーパ部を減らす構造は、従来のテーパフ
ラット形に比べてテーパ部での正の圧力上昇がなくなる
もしくは押えられて平板軸受に近い特性が得られ、速度
の増加に対する発生浮上力が小さくなる。一方、速度の
増加によりスライダの浮上姿勢角が大きくなると、流出
端まで達していない浮上面の隙間が増大して空気流が流
出側へ流れ、その分、くびれ部の後方（流出側）で発生
する浮上力が小さくなる。その結果、スライダが小形化
し負圧面積が小さくなり、クロスレールの流出側の逆ス
テップ状の凹部に働く負圧力が小さくても中央正圧発生
面の流出端は負圧力の発生が小さい低速度で早く浮上
し、速度の増加による負圧力の増加と正圧の浮上力とが
釣合うように働き浮上量変化を押えるように作用する。A structure in which there is no tapered portion or a recess (second concave portion) on both sides of the pair of positive pressure generating surfaces on both sides of the slider to reduce the tapered portion is smaller than that of the conventional tapered flat type. The positive pressure rise in the tapered portion is eliminated or suppressed, so that characteristics similar to a flat plate bearing are obtained, and the generated levitation force with respect to an increase in speed is reduced. On the other hand, when the flying attitude angle of the slider increases due to an increase in the speed, the gap of the flying surface that does not reach the outflow end increases, and the airflow flows to the outflow side, and accordingly, the airflow is generated behind the constricted portion (outflow side). Levitation force is reduced. As a result, the slider is reduced in size and the negative pressure area is reduced, and even if the negative pressure acting on the reverse step-shaped concave portion on the outflow side of the cross rail is small, the outflow end of the central positive pressure generation surface has low negative pressure and low speed. And acts to balance the increase in the negative pressure due to the increase in the speed with the levitation force of the positive pressure, thereby suppressing the change in the flying height.
【００３２】また、スライダの両側の一対の正圧発生面
に長手方向（流出入方向）のほぼ中央に流入側より流出
側に向けてレール幅が一旦狭まるくびれ部を設け、流出
側に向けてレール幅が広がる形状により、ヨー角がない
場合の正圧発生面の有効面積とヨー角がある場合の正圧
発生面の有効面積との変化が小さく押えられる。通常、
ヨー角が付いた場合、流入側の浮上面の浮上量が低下す
るがスライダの中央側よりのレール幅の広がりはその浮
上面の浮上力増加に働き、スライダの幅方向の傾きを抑
制する作用がある。特に両側の流出端まで達しないで、
正圧発生面の後端をサイドから流出端中央に向けた傾斜
線分を持つように形成することにより、ヨー角がない場
合よりヨー角がある場合の方がくびれ部の流出側のレー
ル長さを長くすることができ、ヨー角による浮上量低下
を押えるように作用する。また、圧力がスライダ長手方
向前後に分離できるため、ピッチ方向の剛性が高められ
る。A pair of positive pressure generating surfaces on both sides of the slider is provided with a constricted portion in which the rail width is temporarily reduced from the inflow side to the outflow side at substantially the center in the longitudinal direction (outflow / inflow direction), and is directed toward the outflow side. Due to the shape in which the rail width is widened, a change between the effective area of the positive pressure generating surface when there is no yaw angle and the effective area of the positive pressure generating surface when there is no yaw angle is suppressed. Normal,
When the yaw angle is applied, the flying height of the flying surface on the inflow side decreases, but the expansion of the rail width from the center of the slider acts to increase the floating force of the flying surface and suppresses the inclination of the slider in the width direction. There is. Especially without reaching the outflow ends on both sides,
By forming the rear end of the positive pressure generating surface so as to have an inclined line segment from the side to the center of the outflow end, the rail length on the outflow side of the constricted part is greater when there is a yaw angle than when there is no yaw angle. The length can be lengthened, and acts to suppress a decrease in the flying height due to the yaw angle. Further, since the pressure can be separated in the longitudinal direction of the slider, the rigidity in the pitch direction can be increased.
【００３３】さらに、両側の一対の正圧発生面をスライ
ダの流出端まで達しない構造で、かつ中央正圧発生面幅
をトランスデューサの搭載可能幅にする構造により、ス
ライダ浮上中の最低浮上量の位置を中央正圧発生面の流
出端にでき、ロール方向（幅方向）の浮上量変動に対抗
する力を一対の正圧発生面によるロール剛性が担当する
ため、スライダ幅より狭い中央正圧発生面の流出端幅に
対応して浮上量変動がし難く作用する。特にロール方向
の浮上量変動時も中央正圧発生面の流出端が最低浮上量
となるように一対の正圧発生面の後端を決め、そこから
中央正圧発生面の流出端に向けた傾斜線分を有する構造
とすることにより、最低浮上量の可能性を中央正圧発生
面の流出端と決定でき、かつロール剛性を高めることを
可能にする。Further, a structure in which a pair of positive pressure generating surfaces on both sides does not reach the outflow end of the slider and a structure in which the width of the central positive pressure generating surface is set to a width in which the transducer can be mounted is adopted. The center positive pressure generation surface can be positioned at the outflow end, and the force against the fluctuation of the flying height in the roll direction (width direction) is controlled by the roll rigidity of the pair of positive pressure generation surfaces. The flying height is hardly fluctuated according to the outflow end width of the surface. In particular, the rear ends of the pair of positive pressure generating surfaces are determined so that the outflow end of the central positive pressure generating surface has the minimum floating amount even when the floating amount fluctuates in the roll direction. With the structure having the inclined line segment, the possibility of the minimum flying height can be determined as the outflow end of the central positive pressure generating surface, and the roll rigidity can be increased.
【００３４】[0034]
【実施例】本発明の第１の実施例を図１を参照しながら
説明する。図１に示すように、回転する記憶媒体に対向
して配置するスライダ１２の気体軸受面１３は、流出方
向と交叉する幅方向の両側に設けた一対の正圧発生面
（以下、サイドレールと称す）１５と、幅方向の中央に
流出端まで延設されかつ流出端面にトランスデューサ１
１を搭載した中央正圧発生面（以下、センターレールと
称す）２０とよりなり、サイドレール１５は流入側から
流出側に向けてレール幅が一旦狭まるくびれ部２１を有
する。くびれ部２１は、スライダ１２の長手方向（流出
入方向）中央より流入側に設けている。本実施例ではレ
ールの内側を変化させ幅を変化させている。その角度は
磁気ディスク装置に搭載した場合のヨー角の最大値と最
内周におけるシーク時ヨー角との和と同程度である。く
びれ部２１の流出側の幅方向に広がりを持った後部軸受
面２４はサイドレール後端２２で終っており、スライダ
の流出端より離間する位置に至る形状を有している。サ
イドレール１５とセンターレール２０の流入側はクロス
レール１８により流入端までほぼ同一平面内でつながれ
ている。クロスレール１８、サイドレール１５及びセン
ターレール２０の内側面で囲まれた凹部が逆ステップ状
負圧部（以下、負圧ポケット部と称す）１９を形成す
る。クロスレール１８は流入端まで達している。センタ
ーレール２０の幅はスライダの中央より流出側に向けて
広がり、三角形状の広がり部２６を形成し流出端に達す
る構造としている。負圧ポケット１９はイオンミリング
等で加工されその深さは約１０μｍ以下と浅く形成され
て構成されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIG. As shown in FIG. 1, a gas bearing surface 13 of a slider 12 arranged to face a rotating storage medium has a pair of positive pressure generating surfaces (hereinafter referred to as side rails) provided on both sides in a width direction intersecting an outflow direction. 15), extending to the outflow end at the center in the width direction and having the transducer 1 on the outflow end face.
1 and a center positive pressure generating surface (hereinafter referred to as a center rail) 20 on which the side rail 1 is mounted. The side rail 15 has a constricted portion 21 in which the rail width temporarily decreases from the inflow side to the outflow side. The constricted portion 21 is provided on the inflow side from the center of the slider 12 in the longitudinal direction (outflow / inflow direction). In this embodiment, the width is changed by changing the inside of the rail. The angle is substantially equal to the sum of the maximum value of the yaw angle when mounted on the magnetic disk device and the yaw angle at the time of seeking at the innermost circumference. A rear bearing surface 24 having a width in the width direction on the outflow side of the constricted portion 21 ends at the rear end 22 of the side rail, and has a shape reaching a position separated from the outflow end of the slider. The inflow sides of the side rail 15 and the center rail 20 are connected by a cross rail 18 to the inflow end in substantially the same plane. A recess surrounded by the inner surfaces of the cross rail 18, the side rails 15, and the center rail 20 forms a reverse stepped negative pressure portion (hereinafter, referred to as a negative pressure pocket portion) 19. The cross rail 18 has reached the inflow end. The width of the center rail 20 is widened from the center of the slider toward the outflow side to form a triangular expansion portion 26 and reaches the outflow end. The negative pressure pocket 19 is processed by ion milling or the like, and has a depth of about 10 μm or less and is formed to be shallow.
【００３５】本実施例の気体軸受の動作を図１及び図２
を参照しながら説明する。図２は本実施例の圧力分布の
斜視図である。記録媒体の回転に伴う空気流は、スライ
ダの気体軸受面１３の連続的なくさび形すきま変化によ
り流入側から除々に圧縮されてほぼ直線状に圧力上昇Ａ
し、両側の空気流はサイドレール１５を進み、スライダ
の幅方向中央部を除く空気流はクロスレール１８を経て
逆ステップ状に広がった負圧ポケット部１９で膨張し雰
囲気圧力より低い圧力即ち負圧Ｅになり、流出端へ進
む。センタレール２０は、レール幅の狭い流入側では両
側の負圧ポケット部１９の負圧の影響で負圧となり、広
がり部２６を持つ流出側で正圧を発生する。サイドレー
ル１５を進む空気流は、くびれ部２１によるサイドレー
ル幅の減少によるサイドフローと負圧ポケットへの流れ
込みにより、急激な圧力降下Ｂを起こし、その後、後部
軸受面２４で再び圧力は上昇し、前後に圧力のピークＣ
を作る。さらにサイドレール後端２２で一旦弱い負圧に
なり雰囲気圧力に戻る。FIGS. 1 and 2 show the operation of the gas bearing of this embodiment.
This will be described with reference to FIG. FIG. 2 is a perspective view of the pressure distribution of the present embodiment. The air flow accompanying the rotation of the recording medium is gradually compressed from the inflow side by the continuous wedge-shaped clearance change of the gas bearing surface 13 of the slider, and the pressure rise A substantially linearly.
Then, the air flow on both sides advances on the side rails 15, and the air flow excluding the center portion in the width direction of the slider expands in the negative pressure pocket portion 19, which spreads in a reverse step shape through the cross rail 18, and the pressure is lower than the ambient pressure, that is, the negative pressure Pressure E is reached and the flow proceeds to the outflow end. The center rail 20 has a negative pressure on the inflow side with a narrow rail width due to the negative pressure of the negative pressure pockets 19 on both sides, and generates a positive pressure on the outflow side having the expanding portion 26. The airflow traveling on the side rail 15 causes a rapid pressure drop B due to the side flow caused by the reduction of the width of the side rail due to the constriction 21 and the flow into the negative pressure pocket, and thereafter the pressure increases again at the rear bearing surface 24. , Pressure peak C before and after
make. Further, the pressure becomes a weak negative pressure once at the rear end 22 of the side rail, and returns to the atmospheric pressure.
【００３６】本実施例によれば、スライダ１２の両側の
サイドレール１５の流入側にテーパ部がない（つまり、
変曲点を持たない気体軸受面１３）構造は、従来のテー
パフラット形スライダで問題となったテーパ部への塵埃
付着による正圧発生の減少により浮上量の低下の問題を
なくすことができる。本構造では浮上中に気体軸受面１
３に塵埃付着が発生してもＣＳＳもしくはディスク（記
録媒体）面への近接により取り除くことが可能となる。
その結果、塵埃に対する信頼性を確保することができ
る。According to this embodiment, there is no tapered portion on the inflow side of the side rail 15 on both sides of the slider 12 (that is,
The gas bearing surface 13) having no inflection point 13) can eliminate the problem of a decrease in the flying height due to a decrease in the generation of a positive pressure due to the adhesion of dust to the tapered portion, which is a problem in the conventional tapered flat slider. In this structure, the gas bearing surface 1
Even if dust adheres to the surface 3, it can be removed by approaching CSS or a disk (recording medium) surface.
As a result, reliability against dust can be ensured.
【００３７】また、本実施例の構造では、サイドレール
１５は平板軸受に近い直線的な正の圧力上昇特性を得
る。その結果、従来のテーパフラット形に比べて記憶媒
体の速度の増加に対する発生浮上力の増加が小さくな
る。また速度の増加によりスライダ１２の浮上姿勢角が
大きくなる。すると流出端まで達していない浮上面の隙
間は増大し、空気流が流出側にながれてその分、くびれ
部２１の流出側の後部軸受面２４で発生する浮上力は小
さくなる。その結果、スライダ１２が２ｍｍ以下に小形
化し負圧ポケット部１９の面積が小さくなり、負圧ポケ
ット部１９に働く負圧力が小さくてもセンターレール２
０の流出端の浮上量は負圧力の発生が小さい低速度で早
く浮上し、速度の増加による負圧力の増加と正圧の浮上
力とが釣合うように働き浮上量変動を押えることができ
る。Further, in the structure of this embodiment, the side rail 15 has a linear positive pressure rise characteristic close to a flat plate bearing. As a result, compared to the conventional tapered flat type, the increase in the generated levitation force with respect to the increase in the speed of the storage medium is reduced. In addition, the flying attitude angle of the slider 12 increases as the speed increases. Then, the clearance of the floating surface not reaching the outflow end increases, and the airflow flows to the outflow side, and accordingly, the levitation force generated on the rear bearing surface 24 on the outflow side of the constricted portion 21 decreases. As a result, the size of the slider 12 is reduced to 2 mm or less and the area of the negative pressure pocket 19 is reduced.
The floating amount at the outflow end of 0 rises quickly at a low speed where the generation of negative pressure is small, and the increase in negative pressure due to the increase in speed works with the floating force of positive pressure to suppress fluctuations in floating amount. .
【００３８】また、スライダ１２のサイドレール１５
は、ヨー角に対応した流入端からくびれ部２１まで先狭
まりと、くびれ部２１からサイドレール後端２２までの
先広がりとの後部軸受面２４の構造により、ヨー角の有
無によるくびれ部２１を通る外側面との平行線で囲まれ
たサイドレール１５の面積の変化を小さくし、かつ流入
端より全幅に渡るクロスレール１８によりヨー角特性を
向上している。さらに本構造によりヨー角がついて気体
が流入する側のサイドレール１５の後部軸受面２２の正
圧の発生を大きくし、ヨー角が付いた場合のスライダの
幅方向の傾きを防止している。The side rail 15 of the slider 12
The constricted portion 21 depending on the presence or absence of the yaw angle is formed by the structure of the rear bearing surface 24 that narrows forward from the inflow end corresponding to the yaw angle to the constricted portion 21 and expands from the constricted portion 21 to the rear end 22 of the side rail. The change in the area of the side rail 15 surrounded by a parallel line with the passing outer surface is reduced, and the yaw angle characteristic is improved by the cross rail 18 extending over the entire width from the inflow end. Further, this structure increases the generation of a positive pressure on the rear bearing surface 22 of the side rail 15 on the side where the gas flows in with the yaw angle, thereby preventing the slider from tilting in the width direction when the yaw angle is formed.
【００３９】本実施例のサイドレール１５の軸受面２４
がサイドレール後端２２で終っておりスライダの流出端
まで達しない構造は、気体軸受のロール剛性の低下を押
さえつつ、シーク時のシーク加速度によるロール方向
（幅方向）の浮上量変動に影響を与える腕長さをセンタ
ーレール２０の流出端幅に減らし、センターレールの浮
上量低下を小さく押える効果がある。The bearing surface 24 of the side rail 15 of this embodiment
Ends at the rear end 22 of the side rail and does not reach the outflow end of the slider, while suppressing the reduction in roll rigidity of the gas bearing, and affecting the fluctuation of the flying height in the roll direction (width direction) due to seek acceleration during seek. The length of the given arm is reduced to the width of the outflow end of the center rail 20, which has the effect of suppressing a decrease in the flying height of the center rail.
【００４０】本実施例は気体軸受面の形状が単純であ
り、加工時の寸法誤差による浮上量のばらつきを押える
効果がある。In this embodiment, the shape of the gas bearing surface is simple, and there is an effect of suppressing the variation in the flying height due to a dimensional error during processing.
【００４１】また、内外周間の任意の位置の浮上量を概
ね一定にすることができ、トランスデューサとして磁気
抵抗素子を用いることにより高記憶密度化した磁気ヘッ
ドスライダを構成することができる。Further, the flying height at an arbitrary position between the inner and outer circumferences can be made substantially constant, and a magnetic head slider having a high storage density can be constructed by using a magnetoresistive element as a transducer.
【００４２】図３は本発明の第２の実施例を示す斜視図
である。サイドレール１５とセンターレール２０の流入
側部はクロスレール１８により流入端までほぼ同一平面
内で接続されており、両側のサイドレール１５の流入端
部に窪み（第２の凹部）２５を設けた構成である。窪み
２５の深さは負圧ポケット部１９とほぼ同じである。FIG. 3 is a perspective view showing a second embodiment of the present invention. The inflow side portions of the side rails 15 and the center rail 20 are connected to each other in substantially the same plane up to the inflow end by the cross rail 18, and the inflow end portions of the side rails 15 on both sides are provided with depressions (second concave portions) 25. Configuration. The depth of the depression 25 is substantially the same as that of the negative pressure pocket portion 19.
【００４３】本実施例によれば、流入端まで達したクロ
スレール１８の流入側の両サイドに設けた窪み２５によ
り流入側に正の圧力の発生が偏るのを防ぎ、かつ小さく
押えることができる。その結果、スライダ小形化により
負圧面積が減少し負圧力が減少しても浮上の速度特性を
ほぼ一定に保つことができる。本実施例は、テーパ部を
持たないため塵埃付着に関し、前記と同様の効果があ
る。According to the present embodiment, the depressions 25 provided on both sides on the inflow side of the cross rail 18 reaching the inflow end can prevent the generation of positive pressure from being biased toward the inflow side, and can keep the pressure small. . As a result, even if the negative pressure area decreases due to the reduction in size of the slider and the negative pressure decreases, the flying speed characteristic can be kept substantially constant. This embodiment has the same effect as described above regarding dust adhesion because it has no tapered portion.
【００４４】図４は本発明の第３の実施例を示す斜視図
である。サイドレール１５とセンターレール２０の流入
端部はクロスレール１８によりほぼ同一平面内で接続さ
れ流入側に向けてテーパ部１４を設け、両側のサイドレ
ール１５の流入端部に窪み２５を設けた実施例である。FIG. 4 is a perspective view showing a third embodiment of the present invention. The inflow ends of the side rails 15 and the center rail 20 are connected in substantially the same plane by a cross rail 18, a tapered portion 14 is provided toward the inflow side, and a recess 25 is provided at the inflow ends of the side rails 15 on both sides. It is an example.
【００４５】本実施例によれば、サイドレール１５の流
入端部の窪み２５により正圧レール部のテーパ部をなく
すまたは減らす構造によりサイドレール１５の正圧発生
量を調節できる。その結果、スライダ小形化により負圧
面積が減少し負圧力が減少しても浮上の速度特性をほぼ
一定に保つことができる。また、正の圧力発生へのテー
パ部１４の寄与率を低くでき、テーパ部１４への塵埃付
着による正圧発生の減少による浮上量の低下の問題を小
さく押えることができる。結局、塵埃に対する信頼性を
確保することができる。According to the present embodiment, the amount of positive pressure generated in the side rail 15 can be adjusted by a structure in which the recess 25 at the inflow end of the side rail 15 eliminates or reduces the tapered portion of the positive pressure rail. As a result, even if the negative pressure area decreases due to the reduction in size of the slider and the negative pressure decreases, the flying speed characteristic can be kept substantially constant. Further, the contribution ratio of the tapered portion 14 to the generation of the positive pressure can be reduced, and the problem of a decrease in the flying height due to a decrease in the generation of the positive pressure due to the adhesion of dust to the tapered portion 14 can be suppressed. As a result, reliability against dust can be ensured.
【００４６】図５は本発明の第４の実施例を示す斜視図
である。サイドレール１５の流入端部に設けた窪み（第
２の凹部）２８が流れ方向に平行部と広がり部とから形
成され、また、それぞれの後部軸受面２４は、サイドレ
ール後端２２がセンターレール２０側で流出端にほぼ平
行する平行線と内側が側面にほぼ平行する平行線とを有
し、それぞれの平行線のなす角度θが９０°以上に形成
され、さらにセンターレール２０の流出側は側面とほぼ
平行する平行部を有して構成された実施例である。FIG. 5 is a perspective view showing a fourth embodiment of the present invention. A recess (second recess) 28 provided at the inflow end of the side rail 15 is formed of a parallel portion and a widening portion in the flow direction, and each rear bearing surface 24 has a side rail rear end 22 at the center rail. 20 has a parallel line substantially parallel to the outflow end and a parallel line whose inside is substantially parallel to the side surface, and the angle θ formed by each parallel line is formed to be 90 ° or more, and the outflow side of the center rail 20 is This is an embodiment configured to have a parallel portion substantially parallel to a side surface.
【００４７】本実施例によれば、浮上中の窪み２８への
塵埃の堆積が軽減され、本実施例でも前記と同様の効果
がある。また、角度θを９０°以上とすることにより、
エッチング加工による成形形状を精度よくすることが可
能となり、さらに、センターレール２０の流出側の平行
部は浮上量測定時のレール位置決めの自動化を可能と
し、浮上量測定位置精度が向上する効果がある。According to the present embodiment, the accumulation of dust in the dents 28 during floating is reduced, and the present embodiment has the same effect as described above. Further, by setting the angle θ to 90 ° or more,
The shape formed by the etching process can be made with high precision, and furthermore, the parallel portion on the outflow side of the center rail 20 enables the rail positioning to be automated at the time of measuring the flying height, thereby improving the accuracy of the flying height measurement position. .
【００４８】なお、本発明は前記実施例に限定されるも
のではなく、例えは窪み２５，２８の形状、大きさは仕
様に応じて定めればよい。また、気体軸受面は平面でも
よく、また記憶媒体側でかつ流出入方向に微小凸曲率
（例えば数十ｎｍ）を持つ曲面で構成することによりＣ
ＳＳ時の粘着を回避し、浮上を早める効果がある。The present invention is not limited to the above-described embodiment. For example, the shapes and sizes of the depressions 25 and 28 may be determined according to the specifications. In addition, the gas bearing surface may be a flat surface, and may be constituted by a curved surface having a small convex curvature (for example, several tens of nm) on the storage medium side and in the inflow / outflow direction.
This has the effect of avoiding sticking during SS and accelerating the ascent.
【００４９】図６は本発明の負圧利用浮動ヘッドスライ
ダを搭載したリニア形磁気ディスク装置（回転円板記憶
装置）を示す図である。キャリッジ４４にガイドアーム
４３が結合され、ガイドアーム４４にトランスデューサ
支持装置４２が連結され、トランスデューサ支持装置４
２の先端部にトランスデューサ１１を搭載したスライダ
１２が装着されている。スライダ１２はボイスコイルモ
ータ４５で駆動され回転する記録媒体４１の半径方向に
進退する。本実施例により内外周間の任意の位置の浮上
量を概ね一定にすることができ、かつ浮上量変動が小さ
く安定して浮上するため、スライダの浮上量の微小化が
可能となり記録媒体の高密度記憶を実現できる。さらに
本発明の負圧利用浮動ヘッドスライダを用いることによ
り回転円板の半径方向に記録エリアを分割し、各エリア
の記録密度がほぼ等しくなり記録媒体の高密度記憶を実
現できる。FIG. 6 is a view showing a linear magnetic disk device (rotating disk storage device) on which the negative pressure utilizing floating head slider of the present invention is mounted. The guide arm 43 is connected to the carriage 44, and the transducer support device 42 is connected to the guide arm 44.
A slider 12 on which a transducer 11 is mounted is mounted at the tip of the second. The slider 12 advances and retreats in the radial direction of the rotating recording medium 41 driven by the voice coil motor 45. According to this embodiment, the flying height at an arbitrary position between the inner and outer circumferences can be made substantially constant, and the flying height variation is small and the flying height is stable. Therefore, the flying height of the slider can be reduced, and the height of the recording medium can be reduced. A density memory can be realized. Further, by using the negative pressure utilizing floating head slider of the present invention, the recording area is divided in the radial direction of the rotating disk, and the recording densities of the respective areas are substantially equal, so that high-density recording of the recording medium can be realized.
【００５０】図７は本発明の負圧利用浮動ヘッドスライ
ダを搭載したロータリー（インライン）形の磁気ディス
ク装置を示す一部断面斜視図である。キャリッジ４４に
結合されたトランスデューサ支持装置４２の先端部にト
ランスデューサ１１を搭載したスライダ１２が装着され
ている。本実施例によっても前記と同様の効果が得られ
る。FIG. 7 is a perspective view, partly in section, showing a rotary (in-line) type magnetic disk drive equipped with a negative pressure utilizing floating head slider according to the present invention. The slider 12 on which the transducer 11 is mounted is mounted on the tip of the transducer support device 42 connected to the carriage 44. According to this embodiment, the same effect as described above can be obtained.
【００５１】[0051]
【発明の効果】本発明によれば、気体軸受面のサイドレ
ールの正の圧力を低減して調節でき、スライダ小形化に
より負圧面積が減少し負圧力が減少しても浮上の速度特
性をほぼ一定に保つことができる。また、ヨー角特性に
優れ、アクセス機構の方式に関係なくディスク上の任意
の位置の浮上量をほぼ一定にすることができる。According to the present invention, the positive pressure of the side rails on the gas bearing surface can be reduced and adjusted, and the negative pressure area can be reduced by reducing the size of the slider. It can be kept almost constant. Further, the yaw angle characteristic is excellent, and the flying height at an arbitrary position on the disk can be made substantially constant regardless of the type of the access mechanism.
【００５２】さらに、サイドレールのテーパ部を廃止し
たため流入側気体軸受面への塵埃付着を回避もしくは低
減することができ、テーパ部への塵埃付着による正圧発
生の減少により浮上量の低下を防止することができる。
浮上中に気体軸受面に塵埃付着が発生してもＣＳＳもし
くはディスク面への近接により取り除くことが可能とな
る。その結果、塵埃に対する信頼性を確保することがで
きる。Further, since the tapered portion of the side rail is eliminated, dust adhesion to the inflow-side gas bearing surface can be avoided or reduced, and a decrease in the floating amount due to a decrease in the generation of positive pressure due to the dust adhesion to the tapered portion is prevented. can do.
Even if dust adheres to the gas bearing surface during floating, it can be removed by approaching the CSS or the disk surface. As a result, reliability against dust can be ensured.
【００５３】さらに、シーク時の加速度による浮上量変
動を小さく押え安定浮上する負圧利用浮動ヘッドスライ
ダを得ることができる。Further, it is possible to obtain a negative pressure utilizing floating head slider which stably flies while suppressing the fluctuation of the flying height due to the acceleration at the time of seeking.
【００５４】また、浮上面形状の単純化により加工性を
向上させる効果がある。Further, there is an effect that workability is improved by simplifying the shape of the floating surface.
【図１】本発明の第１の実施例を示す斜視図である。FIG. 1 is a perspective view showing a first embodiment of the present invention.
【図２】図１の圧力分布を示す斜視図である。FIG. 2 is a perspective view showing the pressure distribution of FIG.
【図３】本発明の第２の実施例を示す斜視図である。FIG. 3 is a perspective view showing a second embodiment of the present invention.
【図４】本発明の第３の実施例を示す斜視図である。FIG. 4 is a perspective view showing a third embodiment of the present invention.
【図５】本発明の第４の実施例を示す平面図である。FIG. 5 is a plan view showing a fourth embodiment of the present invention.
【図６】本発明のスライダを搭載した磁気ディスク装置
を示す図である。FIG. 6 is a diagram showing a magnetic disk drive on which the slider of the present invention is mounted.
【図７】本発明のスライダを搭載した他の磁気ディスク
装置を示す図である。FIG. 7 is a view showing another magnetic disk drive on which the slider of the present invention is mounted.
１１ トランスデューサ １２ スライダ １３ 気体軸受面 １４ 傾斜面 １５ サイドレール（正圧発生面） １８ クロスレール １９ 負圧ポケット部（凹部） ２０ センターレール（中央正圧発生面） ２１ くびれ部 ２２ サイドレール後端 ２４ 後部軸受面 ２５ 窪み（第２の凹部） ２６ センターレール広がり部 ４１ 記録媒体 ４２ トランスデューサ支持装置 ４３ ガイドアーム ４４ キャリッジ ４５ ボイスコイルモータ DESCRIPTION OF SYMBOLS 11 Transducer 12 Slider 13 Gas bearing surface 14 Inclined surface 15 Side rail (positive pressure generating surface) 18 Cross rail 19 Negative pressure pocket (recess) 20 Center rail (central positive pressure generating surface) 21 Constriction 22 Rear end of side rail 24 Rear bearing surface 25 Depression (second depression) 26 Center rail widening part 41 Recording medium 42 Transducer support device 43 Guide arm 44 Carriage 45 Voice coil motor
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小平 英一 茨城県土浦市神立町502番地 株式会社 日立製作所 機械研究所内 (72)発明者 上利 宏司 神奈川県小田原市国府津2880番地 株式 会社 日立製作所 ストレージシステム 事業部内 (72)発明者 松本 真明 東京都国分寺市東恋ヶ窪一丁目280番地 株式会社 日立製作所 中央研究所内 (56)参考文献 特開 昭60−101781（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G11B 21/21 101 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Eiichi Kodaira 502 Kandachi-cho, Tsuchiura-shi, Ibaraki Pref. Machinery Research Laboratory, Hitachi, Ltd. (72) Inventor Masaaki Matsumoto 1-280 Higashi Koigakubo, Kokubunji-shi, Tokyo Central Research Laboratory, Hitachi, Ltd. (56) References JP-A-60-101781 (JP, A) (58) Fields investigated ( Int.Cl. 7 , DB name) G11B 21/21 101
Claims (14)
流出入方向と交叉する幅方向のそれぞれの側に設けた一
対の正圧発生面と、前記幅方向の中央に流出端まで延設
されかつ流出端面にトランスデューサを搭載した中央正
圧発生面と、それぞれの正圧発生面と前記中央正圧発生
面とに流入側で同一浮上面を形成して接続するクロスレ
ールとよりなる気体軸受面を有し、かつ該クロスレール
とそれぞれの正圧発生面と前記中央正圧発生面のそれぞ
れに囲まれた逆ステップ状の凹部を有する負圧利用浮動
スライダにおいて、それぞれの正圧発生面の浮上面は、
前記流出入方向のほぼ中央に設けた一つのくびれ部によ
り流入側より流出側に向けて前記浮上面幅を狭めたのち
該浮上面幅が広がり、かつ前記流出端より離間する位置
に至る形状を有し、前記中央正圧発生面は、前記ほぼ中
央より流出側に向けて前記浮上面幅が広がる形状を有
し、前記クロスレールは、流入端より前記凹部に至る全
幅を正圧発生面に形成されていることを特徴とする負圧
利用浮動ヘッドスライダ。1. A rotating storage medium is disposed opposite to a rotating storage medium,
A pair of positive pressure generating surfaces provided on each side in the width direction crossing the inflow / outflow direction, and a central positive pressure generation surface extending to the outflow end at the center in the width direction and having a transducer mounted on the outflow end surface, A gas bearing surface comprising a cross rail which forms and connects the same floating surface on the inflow side to each of the positive pressure generating surface and the central positive pressure generating surface, and the cross rail and the respective positive pressure generating surface And the negative pressure utilizing floating slider having an inverted step-shaped recess surrounded by each of the central positive pressure generating surfaces, the floating surface of each positive pressure generating surface is:
The width of the air bearing surface is reduced from the inflow side toward the outflow side by one constricted portion provided substantially at the center in the outflow / inflow direction, and then the width of the air bearing surface is widened, and the shape reaching the position separated from the outflow end is formed. The central positive pressure generating surface has a shape in which the floating surface width increases from the substantially center toward the outflow side, and the cross rail has a full width from the inflow end to the concave portion as the positive pressure generating surface. A negative pressure utilizing floating head slider characterized by being formed.
流出入方向と交叉する幅方向のそれぞれの側に設けた一
対の正圧発生面と、前記幅方向の中央に流出端まで延設
されかつ流出端面にトランスデューサを搭載した中央正
圧発生面と、それぞれの正圧発生面と前記中央正圧発生
面とに流入側で同一浮上面を形成して接続するクロスレ
ールとよりなる気体軸受面を有し、かつ該クロスレール
とそれぞれの正圧発生面と前記中央正圧発生面のそれぞ
れに囲まれた逆ステップ状の凹部を有する負圧利用浮動
スライダにおいて、それぞれの正圧発生面の浮上面は、
前記流出入方向のほぼ中央に設けた一つのくびれ部によ
り流入側より流出側に向けて前記浮上面幅を狭めたのち
該浮上面幅が広がり、かつ流出端より離間する位置に至
る形状を有し、前記中央正圧発生面は、前記ほぼ中央よ
り流出側に向けて前記浮上面幅が広がる形状を有し、前
記クロスレールに、流入端部のそれぞれの側に前記凹部
とほぼ同じ深さの第２の凹部を設けるとともに、それぞ
れの第２の凹部より前記凹部に至る範囲を正圧発生面で
形成したことを特徴とする負圧利用浮動ヘッドスライ
ダ。2. A method according to claim 1, further comprising:
A pair of positive pressure generating surfaces provided on each side in the width direction crossing the inflow / outflow direction, and a central positive pressure generation surface extending to the outflow end at the center in the width direction and having a transducer mounted on the outflow end surface, A gas bearing surface comprising a cross rail which forms and connects the same floating surface on the inflow side to each of the positive pressure generating surface and the central positive pressure generating surface, and the cross rail and the respective positive pressure generating surface And the negative pressure utilizing floating slider having an inverted step-shaped recess surrounded by each of the central positive pressure generating surfaces, the floating surface of each positive pressure generating surface is:
The width of the air bearing surface is reduced from the inflow side to the outflow side by one constricted portion provided substantially at the center in the outflow / inflow direction, and then the width of the air bearing surface is widened and reaches a position separated from the outflow end. The central positive pressure generating surface has a shape in which the air bearing surface width increases from the substantially center toward the outflow side, and the cross rail has substantially the same depth as the recess on each side of the inflow end. The floating head slider utilizing negative pressure, wherein the second concave portion is provided, and a range from each second concave portion to the concave portion is formed by a positive pressure generating surface.
けてあることを特徴とする請求項２記載の負圧利用浮動
ヘッドスライダ。3. The floating head slider according to claim 2, wherein the cross rail has an inclined surface at an inflow end.
向に凸曲率を有する曲面で形成されていることを特徴と
する請求項１〜３のいずれか１項記載の負圧利用浮動ヘ
ッドスライダ。4. The negative pressure utilizing floating head according to claim 1, wherein the gas bearing surface is formed as a curved surface having a convex curvature in the outflow direction on the storage medium side. Slider.
利用浮動ヘッドスライダに、磁気抵抗素子を搭載したこ
とを特徴とする磁気ヘッドスライダ。5. A magnetic head slider, wherein a magnetic resistance element is mounted on the negative pressure utilizing floating head slider according to claim 1.
利用浮動ヘッドスライダを装着したことを特徴とする回
転円板記憶装置。6. A rotating disk storage device equipped with the negative pressure utilizing floating head slider according to claim 1.
利用浮動ヘッドスライダを装着し、記憶媒体は半径方向
に記録エリアを分割し、それぞれの記録エリアの記録密
度がほぼ等しく記録再生されていることを特徴とする回
転円板記憶装置。7. The negative pressure utilizing floating head slider according to claim 1, wherein a recording area is divided in a radial direction of the storage medium, and recording density of each recording area is substantially equal. A rotating disk storage device being reproduced.
流出入方向と交叉する幅方向のそれぞれの側に設けた一
対の正圧発生面と、前記幅方向の中央の流出端面にトラ
ンスデューサを搭載した中央正圧発生面と、それぞれの
正圧発生面と流入側で同一浮上面を形成して接続するク
ロスレールとよりなる気体軸受面を有し、かつ該クロス
レールとそれぞれの正圧発生面とに囲まれた逆ステップ
状の凹部を有する負圧利用浮動スライダにおいて、それ
ぞれの正圧発生面の浮上面は、前記流出入方向の略中央
に設けた一つのくびれ部により流入側より流出側に向け
て前記浮上面幅を狭めたのち該浮上面幅が広がり、かつ
前記流出幅より離間する位置に至る形状を有し、前記中
央正圧発生面は流出側に向けて前記浮上面幅が広がる形
状を有し、前記クロスレールは、流入端より前記凹部に
至る全幅を正圧発生面に形成されていることを特徴とす
る負圧利用浮動ヘッドスライダ。 8. A storage medium, which is arranged to face a rotating storage medium,
One set on each side in the width direction crossing the inflow / outflow direction
The pair of positive pressure generating surfaces and the outflow end surface at the center in the width direction
The central positive pressure generating surface equipped with a transducer
Form the same air bearing surface on the positive pressure generation surface and the inflow side to connect
A gas bearing surface comprising a loss rail and the cross
Reverse step surrounded by rail and each positive pressure generating surface
In a negative pressure utilizing floating slider having a concave portion,
The air bearing surface of each positive pressure generating surface is substantially at the center in the outflow / inflow direction.
From the inflow side to the outflow side by one constriction
After reducing the air bearing surface width, the air bearing surface width increases, and
Having a shape reaching a position separated from the outflow width;
The central positive pressure generating surface has a shape in which the floating surface width increases toward the outflow side.
The cross rail has a shape from the inflow end to the concave portion.
The entire width is formed on the positive pressure generating surface.
Negative pressure floating head slider.
流出入方向と交叉する幅方向のそれぞれの側に設けた一
対の正圧発生面と、前記幅方向の中央の流出端面にトラ
ンスデューサを搭載した中央正圧発生面と、それぞれの
正圧発生面と流入側で同一浮上面を形成して接続するク
ロスレールとよりなる気体軸受面を有し、かつ該クロス
レールとそれぞれの正圧発生面とに囲まれた逆ステップ
状の凹部を有する負圧利用浮動スライダにおいて、それ
ぞれの正圧発生面の浮上面は、 前記流出入方向の略中央
に設けた一つのくびれ部により流入側より流出側に向け
て前記浮上面幅を狭めたのち該浮上面幅が広がり、かつ
前記流出幅より離間する位置に至る形状を有し、前記中
央正圧発生面は流出側に向けて前記浮上面幅が広がる形
状を有し、前記クロスレールに、流入端部のそれぞれの
側に前記凹部とほぼ同じ深さの第２の凹部を設けるとと
もに、それぞれの第２の凹部より前記凹部に至る範囲を
正圧発生面で形成したことを特徴とする負圧利用浮動ヘ
ッドスライダ。 9. A method according to claim 1, wherein said storage medium is arranged to face a rotating storage medium,
One set on each side in the width direction crossing the inflow / outflow direction
The pair of positive pressure generating surfaces and the outflow end surface at the center in the width direction
The central positive pressure generating surface equipped with a transducer
Form the same air bearing surface on the positive pressure generation surface and the inflow side to connect
A gas bearing surface comprising a loss rail and the cross
Reverse step surrounded by rail and each positive pressure generating surface
In a negative pressure utilizing floating slider having a concave portion,
The air bearing surface of each positive pressure generating surface is substantially at the center in the outflow / inflow direction.
From the inflow side to the outflow side by one constriction
After reducing the air bearing surface width, the air bearing surface width increases, and
Having a shape reaching a position separated from the outflow width;
The central positive pressure generating surface has a shape in which the floating surface width increases toward the outflow side.
And the cross rail has an inflow end
When a second concave portion having substantially the same depth as the concave portion is provided on the side,
In addition, the range from each second concave portion to the concave portion is defined as
A floating device utilizing negative pressure, which is formed on the positive pressure generating surface.
Slider.
設けてあることを特徴とする請求項９記載の負圧利用浮
動ヘッドスライダ。 10. The cross rail has an inclined surface at an inflow end.
The negative pressure utilizing float according to claim 9, wherein the float is provided.
Moving head slider.
方向に凸曲率を有する曲面で形成されていることを特徴
とする請求項８〜１０のいずれか１項記載の負圧利用浮
動ヘッドスライダ。 11. The gas bearing surface is on the storage medium side and flows out.
Characterized by being formed by a curved surface having a convex curvature in the direction
The negative pressure utilizing float according to any one of claims 8 to 10.
Moving head slider.
負圧利用浮動ヘッドスライダに、磁気抵抗素子を搭載し
たことを特徴とする磁気ヘッドスライダ。 12. The method according to any one of claims 8 to 11, wherein
Equipped with a magnetoresistive element on the negative pressure floating head slider
A magnetic head slider.
負圧利用浮動ヘッドスライダを装着したことを特徴とす
る回転円板記憶装置。 13. The method according to claim 8, wherein
A floating head slider using negative pressure is mounted.
Rotating disk storage device.
負圧利用浮動ヘッドスライダを装着し、記憶媒体は半径
方向に記録エリアを分割し、それぞれの記録エリアの記
録密度がほぼ等しく記録再生されていることを特徴とす
る回転円板記憶装置。 14. The method according to any one of claims 8 to 12, wherein
Attach a floating head slider using negative pressure, and the storage medium has a radius
Divide the recording area in the direction
It is characterized in that recording and reproduction are performed at almost the same recording density.
Rotating disk storage device.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11696493A JP3243698B2 (en) | 1993-05-19 | 1993-05-19 | Negative pressure floating head slider and rotating disk storage device |
| US08/135,442 US5430591A (en) | 1992-10-13 | 1993-10-13 | Negative pressure flying head slider having siderails with narrow width portion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11696493A JP3243698B2 (en) | 1993-05-19 | 1993-05-19 | Negative pressure floating head slider and rotating disk storage device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06333354A JPH06333354A (en) | 1994-12-02 |
| JP3243698B2 true JP3243698B2 (en) | 2002-01-07 |
Family
ID=14700110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11696493A Expired - Fee Related JP3243698B2 (en) | 1992-10-13 | 1993-05-19 | Negative pressure floating head slider and rotating disk storage device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3243698B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9360761B2 (en) | 2009-08-25 | 2016-06-07 | Ltc Co., Ltd. | Photoresist stripping composition for manufacturing LCD |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08249639A (en) * | 1995-03-07 | 1996-09-27 | Sony Corp | Flying type head slider and disk drive equipment |
| JP2778588B2 (en) * | 1996-07-30 | 1998-07-23 | 日本電気株式会社 | Floating head slider |
| JP2000057724A (en) | 1998-08-04 | 2000-02-25 | Hitachi Ltd | Magnetic head slider and magnetic disk device using the same |
| KR20010076531A (en) * | 2000-01-26 | 2001-08-16 | 최동훈 | Construction of air bearing of head slider for hard disk drive |
| KR20010091073A (en) * | 2000-03-13 | 2001-10-23 | 최동훈 | Construction of air bearing of head slider for stabilized floating |
| KR100382757B1 (en) * | 2000-06-22 | 2003-05-01 | 삼성전자주식회사 | Negative pressure air-lubricated bearing slider |
| JP2002083477A (en) * | 2000-07-04 | 2002-03-22 | Sony Corp | Floating head slider and recording/reproducing apparatus using the same |
| US6989966B2 (en) * | 2002-02-15 | 2006-01-24 | Seagate Technology Llc | Slider having plural leading step-level slots |
| JP4489021B2 (en) * | 2003-07-23 | 2010-06-23 | パナソニック株式会社 | Slider and disk device using the same |
-
1993
- 1993-05-19 JP JP11696493A patent/JP3243698B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9360761B2 (en) | 2009-08-25 | 2016-06-07 | Ltc Co., Ltd. | Photoresist stripping composition for manufacturing LCD |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06333354A (en) | 1994-12-02 |
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