JP2768031B2 - Magnetic head slider - Google Patents

Magnetic head slider

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Publication number
JP2768031B2
JP2768031B2 JP5640891A JP5640891A JP2768031B2 JP 2768031 B2 JP2768031 B2 JP 2768031B2 JP 5640891 A JP5640891 A JP 5640891A JP 5640891 A JP5640891 A JP 5640891A JP 2768031 B2 JP2768031 B2 JP 2768031B2
Authority
JP
Japan
Prior art keywords
magnetic head
slider
head slider
magnetic
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5640891A
Other languages
Japanese (ja)
Other versions
JPH04313871A (en
Inventor
信介 由良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5640891A priority Critical patent/JP2768031B2/en
Publication of JPH04313871A publication Critical patent/JPH04313871A/en
Application granted granted Critical
Publication of JP2768031B2 publication Critical patent/JP2768031B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Magnetic Record Carriers (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は磁気ディスク装置に搭
載される磁気ヘッドスライダに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider mounted on a magnetic disk drive.

【0002】[0002]

【従来の技術】磁気ディスク装置は小型化、大容量化の
傾向にあり、磁気記録媒体への情報記録密度はますます
高くなりつつある。これに伴い、浮動ヘッドが磁気記録
媒体から浮上する浮上量は小さくなる傾向にある。又、
逆に情報記録密度を上げるためには浮上量は小さくしな
ければならない。さらに、浮上量を小さくするためには
記録媒体の表面粗さを小さくしなければならない。なぜ
なら磁気ヘッドスライダが記録媒体と接触してしまうか
らである。
2. Description of the Related Art Magnetic disk drives tend to be smaller and have larger capacities, and the density of information recorded on magnetic recording media is increasing. Accordingly, the flying height at which the floating head flies above the magnetic recording medium tends to decrease. or,
Conversely, the flying height must be reduced to increase the information recording density. Further, in order to reduce the flying height, the surface roughness of the recording medium must be reduced. This is because the magnetic head slider comes into contact with the recording medium.

【0003】さて一方、表面粗さをあまり小さくすると
別の問題が起こる。磁気ディスク装置ではCSS方式が
採用されている。CSS方式では図9の三面図に示す従
来の磁気ヘッドスライダは、磁気ディスクの回転が停止
した状態ではヘッドスライダとディスクは接触し、ヘッ
ドスライダはディスクの回転に伴い生じる空気流の作用
で浮上する。また、回転が停止するとヘッドスライダは
磁気ディスクと接触する。なお、図9において、4は磁
気ヘッド、5はばね荷重作用点、11はテーパ部、20
は磁気ディスクとの接触面である。
On the other hand, if the surface roughness is made too small, another problem arises. The CSS method is adopted in the magnetic disk drive. In the CSS method, in the conventional magnetic head slider shown in the three views of FIG. 9, the head slider and the disk come into contact with each other when the rotation of the magnetic disk is stopped, and the head slider flies by the action of the air flow generated by the rotation of the disk. . When the rotation stops, the head slider comes into contact with the magnetic disk. In FIG. 9, 4 is a magnetic head, 5 is a point of application of a spring load, 11 is a tapered portion, 20
Is a contact surface with the magnetic disk.

【0004】[0004]

【発明が解決しようとする課題】磁気ヘッドスライダの
磁気ディスクとの接触面20は、磁気ディスクと摺動す
るため精度良くRmax <50Å以下の平面に仕上げられ
ている。このため、磁気ディスクの表面粗さが小さくな
ると磁気ヘッドスライダの接触面と磁気ディスク表面の
接触面積が大きくなりスライダとディスクの間で吸着を
起こす。
The contact surface 20 of the magnetic head slider with the magnetic disk is finished with a flat surface of R max <50 ° or less with high precision to slide with the magnetic disk. For this reason, when the surface roughness of the magnetic disk is reduced, the contact area between the contact surface of the magnetic head slider and the surface of the magnetic disk is increased, and suction occurs between the slider and the disk.

【0005】現在、磁気ディスクの表面粗さは0.2μ
mの浮上量を確保するためにRmax<1000Å程度に
加工されているが、浮上量が0.1μmをきると表面粗
さは500Å以下にする必要があり、ディスクの表面粗
さが200Å以下では特に吸着が起きやすくなる。
At present, the surface roughness of a magnetic disk is 0.2 μm.
In order to secure the flying height of m, the surface roughness is processed to about R max <1000 °. However, when the flying height is less than 0.1 μm, the surface roughness needs to be 500 ° or less. In particular, adsorption tends to occur.

【0006】スライダとディスクの間で吸着が起こる
と、ディスクの回転起動ができなくなったり、無理に回
転するためにスライダの支持ばねが破損したりする。こ
れを解決するため、例えばスライダの媒体との接触面2
0を粗くすることが考えられるが、接触面20は磁気ヘ
ッド4のギャップが存在する面でもあり、これを粗すこ
とは磁気ヘッドのギャップを接触面より後退させる危険
を伴う。
[0006] When suction occurs between the slider and the disk, the disk cannot be started to rotate, or the support spring of the slider is damaged due to forced rotation. In order to solve this, for example, the contact surface 2 of the slider with the medium
Although it is conceivable to roughen 0, the contact surface 20 is also the surface where the gap of the magnetic head 4 exists, and roughening this involves the danger that the gap of the magnetic head 4 will recede from the contact surface.

【0007】この発明は上記のような問題点を解消する
ためになされたもので、表面粗さの小さい磁気記録媒体
に対しても接触状態で吸着せず、高密度で情報を記録で
きる磁気ヘッドスライダを得ることを目的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and a magnetic head capable of recording information at a high density without being attracted to a magnetic recording medium having a small surface roughness in a contact state. The aim is to obtain a slider.

【0008】[0008]

【課題を解決するための手段】この発明の磁気ヘッドス
ライダは、磁気記録媒体と対向する浮上面に段差を設
け、記録再生時に上記磁気記録媒体の走行に伴い発生す
る空気流流入端側浮上面が空気流流出端側浮上面より高
くなるように形成するとともに、非記録再生時に弾性体
により上記空気流流入端部が浮き上がるように上記磁気
記録媒体に押圧、支持するようにしたものである。
In the magnetic head slider according to the present invention, a step is provided on a floating surface facing a magnetic recording medium, and an air flow inflow end side floating surface generated during traveling of the magnetic recording medium during recording and reproduction. Are formed so as to be higher than the airflow outflow end side floating surface, and are pressed against and supported by the magnetic recording medium so that the airflow inflow end is lifted by an elastic body during non-recording / reproduction.

【0009】[0009]

【作用】この発明の磁気ヘッドスライダは、磁気記録媒
体に押圧された際、段差の角部と空気流流出端角部で媒
体と線接触する。媒体とスライダの接触面積は媒体の表
面粗さを小さくしても、線接触であるため極めて小さ
く、媒体とスライダの間の吸着を防止できる。従って、
スライダの浮上量を小さくでき、情報記録密度を上げる
ことができる。
When the magnetic head slider of the present invention is pressed against a magnetic recording medium, it comes into line contact with the medium at the corner of the step and the corner of the airflow outflow end. The contact area between the medium and the slider is extremely small because of linear contact even if the surface roughness of the medium is reduced, so that the adsorption between the medium and the slider can be prevented. Therefore,
The flying height of the slider can be reduced, and the information recording density can be increased.

【0010】[0010]

【実施例】実施例1 図1はこの発明の一実施例の磁気ヘッドスライダの形状
を示す三面図である。図において、1,2は浮上力を発
生する浮上面であり、段差を設けて流入側浮上面1は流
出側浮上面2よりもDだけ高く、また流入側浮上面1の
幅Bは流出側浮上面2の幅Cよりも広く形成している。
3は浮上力を発生しない浮上力非発生面で、流出側浮上
面2より10μm以上低くなっている。4は薄膜磁気ヘ
ッド、5はこのスライダに弾性体のばねより荷重が加わ
る点、ばね荷重作用点で、段差より流出側にある。ま
た、6は媒体との接触部で、段差の角に当たる第1媒体
接触部、7は同、浮上面2の流出端角に当たる第2媒体
接触部である。そして、この場合流入側浮上面1と流出
側浮上面2の段差Dは500Åで、流入側浮上面1の長
さAは1mm、空気流流入端とばね荷重作用点との距離
Eは2mmで、A<Eとなっている。
FIG. 1 is a three-view drawing showing the shape of a magnetic head slider according to an embodiment of the present invention. In the drawing, reference numerals 1 and 2 denote floating surfaces that generate a levitation force, and a step is provided so that an inflow-side floating surface 1 is higher than an outflow-side floating surface 2 by D, and a width B of the inflow-side floating surface 1 is set to an outflow side. The air bearing surface 2 is formed wider than the width C.
Reference numeral 3 denotes a levitation-free surface that does not generate a levitation force, and is lower than the outflow-side floating surface 2 by 10 μm or more. Reference numeral 4 denotes a thin film magnetic head, and 5 denotes a point where a load is applied to the slider from an elastic spring, and a spring load application point, which is located on the outflow side from the step. Reference numeral 6 denotes a contact portion with the medium, which is a first medium contact portion corresponding to the corner of the step, and reference numeral 7 is a second medium contact portion corresponding to the outflow end angle of the air bearing surface 2. In this case, the step D between the inflow-side floating surface 1 and the outflow-side floating surface 2 is 500 °, the length A of the inflow-side floating surface 1 is 1 mm, and the distance E between the airflow inflow end and the spring load application point is 2 mm. , A <E.

【0011】このため、静止状態の磁気記録媒体、この
実施例では磁気ディスク8にばね荷重で押し付けた時、
図2の模式側面図に示すように、磁気ディスク8に第
1、第2媒体接触部6、7の辺で線接触する。而して、
磁気ディスク8との接触面積を極めて小さくでき、ディ
スクの表面粗さを小さくしてもディスク8との吸着は起
こらない。従ってスライダの浮上量を小さくでき、情報
記録密度を上げることができる。
For this reason, when a magnetic recording medium in a stationary state, in this embodiment, is pressed against a magnetic disk 8 by a spring load,
As shown in the schematic side view of FIG. 2, the magnetic disk 8 makes line contact with the sides of the first and second medium contact portions 6 and 7. Thus,
The contact area with the magnetic disk 8 can be made extremely small, and even if the surface roughness of the disk is reduced, adsorption to the disk 8 does not occur. Therefore, the flying height of the slider can be reduced, and the information recording density can be increased.

【0012】また、ディスク8が走行し始める際には、
図2に示すスライダ/ディスク間に形成されるくさび形
状のために空気流が容易にこの空間に流入し浮上力を発
生する。
When the disk 8 starts running,
Due to the wedge shape formed between the slider and the disk shown in FIG. 2, the air flow easily flows into this space to generate a levitation force.

【0013】さらに定常浮上時はB>Cとなる様に浮上
面1、2を形成しているので、流入側浮上面1で発生す
る浮上力は流出側浮上面2で発生する浮上力よりも大き
くなり、スライダは図3(b)の模式説明図に示すよう
に空気流流入部が流出部より高くなるような姿勢で浮上
する。従って、磁気ヘッド4の搭載された流出端部は浮
上面上で常に最小浮上量となるため浮上量は小さくする
ことが可能である。
Further, since the floating surfaces 1 and 2 are formed so that B> C at the time of steady floating, the floating force generated at the inflow-side floating surface 1 is larger than the floating force generated at the outflow-side floating surface 2. As shown in the schematic explanatory view of FIG. 3B, the slider floats in such a position that the air flow inflow portion is higher than the outflow portion. Therefore, the outflow end on which the magnetic head 4 is mounted always has the minimum flying height on the flying surface, so that the flying height can be reduced.

【0014】また、このスライダは図3(a)の浮上面
圧力分布を表わす特性図に示すように圧力発生領域が走
行方向で二つに分離される。一般に、浮上面形状は走行
方向が幅方向に比較して小さい程、媒体の走行方向がス
ライダ長手方向とのなす角(ヨー角)がついた時の浮上
量の低下が少ないことが知られている。(電子通信学会
全国大会予稿集 1985年 P174参照) 従っ
て、ロータリーアクチェータタイプの磁気ディスク装置
ではディスク面上で浮上量の分布を少なくする効果もあ
る。
Further, in this slider, as shown in the characteristic diagram showing the air bearing surface pressure distribution in FIG. Generally, it is known that the smaller the flying surface shape in the running direction is smaller than the width direction, the less the flying height decreases when the running direction of the medium forms an angle (yaw angle) with the longitudinal direction of the slider. I have. (Refer to Proceedings of the IEICE National Convention, 1985, p. 174.) Accordingly, the rotary actuator type magnetic disk device also has the effect of reducing the distribution of flying height on the disk surface.

【0015】さらにまた、このスライダは写真製版とイ
オンビームエッチングによる加工でMn−Znフェライ
ト、Al23−TiCなどのセラミックス材料で作るこ
とができる。従来タイプのテーパ部を持つスライダでは
テーパ部分は研磨などの機械加工により作らねばならな
かったが、このスライダは全て写真製版とエッチング加
工で作れるため一括生産が可能で、製造コストを低減で
きる効果もある。
[0015] Moreover, the slider may be made of processing by photolithography and ion beam etching Mn-Zn ferrite, a ceramic material such as Al 2 O 3 -TiC. In conventional sliders with tapered parts, the tapered parts had to be made by mechanical processing such as polishing, but all of these sliders can be made by photoengraving and etching, so they can be batch-manufactured and also have the effect of reducing manufacturing costs. is there.

【0016】実施例2 また、この発明の磁気ヘッドスライダは吸着力を発生す
るいわゆる「負圧型スライダ」ではないが、図4(a)
の平面図、(b)の流出端側面図、(c)の(a)図に
おけるC−C’線断面図に示す他の実施例のように左右
の浮上面1、2の間に負圧発生部分を設け、負圧型スラ
イダとしてもよい。負圧型スライダにすれば低速度で浮
上し、浮上量が速度によらないスライダを設計できる。
このようにすることにより、定常浮上時の浮上量は低く
とも、低速度で浮き上がり、CSSでの媒体との摺動距
離の小さなスライダを実現できる。なお、図4におい
て、8、10は10μm以下のエッチング面で、8は負
圧発生面である。また、9は負圧を発生させるためのク
ロスレールである。
Embodiment 2 Although the magnetic head slider of the present invention is not a so-called "negative pressure type slider" which generates an attraction force, FIG.
, The outflow end side view of (b), and the negative pressure between the left and right air bearing surfaces 1 and 2 as in another embodiment shown in the cross-sectional view taken along the line CC ′ in (a) of (c) of FIG. A generating portion may be provided to form a negative pressure type slider. If a negative pressure type slider is used, it is possible to design a slider which flies at a low speed and whose flying height does not depend on the speed.
By doing so, it is possible to realize a slider that floats at a low speed and has a small sliding distance with the medium in CSS even if the flying height during steady flying is low. In FIG. 4, reference numerals 8 and 10 denote etched surfaces of 10 μm or less, and 8 denotes a negative pressure generating surface. Reference numeral 9 denotes a cross rail for generating a negative pressure.

【0017】実施例3 また、図5の三面図に示すさらに他の実施例のように、
流入側浮上面1と流出側浮上面2の間に浮上力を発生し
ない溝12を設けてもよい。図1に示す実施例1のスラ
イダでは流出側浮上面2の空気流入側は逆ステップとな
り、この部分で負圧が発生する可能性がある。この負圧
力のために流出側浮上面2の部分に摩耗粉が蓄積し、こ
れが流入側浮上面1と流出側浮上面2の間の比較的浅い
段差を埋めてしまうことが考えられる。このような場
合、摩耗粉がディスクに接触することにより浮上姿勢を
変えたりする虞がある。ところが、この実施例のスライ
ダでは溝12により流出側浮上面2の空気流入側は大気
圧となるので、負圧の発生を防ぐことができ、摩耗粉の
蓄積を防止できる。従って摩耗粉に起因する問題を回避
できる。
Embodiment 3 Further, as in still another embodiment shown in the three views of FIG.
A groove 12 that does not generate a floating force may be provided between the inflow side floating surface 1 and the outflow side floating surface 2. In the slider according to the first embodiment shown in FIG. 1, the air inflow side of the outflow side floating surface 2 has a reverse step, and a negative pressure may be generated in this portion. It is conceivable that due to this negative pressure, abrasion powder accumulates on the outflow-side floating surface 2 and fills a relatively shallow step between the inflow-side floating surface 1 and the outflow-side floating surface 2. In such a case, there is a possibility that the flying powder may change its flying attitude due to contact with the disc. However, in the slider of this embodiment, since the air inflow side of the outflow side floating surface 2 is at atmospheric pressure by the groove 12, the generation of negative pressure can be prevented, and the accumulation of abrasion powder can be prevented. Therefore, problems caused by wear powder can be avoided.

【0018】また、同様な効果は図6の三面図に示すス
ライダのように、流出側浮上面2の空気流入側の幅を狭
くすることによっても実現できる。
A similar effect can also be realized by reducing the width of the outflow side floating surface 2 on the air inflow side as in the slider shown in the three views of FIG.

【0019】なお、上記実施例では段差が一つの場合に
ついて説明したが、図7(a)の平面図、(b)の側面
図及び図8(a)の平面図、(b)の側面図に示すよう
に、複数個の段差を設けてもよい。この場合、段差の高
低差が最も大きい段差の間にばね荷重作用点5を置くこ
とにより、媒体に接触した時、空気流流入端が浮き上が
り、その安定性を上げることができる。13は媒体が位
置する仮想媒体面である。
Although the above embodiment has been described with reference to a single step, the plan view of FIG. 7A, the side view of FIG. 7B, the plan view of FIG. 8A, and the side view of FIG. As shown in (2), a plurality of steps may be provided. In this case, by placing the spring load application point 5 between the steps having the largest level difference, the air flow inflow end rises when the medium comes into contact with the medium, and the stability can be improved. Reference numeral 13 denotes a virtual medium surface on which the medium is located.

【0020】[0020]

【発明の効果】以上のように、この発明によれば、磁気
記録媒体と対向する浮上面に段差を設け、記録再生時に
上記磁気記録媒体の走行に伴い発生する空気流流入端側
浮上面が空気流流出端側浮上面より高くなるように形成
するとともに、非記録再生時に弾性体により上記空気流
流入端部が浮き上がるように上記磁気記録媒体に押圧、
支持するようにしたので、表面粗さの小さい磁気記録媒
体に対しても接触状態で吸着せず、高密度で情報を記録
できるとともに、簡便に一括生産可能な磁気ヘッドスラ
イダが得られる効果がある。
As described above, according to the present invention, a step is provided on the air bearing surface facing the magnetic recording medium, and the air flow inflow end side floating surface generated during travel of the magnetic recording medium at the time of recording and reproduction is reduced. Pressed against the magnetic recording medium so that the airflow inflow end is lifted by an elastic body during non-recording / reproduction, while being formed so as to be higher than the airflow outflow end side floating surface,
Since the magnetic head slider is supported, it does not adhere to a magnetic recording medium having a small surface roughness in a contact state, can record information at a high density, and has an effect of obtaining a magnetic head slider that can be easily manufactured in a batch. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の実施例1の磁気ヘッドスライダの形
状を示す三面図である。
FIG. 1 is a three-view drawing showing the shape of a magnetic head slider according to Embodiment 1 of the present invention.

【図2】この発明の実施例1の磁気ヘッドスライダの媒
体静止時における媒体との位置関係を示す模式側面図で
ある。
FIG. 2 is a schematic side view showing a positional relationship between the magnetic head slider and the medium when the medium is stationary according to the first embodiment of the present invention.

【図3】この発明の実施例1の磁気ヘッドスライダの浮
上時の姿勢と発生圧力分布を示す図である。
FIG. 3 is a diagram showing the attitude and generated pressure distribution of the magnetic head slider according to the first embodiment of the present invention during flying.

【図4】この発明の実施例2の磁気ヘッドスライダの形
状を示す図である。
FIG. 4 is a diagram showing a shape of a magnetic head slider according to a second embodiment of the present invention.

【図5】この発明の実施例3の磁気ヘッドスライダの形
状を示す三面図である。
FIG. 5 is a three-view drawing showing the shape of a magnetic head slider according to Embodiment 3 of the present invention.

【図6】この発明の他の実施例の磁気ヘッドスライダの
形状を示す三面図である。
FIG. 6 is a three-view drawing showing the shape of a magnetic head slider according to another embodiment of the present invention.

【図7】この発明のさらに他の実施例の磁気ヘッドスラ
イダの形状を示す図である。
FIG. 7 is a view showing a shape of a magnetic head slider according to still another embodiment of the present invention.

【図8】この発明のさらに他の実施例の磁気ヘッドスラ
イダの形状を示す図である。
FIG. 8 is a view showing a shape of a magnetic head slider according to still another embodiment of the present invention.

【図9】従来の磁気ヘッドスライダの形状を示す三面図
である。
FIG. 9 is a three-view drawing showing the shape of a conventional magnetic head slider.

【符号の説明】[Explanation of symbols]

1 流入側浮上面 2 流出側浮上面 4 薄膜磁気ヘッド 5 ばね荷重作用点 6 第1の媒体接触部 7 第2の媒体接触部 DESCRIPTION OF SYMBOLS 1 Inflow side floating surface 2 Outflow side floating surface 4 Thin film magnetic head 5 Spring load application point 6 First medium contact portion 7 Second medium contact portion

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 磁気記録媒体との間で記録再生を行う磁
気ヘッドを有し、弾性体により支持され、記録再生時に
押圧される上記磁気記録媒体からその媒体の走行に伴い
発生する空気流により浮上する磁気ヘッドスライダにお
いて、上記磁気記録媒体と対向する浮上面に段差を設
け、上記空気流流入端側浮上面が空気流流出端側浮上面
より高くなるように形成するとともに、非記録再生時に
上記空気流流入端部が浮き上がるように上記弾性体で上
記磁気記録媒体に押圧するようにしたことを特徴とする
磁気ヘッドスライダ。
1. A magnetic head for performing recording and reproduction with a magnetic recording medium, which is supported by an elastic body, and is provided with an airflow generated from the magnetic recording medium which is pressed at the time of recording and reproduction as the medium travels. In the magnetic head slider that flies, a step is provided on the air bearing surface facing the magnetic recording medium so that the air flow inflow end side air bearing surface is formed higher than the air flow outflow end side air bearing surface. A magnetic head slider characterized in that the elastic body is pressed against the magnetic recording medium by the elastic body so that the air flow inflow end is raised.
JP5640891A 1991-03-20 1991-03-20 Magnetic head slider Expired - Lifetime JP2768031B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5640891A JP2768031B2 (en) 1991-03-20 1991-03-20 Magnetic head slider

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5640891A JP2768031B2 (en) 1991-03-20 1991-03-20 Magnetic head slider

Publications (2)

Publication Number Publication Date
JPH04313871A JPH04313871A (en) 1992-11-05
JP2768031B2 true JP2768031B2 (en) 1998-06-25

Family

ID=13026336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5640891A Expired - Lifetime JP2768031B2 (en) 1991-03-20 1991-03-20 Magnetic head slider

Country Status (1)

Country Link
JP (1) JP2768031B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0721717A (en) * 1993-06-24 1995-01-24 Internatl Business Mach Corp <Ibm> Air-bearing-slider having no speed and skew dependency

Also Published As

Publication number Publication date
JPH04313871A (en) 1992-11-05

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