JPH0435832B2 - - Google Patents

Info

Publication number
JPH0435832B2
JPH0435832B2 JP6167683A JP6167683A JPH0435832B2 JP H0435832 B2 JPH0435832 B2 JP H0435832B2 JP 6167683 A JP6167683 A JP 6167683A JP 6167683 A JP6167683 A JP 6167683A JP H0435832 B2 JPH0435832 B2 JP H0435832B2
Authority
JP
Japan
Prior art keywords
groove
pressure
recording medium
floating
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6167683A
Other languages
Japanese (ja)
Other versions
JPS59186171A (en
Inventor
Yasuro Ootsubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6167683A priority Critical patent/JPS59186171A/en
Publication of JPS59186171A publication Critical patent/JPS59186171A/en
Publication of JPH0435832B2 publication Critical patent/JPH0435832B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005Specially adapted for spacing from a rotating disc using a fluid cushion

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は磁気ヘツドを保持し、この磁気ヘツド
を所定の間隔を隔てて記録媒体に安定に対向させ
て良好な記録媒体再生を行わししめ得る実用性の
高い浮動ヘツドスライダに関する。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention is capable of holding a magnetic head and stably facing a recording medium at a predetermined interval to perform good reproduction of the recording medium. This article relates to a highly practical floating head slider.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

情報処理システムの大容量記憶装置として所謂
ハードデイスクを記録媒体とした磁気デイスク記
憶装置が多く用いられている。この装置はハード
デイスクを高速回転させ乍ら、その情報記録面に
微小間隙を隔てて磁気ヘツドを対向させ、高速に
情報の磁気記録再生を行うものである。しかし
て、上記微小間隙を隙てて磁気ヘツドをデイスク
の情報記録面に対向させるべく、従来専ら浮動ヘ
ツドスライダが用いられている。この浮動ヘツド
スライダは、例えば第1図に示すように情報記録
面に対向する面に2条の平行な滑面1a,1bを
形成してなるスライダ本体2の端部に磁気ヘツド
3を取付けたものである。上記滑面1a,1bは
磁気ヘツド3とデイスクとの相対的移動方向に設
けられたものあつて、その前方側、つまり磁気ヘ
ツド3の取付け部と反対側の端部は切欠加工さ
れ、昇圧機構としてのテーパ面4a,4bとされ
ている。
2. Description of the Related Art Magnetic disk storage devices using so-called hard disks as recording media are often used as large-capacity storage devices for information processing systems. This device rotates a hard disk at high speed while a magnetic head is placed opposite the information recording surface of the hard disk with a small gap therebetween, thereby performing magnetic recording and reproducing of information at high speed. Conventionally, therefore, a floating head slider has been exclusively used to make the magnetic head face the information recording surface of the disk through the minute gap. In this floating head slider, for example, as shown in FIG. 1, a magnetic head 3 is attached to the end of a slider body 2, which has two parallel smooth surfaces 1a and 1b formed on the surface facing the information recording surface. It is something. The smooth surfaces 1a and 1b are provided in the direction of relative movement between the magnetic head 3 and the disk, and the front end thereof, that is, the end opposite to the mounting portion of the magnetic head 3, is cut out to form a pressure booster. The tapered surfaces 4a and 4b are as shown in FIG.

しかして、このような構造の磁気ヘツド3を保
持してなる浮動ヘツドスライイダによれば、第2
図aに示すようにデイスク5の情報記録面に対向
配置されたとき、デイスク5の高速回転に伴つ
て、その情報記録面と前記滑滑面1a,1bとの
間に空気が流入し、前記テーパ面4a,4bを経
て圧縮された空気によつて第2図bに示す如き圧
力がスライダの浮上力として生起される。この浮
上力と、スライダに加えられる荷重とが相俟つて
上記滑面1a,1bと情報記録面との間に所定の
微小間隙が設定される。
According to the floating head slider holding the magnetic head 3 having such a structure, the second
As shown in FIG. The air compressed through the tapered surfaces 4a and 4b generates a pressure as shown in FIG. 2b as a floating force for the slider. This floating force and the load applied to the slider work together to set a predetermined minute gap between the smooth surfaces 1a, 1b and the information recording surface.

ところで、このような浮動ヘツドスライダに保
持された磁気ヘツド3を用いて磁気記録再生を行
う場合、前記ヘツドスライダによつて設定される
情報記録面との間の微小間隙が非常に重要な意味
を持つ。例えば前記荷重を増やして間隙を狭くす
ればデイスク5に対するヘツド3の追従性が良く
なり、良好な磁気記録再生が可能となるが、その
反面、デイスク5の回転開始時や回転停止時には
前記浮上力が十分生起しないことからデイスク5
との摩擦が大きくなる。この結果、滑面1a,1
bおよび磁気ヘツド3の摩耗を招き、その寿命お
よび動作安定性が著しく劣化する。また前記荷重
を軽くして微小間隙を広くすると良好な磁気記録
再生が望めなくなる。従つて、良好な磁気記録再
生を可能とするべく上記荷重を最適設定するには
大きな困難が伴つた。
By the way, when performing magnetic recording and reproducing using the magnetic head 3 held by such a floating head slider, the minute gap between the information recording surface and the information recording surface set by the head slider has a very important meaning. have For example, if the load is increased and the gap is narrowed, the followability of the head 3 to the disk 5 will improve and good magnetic recording and reproducing will be possible, but on the other hand, when the disk 5 starts rotating or stops rotating, the levitation force disk 5 because it does not occur sufficiently.
There will be more friction with the As a result, the smooth surfaces 1a, 1
b and the magnetic head 3, resulting in a significant deterioration in their lifespan and operational stability. Furthermore, if the load is lightened to widen the minute gap, good magnetic recording and reproduction cannot be expected. Therefore, it is very difficult to optimally set the above-mentioned load to enable good magnetic recording and reproduction.

また上述した浮上力を得るテーパ面4a,4b
のテーパ角は非常に小さく、通常(0゜20′)程度
である。従つて、このようにテーパ面4a,4b
を精度良く形成することが非常に難しく、製造歩
留りが悪いと云う問題もあつた。
In addition, the tapered surfaces 4a and 4b that obtain the above-mentioned levitation force
The taper angle of is very small, usually around (0°20'). Therefore, in this way, the tapered surfaces 4a, 4b
It was very difficult to form the film with high precision, and there was also the problem that the manufacturing yield was low.

つまり従来構造の浮動ヘツドスライダは、その
製造自体が難かしいことのみならず、装置への組
込みに際しても高精度な調整を必要とする等の不
具合を有していた。そして、その摩耗を防ぎ、常
に安定で良好な磁気記録再生を行わせることが難
かしかつた。
In other words, the floating head slider of the conventional structure has problems such as not only being difficult to manufacture, but also requiring highly accurate adjustment when incorporated into a device. It has been difficult to prevent this wear and to always perform stable and good magnetic recording and reproduction.

〔発明の目的〕[Purpose of the invention]

本発明はこのような事情を考慮してなされたも
ので、その目的とするところは、記録媒体との間
の微小間隙を安定に設定し、その摩耗を防いて良
好な磁気記録再生を可能とする安価で実用性の高
い浮動ヘツドスライダを提供することにある。
The present invention was made in consideration of these circumstances, and its purpose is to stably set a minute gap between the recording medium and prevent its wear, thereby enabling good magnetic recording and reproduction. To provide an inexpensive and highly practical floating head slider.

〔発明の概要〕[Summary of the invention]

本発明は、磁気ヘツドを保持するスライダ本体
の記録媒体に対向する滑面に昇圧用溝と減圧用溝
とを設けたものであつて、特に上記昇圧用溝を記
録媒体との相対的移動方向後方側に先絞り形状の
溝として実現し、その溝深さを前記滑面と記録媒
体との間の浮上間隙の1.5〜5.0倍に設定し、また
前記減圧用溝を前記相対的移動方向後方側に末広
がり形状の溝として実現し、その溝深さを前記浮
上間隙の5〜20倍に設定したことを特徴とするも
のである。
The present invention provides a pressure increase groove and a pressure decrease groove on the smooth surface of a slider body that holds a magnetic head that faces a recording medium, and in particular, the pressure increase groove is provided in a direction in which the pressure increase groove is moved relative to the recording medium. The depth of the groove is set to 1.5 to 5.0 times the floating gap between the smooth surface and the recording medium, and the depressurization groove is formed on the rear side in the relative movement direction. The groove is realized as a groove that widens toward the side, and the depth of the groove is set to be 5 to 20 times the floating gap.

〔発明の効果〕〔Effect of the invention〕

かくして本発明によれば、上記の如く溝深さを
設定した昇圧用溝と減圧用溝とが、互いに安定な
圧力を発生してバランスするので、極めて安定に
所望とする浮上間隙を設定することができる。し
かもこれらの溝は、例えばエツチング技術等を用
いて精度良く得ることができるので、その製造が
容易であり、安価に製作できる。そして、上記の
如く、スライダ本体の安定な浮上特性を発揮する
ので、その摩耗を防ぎ、磁気ヘツドによる良好な
磁気記録再生を可能とする等の実用上多大なる効
果が奏せられる。
Thus, according to the present invention, the pressure increasing groove and the pressure reducing groove whose groove depths are set as described above generate and balance stable pressure with each other, so that a desired floating gap can be set extremely stably. I can do it. Furthermore, since these grooves can be obtained with high precision using, for example, etching technology, they are easy to manufacture and can be manufactured at low cost. As described above, since the slider main body exhibits stable flying characteristics, it can prevent its wear and provide great practical effects such as enabling good magnetic recording and reproducing by the magnetic head.

〔発明の実施例〕[Embodiments of the invention]

以下、図面を参照して本発明の一実施例につき
説明する。
Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

第3図は実施例に係る浮動ヘツドスライダの概
略構成を示す斜視図で、第1図に示す従来のヘツ
ドスライダと同一部分には同一符号を付して示し
てある。この浮動ヘツドスライダが特徴とすると
ころは、スライダ本体2の磁気記録媒体5に対向
する滑面1a,1bに、従来のテーパ面4a,4
bを形成することに代えて、昇圧用溝11a,1
1b,12a,12bと減圧用溝13a,13b
とを設けた点にある。上記昇圧用溝11a,11
bは滑面1a,1bの前方側に設けられたもので
あつて、磁気記録媒体5との相対的移動方向後方
側に先絞り形状を為す所謂「く」の字形状を為す
溝として実現されている。また他方の昇圧用溝1
2a,12bも同様な形状を有し、これらは前記
滑面1a,1bの後方側に設けられている。そし
て前記減圧用溝13a,13bは前記滑面1a,
1bの略中央部位置に、つまり昇圧用溝11a,
11b,12a,12bの中間位置に、前記相対
的移動方向後方側に末広がり形状を為す「く」の
字状の溝として設けられている。これらの溝11
a,11b,12a,12b,13a,13b
は、例えば滑面1a,1bをその長手方向に4等
分する位置に設けられる。
FIG. 3 is a perspective view showing a schematic configuration of a floating head slider according to an embodiment, and the same parts as those of the conventional head slider shown in FIG. 1 are designated by the same reference numerals. This floating head slider is characterized by having conventional tapered surfaces 4a, 4 on the smooth surfaces 1a, 1b of the slider body 2 facing the magnetic recording medium 5.
Instead of forming the grooves 11a and 1 for boosting the pressure,
1b, 12a, 12b and pressure reducing grooves 13a, 13b
The point is that The pressure increasing grooves 11a, 11
b is provided on the front side of the smooth surfaces 1a and 1b, and is realized as a groove having a so-called "dog" shape with a tapered shape on the rear side in the direction of relative movement with the magnetic recording medium 5. ing. In addition, the other boosting groove 1
2a and 12b also have a similar shape, and are provided on the rear side of the smooth surfaces 1a and 1b. The pressure reducing grooves 13a and 13b are formed by the smooth surfaces 1a and 13b.
1b, that is, the pressure increasing groove 11a,
A dogleg-shaped groove is provided at an intermediate position between 11b, 12a, and 12b, and widens toward the rear in the relative movement direction. These grooves 11
a, 11b, 12a, 12b, 13a, 13b
are provided, for example, at positions that equally divide the smooth surfaces 1a and 1b into four in the longitudinal direction.

しかして、これらの各溝11a,11b,12
a,12b,13a,13bはイオンエツチング
法やスパツタエツチング法を用いて滑面1a,1
bにそれぞれ形成されるもの、その溝パターンの
位置精度および形状精度は、その原画パターンを
作成するに際して用いられるデイジタル測微計の
誤差程度と、極めて高いものとなる。またその溝
深さは、エツチング加工速度が1時間当り1〜
2μmと小さい条件下でエツチング時間制御して
規定され、±0.1μm以下の誤差範囲内で所望寸法
に定められる。
Therefore, each of these grooves 11a, 11b, 12
a, 12b, 13a, 13b are smooth surfaces 1a, 1 using ion etching method or sputter etching method.
The positional accuracy and shape accuracy of the groove patterns formed in the grooves b are extremely high, comparable to the error level of the digital micrometer used to create the original pattern. In addition, the groove depth is determined by the etching speed of 1 to 1 per hour.
It is specified by controlling the etching time under conditions as small as 2 μm, and the desired dimensions are determined within an error range of ±0.1 μm or less.

かくしてこのようにスライダ本体2の滑面1
a,1bに昇圧用溝11a,11b,12a,1
2bと減圧用溝13a,13bとを設けてなる浮
動ヘツドスライダを磁気デイスク装置に組込み、
磁気デイスク記録媒体5に対向させて上記記録媒
体5を高速回転させると、第4図a,bに示すよ
うに、上記滑面1a,1bと記録媒体5との間に
通流する空気の圧力によつて、ヘツドスライダは
所定の微小間隙を形成して記録媒体5から浮上す
る。即ち、昇圧用溝11a,11b,12a,1
2bによつて前記通流空気が局部的に圧縮され、
これにより正の浮上力が生起されてスライダ本体
2が持ち上げられる。そして同時に減圧用溝13
a,13bは前記通流空気を局部的に膨張させ、
負圧を発生させる。この負圧は、スライダ本体2
の滑面1a,1bと記録媒体5との間の間隙を狭
くしようとする作用を呈するものである。
In this way, the smooth surface 1 of the slider body 2
Pressure increasing grooves 11a, 11b, 12a, 1 in a, 1b
2b and pressure-reducing grooves 13a, 13b are incorporated into a magnetic disk device,
When the recording medium 5 is rotated at high speed while facing the magnetic disk recording medium 5, the pressure of the air flowing between the smooth surfaces 1a and 1b and the recording medium 5 increases as shown in FIGS. 4a and 4b. As a result, the head slider floats above the recording medium 5 while forming a predetermined minute gap. That is, the pressure increasing grooves 11a, 11b, 12a, 1
2b locally compresses the flowing air;
This generates a positive floating force and lifts the slider body 2. At the same time, the pressure reducing groove 13
a, 13b locally expands the flowing air;
Generate negative pressure. This negative pressure is applied to the slider body 2
This has the effect of narrowing the gap between the smooth surfaces 1a, 1b and the recording medium 5.

しかしてこれらの溝11a,11b,12a,
12b,13a,13bが生起する流通空気によ
る滑面1a,1bと記録媒体5との間の圧力分布
は、概略的には第4図bに示すようになり、これ
らが相互にバランスしてスライダ本体2は、その
滑面1a,1bと記録媒体5との間に所定の微小
間隙を安定に形成して浮上がることになる。
However, these grooves 11a, 11b, 12a,
The pressure distribution between the recording medium 5 and the smooth surfaces 1a, 1b due to the circulating air generated by the air flow generated by the air flow generated by the air flow generated by the air flow generated by the pressure distributions 12b, 13a, 13b is approximately as shown in FIG. The main body 2 floats while stably forming a predetermined minute gap between its smooth surfaces 1a, 1b and the recording medium 5.

ところで、前記昇圧用溝11a,11b,12
a,12bおよび減圧用溝13a,13bはそれ
ぞれ次のようにして、その作用を呈する。即ち、
昇圧用溝11a,11b,12a,12bは、前
述したように相対移動方方向後方側に先絞りの形
状を有する。従つて、滑面1a,1bと記録媒体
5との間に上記相対移動方向前方側より流入する
空気は、前記昇圧用溝11a,11b,12a,
12bに入り込んだとき、その先絞り形状によつ
て徐々に圧縮されることになる。この圧縮された
空気が溝上面に逃げ道を求め、元の状態に戻ろう
とするので、この力がスライダの浮上力(正の圧
力)を生起することになる。これに対して、減圧
用溝13a,13bに入り込んだ通流空気は、上
記減圧用溝13a,13bが相対的移動方向後方
側に末広がり形状である為、前記昇圧用溝11
a,11b,12a,12bの場合とは逆に徐々
に膨張過程を辿る。この結果、空気は元の状態に
戻るべく、溝の有効断面積を小さくするべく負圧
を発生することになる。従つて、このようにして
圧力を生起する昇圧用溝11a,11b,12
a,12bおよび減圧用溝13a,13bにとつ
ては、その溝形状が非常に重要な役割りを担うと
云える。
By the way, the pressure increasing grooves 11a, 11b, 12
a, 12b and pressure reducing grooves 13a, 13b each exhibit their functions as follows. That is,
As described above, the pressure increasing grooves 11a, 11b, 12a, and 12b have a tapered shape on the rear side in the relative movement direction. Therefore, the air flowing between the smooth surfaces 1a, 1b and the recording medium 5 from the front side in the relative movement direction flows through the pressure increasing grooves 11a, 11b, 12a,
When it enters 12b, it is gradually compressed due to its drawing shape. This compressed air seeks an escape route on the upper surface of the groove and attempts to return to its original state, and this force causes a floating force (positive pressure) on the slider. On the other hand, since the pressure reducing grooves 13a and 13b have a shape that widens toward the rear side in the relative movement direction, the flowing air that has entered the pressure reducing grooves 13a and 13b is transferred to the pressure increasing grooves 13a and 13b.
Contrary to the case of a, 11b, 12a, and 12b, the expansion process gradually follows. As a result, a negative pressure is generated to reduce the effective cross-sectional area of the groove so that the air returns to its original state. Therefore, the pressure increasing grooves 11a, 11b, 12 that generate pressure in this way
It can be said that the shape of the grooves a, 12b and pressure reducing grooves 13a, 13b plays a very important role.

尚、これらの溝11a,11b,12a,12
b,13a,13bを滑面1a,1bのどこに設
けるかと云うことも、上記滑面1a,1bと記録
媒体5との間に所望とする圧力分布を得る上で重
要となることは云うまでもない。この際、昇圧用
溝11a,11b,12a,12bによつて得ら
れる浮上力により、滑面1a,1bと記録媒体5
とが平行になれば、スライダ本体2の記録媒体5
に対する追従特性が良くなる。そして、このこと
は、磁気ヘツド3による記録再生特性の向上を促
がし、またそのクラツシユ防止にも大きく寄与す
る。しかもスライダのピツチング方向に対する安
定性も増す。更に、記録面に対向する2本の平行
な滑面1a,1bは、ローリング方向に対しても
極めて安定した走行安定性を発揮する構造であ
る。従つて、これらのことを総合的に考慮して
も、微小間隙で走行するスライダは極めて走行安
定性が良い。尚、各滑面1a,1bにおいて前述
したように2ケ所ずつ設けられる昇圧用溝11
a,11b,12a,12b間の距離をできる限
り長く設定することが望ましいと云える。然し乍
ら、これらの溝11a,11b,12a,12b
を滑面1a,1bの空気流入端部側および空気流
出端部側に近接させて設けると、記録媒体5の回
転開始時や停止時において上記滑面1a,1bが
記録媒体5に接触して、上記端部の摩耗や欠けを
生じることがあり、これによつて溝形状が変化す
る虞れがある。故に溝形状変化による圧力発生状
態の変化を防ぐことを考慮した上で、前記昇圧用
溝11a,11b,12a,12bの形成位置を
設定することが望ましい。従つて、これを考慮し
た上で各溝11a,11b,12a,12b,1
3a,13bを滑面1a,1bにそれぞれ設けれ
ば、スライダ本体2のピツチング方向に対する安
定性を確保し、デイスク記録媒体5に対する追従
特性の向上を図つて良好な記録再生を行わしめる
ことが可能となる。このような観点から、滑面の
前後両端部から、滑面全長の0.3倍の位置に溝を
設けるのが好ましい。
Note that these grooves 11a, 11b, 12a, 12
It goes without saying that where on the smooth surfaces 1a, 1b the smooth surfaces 1a, 13b, 13a, 13b are provided is also important in obtaining the desired pressure distribution between the smooth surfaces 1a, 1b and the recording medium 5. do not have. At this time, due to the floating force obtained by the pressure increasing grooves 11a, 11b, 12a, 12b, the smooth surfaces 1a, 1b and the recording medium 5
If they become parallel, the recording medium 5 of the slider body 2
The tracking characteristics are improved. This promotes improvement in the recording and reproducing characteristics of the magnetic head 3 and greatly contributes to prevention of crashes. Moreover, the stability of the slider in the pitching direction is also increased. Furthermore, the two parallel smooth surfaces 1a and 1b facing the recording surface have a structure that exhibits extremely stable running stability even in the rolling direction. Therefore, even if these factors are considered comprehensively, a slider that runs in a small gap has extremely good running stability. In addition, as mentioned above, the pressure increasing grooves 11 are provided at two locations on each of the smooth surfaces 1a and 1b.
It can be said that it is desirable to set the distance between a, 11b, 12a, and 12b as long as possible. However, these grooves 11a, 11b, 12a, 12b
If the smooth surfaces 1a, 1b are provided close to the air inflow end and the air outflow end, the smooth surfaces 1a, 1b will come into contact with the recording medium 5 when the recording medium 5 starts or stops rotating. This may cause wear or chipping of the ends, which may change the groove shape. Therefore, it is desirable to set the formation positions of the pressure increasing grooves 11a, 11b, 12a, and 12b in consideration of preventing changes in the pressure generation state due to changes in the groove shape. Therefore, taking this into consideration, each groove 11a, 11b, 12a, 12b, 1
3a and 13b are provided on the smooth surfaces 1a and 1b, respectively, it is possible to ensure stability in the pitching direction of the slider body 2, improve the tracking characteristics for the disk recording medium 5, and perform good recording and reproduction. becomes. From this point of view, it is preferable to provide grooves at positions 0.3 times the total length of the smooth surface from both the front and rear ends of the smooth surface.

ところで、前記各溝11a,11b,12a,
12b,13a,13bの溝形状は、記録媒体5
に対する相対的移動方向後方側に先絞り状、或い
は末広がり状であり、代表的には第5図aに示す
ように「く」の字状として実現される。尚、第5
図b〜eに示すように種々の形状として実現する
ことも可能である。
By the way, each of the grooves 11a, 11b, 12a,
The groove shapes of 12b, 13a, and 13b correspond to the recording medium 5.
It has a converging shape or a shape that widens toward the rear in the direction of relative movement with respect to the rear side, and is typically realized as a dogleg shape as shown in FIG. 5a. Furthermore, the fifth
It is also possible to realize various shapes as shown in Figures b to e.

しかして今、このような「く」の字状の溝の溝
中心が為す角度θを夾角として定義した場合、こ
の夾角θによつて滑面1a,1bにおける発生圧
力が変化する。第6図aは昇圧用溝における夾角
と発生圧力f(+)との関係を示したもので、第7図
aは減圧用溝における夾角と発生圧力f(-)との関
係を示したものである。この第6図aに示される
ように、昇圧用溝にあつては、夾角θが小さい
程、大きな浮上力、つまり圧力f(+)を得ることが
できる。しかし、その反面、上記夾角θを小さく
することは、滑面1a,1bの長手方向における
溝の占有長が長くなることを意味し、溝形成位置
に大きな制約が加わる。従つて、この夾角θによ
つて発生圧力を調整する場合には、実用的範囲と
して上記夾角θを10〜100゜に設定することが好ま
しい。これに対して減圧用溝にあつては、第7図
aに示されるように夾角θが約50゜以下のときに
負圧f(-)が発生し、上記角度以上の場合には正の
圧力となる。これは、溝に流入する空気によつて
生起される負圧と溝が存在する為に生じる正の圧
力との兼合いによつて定まるものであり、上記負
圧を高めるにはできる限り夾角θを小さくすれば
良いことが判る。従つて、この減圧用溝形成の自
由度を考慮した場合、その夾角θを10〜45゜程度
に設定して負圧をコントロールすることが望まし
い。
However, if the angle θ formed by the groove center of such a dogleg-shaped groove is defined as an included angle, the pressure generated on the smooth surfaces 1a and 1b changes depending on this included angle θ. Figure 6a shows the relationship between the included angle in the pressure increasing groove and the generated pressure f (+) , and Figure 7 a shows the relationship between the included angle and the generated pressure f (-) in the pressure reducing groove. It is. As shown in FIG. 6a, in the case of the pressure increasing groove, the smaller the included angle θ, the greater the floating force, that is, the pressure f (+) can be obtained. However, on the other hand, reducing the included angle θ means that the occupied length of the grooves in the longitudinal direction of the smooth surfaces 1a, 1b becomes longer, which places great restrictions on the groove forming positions. Therefore, when adjusting the generated pressure by the included angle θ, it is preferable to set the included angle θ to 10 to 100° as a practical range. On the other hand, in the case of pressure reducing grooves, as shown in Figure 7a, negative pressure f (-) is generated when the included angle θ is approximately 50° or less, and positive pressure is generated when the included angle is greater than the above angle. It becomes pressure. This is determined by the balance between the negative pressure generated by the air flowing into the groove and the positive pressure generated due to the existence of the groove, and in order to increase the negative pressure, the included angle θ should be adjusted as much as possible. It turns out that it is better to make it smaller. Therefore, when considering the degree of freedom in forming this pressure reducing groove, it is desirable to control the negative pressure by setting the included angle θ to about 10 to 45 degrees.

またこのようにして夾角θを設定してなる昇圧
用溝および減圧用溝の発生圧力は、その溝深さに
よつて大きく左右される。第6図bは、昇圧用溝
の溝深さに対する発生圧力の関係を示したもので
あり、第7図bは減圧用溝の溝深さに対する発生
圧力の関係を示すものである。尚、ここでは、滑
面1a,1bと記録媒体5との間の浮上隙間、つ
まり微小間隙によつて上記溝深さを正規化して示
している。この第6図bに示されるように、昇圧
用溝によつて得られる圧力f(+)は、溝深さを浮上
すきまに比して略3倍に設定したときに最大とな
る。従つて、このピーク値を得る溝深さの昇圧用
溝とすれば、圧力発生効率が非常に良くなると云
える。またこのとき、溝深さの製作誤差を考慮し
ても、圧力発生の溝深さに対する依存性の小さい
ピーク付近を用いることが好ましい。従つて、滑
面1a,1bの記録媒体5に対する傾きを考慮し
て、実用的には昇圧用溝の溝深さを前記浮上隙間
の2〜10倍程度に設定すれば、その発生圧力が得
られ、特に上記隙間の1.5〜5.0倍にすると、その
浮上隙間を最も効果的にコントロールすることが
できる良好な浮上力を得ることが可能となる。
尚、このような溝深さに関する性質を逆に利用
し、例えば溝深さを浮上隙間に対して5〜20倍に
設定して、浮上圧力を低く抑えることも有用であ
る。このことは、滑面1a,1bの面積に対して
浮上圧力が過大となり、これによつて摩耗の問題
が生じる場合には有効に利用できる。尚、上限を
20倍としたのは、加工上、溝深さを深くするの
は、精度或いは加工時間等の種々の問題から得策
でないと考え、この範囲とした。
Further, the pressure generated in the pressure increasing groove and the pressure reducing groove formed by setting the included angle θ in this manner is greatly influenced by the depth of the groove. FIG. 6b shows the relationship between the generated pressure and the groove depth of the pressure increasing groove, and FIG. 7b shows the relationship between the generated pressure and the groove depth of the pressure reducing groove. Note that the groove depth is shown normalized by the floating gap, that is, the minute gap, between the smooth surfaces 1a, 1b and the recording medium 5. As shown in FIG. 6b, the pressure f (+) obtained by the pressure increasing groove becomes maximum when the groove depth is set to approximately three times the floating clearance. Therefore, it can be said that if the pressure increasing groove is set to a groove depth that provides this peak value, the pressure generation efficiency will be greatly improved. Further, at this time, even if manufacturing errors in the groove depth are considered, it is preferable to use a position near the peak where the dependence of pressure generation on the groove depth is small. Therefore, considering the inclination of the smooth surfaces 1a and 1b with respect to the recording medium 5, the generated pressure can be obtained practically by setting the groove depth of the pressure boosting groove to about 2 to 10 times the floating gap. In particular, when the gap is made 1.5 to 5.0 times the above-mentioned gap, it becomes possible to obtain a good buoyancy force that can most effectively control the buoyancy gap.
In addition, it is also useful to make use of such properties regarding the groove depth, for example, to set the groove depth to 5 to 20 times the floating gap to keep the floating pressure low. This can be effectively utilized when the floating pressure becomes excessive with respect to the area of the smooth surfaces 1a and 1b, thereby causing a problem of wear. In addition, the upper limit
The reason why the groove depth was set at 20 times was set in this range because it was considered that increasing the groove depth was not a good idea due to various problems such as accuracy and processing time.

一方、減圧用溝によつて発生する圧力は第7図
bに示すように比較的ブロードであるが、溝深さ
が浮上隙間に対して約6倍であるときにピークを
有する。そして、従つて、前記昇圧用溝によつて
得られる圧力f(+)との兼合いから、この減圧用溝
の溝深さを、例えば浮上隙間の5〜20倍に設定す
れば、そこに流入する空気を効率良く利用して負
圧f(-)を安定に生起することが可能となる。従つ
て今、昇圧用溝の溝深さを浮上隙間の1.5〜5.0倍
設定し、且つ減圧用溝の溝深さを浮上隙間の5〜
20倍に設定すれば、通流空気を効果的に利用して
圧力を発生させ、所望とする浮上隙間(微小間
隙)を安定に得ることが可能となる。そして、そ
の動的安定性を十分に高めることができる。尚、
この場合、減圧用溝の溝信さを昇圧用溝の溝深さ
の2倍以上に設定することが実用上望ましい。
On the other hand, the pressure generated by the pressure reducing groove is relatively broad as shown in FIG. 7b, but reaches a peak when the groove depth is approximately six times the floating gap. Therefore, in consideration of the pressure f (+) obtained by the pressure increasing groove, if the groove depth of this pressure reducing groove is set to, for example, 5 to 20 times the floating gap, there It becomes possible to stably generate negative pressure f (-) by efficiently utilizing the inflowing air. Therefore, the depth of the pressure increasing groove is set to 1.5 to 5.0 times the floating gap, and the groove depth of the pressure reducing groove is set to 5 to 5 times the floating gap.
If set to 20 times, it becomes possible to effectively utilize the flowing air to generate pressure and stably obtain the desired floating gap (micro gap). In addition, its dynamic stability can be sufficiently improved. still,
In this case, it is practically desirable to set the groove depth of the pressure reducing groove to be at least twice the groove depth of the pressure increasing groove.

かくして上述したように昇圧用溝および減圧用
溝を滑面に備えた浮動ヘツドスライダによれば、
記録媒体5の回転に対して上記各溝の作用が相乗
して次のような効果が得られる。即ち、記録媒体
5が静止している場合、スライダはその滑面1
a,1bを上記記録媒体に当接させているが、記
録媒体5が回転し始めるとき、或いは回転を停止
しようとしてスライダに対する記録媒体5の相対
速度が小さいとき、昇圧用溝が主としてその機能
を発揮する。これによつてスライダ本体2が浮上
力を受けて浮上し、記録媒体5との間に所定の微
小間隙を形成する。そして、上記記録媒体5が定
常的に高速回転し、上記相対速度が速くなつた場
合には、前記昇圧用溝に加えて減圧用溝もその機
能を呈することになる。この結果、昇圧用溝が発
生する大きな浮上力を低下させるように減圧用溝
の負圧が作用し、ここに滑面1a,1bと前記記
録媒体5との間が前述した微小間隙を隔てて安定
することになる。つまり、上記微小間隙を形成し
て、昇圧用溝による浮上力と減圧用溝による負圧
とが安定に衝り合うことになる。そして、これら
の各溝によつて生起される圧力によつて上記浮上
隙間、つまり記録媒体5との間の微小間隙が制御
されるので、従来のように荷重を加える必要がな
く、極めて良好に自己安定する。
Thus, according to the floating head slider having pressure increasing grooves and pressure reducing grooves on the smooth surface as described above,
The effects of the above-mentioned grooves are synergistic with respect to the rotation of the recording medium 5, and the following effects are obtained. That is, when the recording medium 5 is stationary, the slider moves along its smooth surface 1.
a and 1b are brought into contact with the recording medium, but when the recording medium 5 starts rotating or when the relative speed of the recording medium 5 with respect to the slider is small when trying to stop rotation, the pressure increasing groove mainly performs its function. Demonstrate. As a result, the slider body 2 receives the floating force and floats, forming a predetermined minute gap with the recording medium 5. When the recording medium 5 rotates at a constant high speed and the relative speed increases, the pressure reducing groove will also perform its function in addition to the pressure increasing groove. As a result, the negative pressure of the pressure reducing groove acts to reduce the large floating force generated by the pressure increasing groove, and the smooth surfaces 1a, 1b and the recording medium 5 are separated from each other by the above-mentioned minute gap. It will become stable. In other words, by forming the minute gap, the floating force due to the pressure increasing groove and the negative pressure due to the pressure reducing groove stably collide with each other. Since the floating gap, that is, the minute gap between the recording medium 5 and the recording medium 5 is controlled by the pressure generated by each of these grooves, there is no need to apply a load as in the conventional case, and the airflow is extremely good. Be self-stabilizing.

しかも上述したように各溝がそれぞれ圧力を発
生してスライダの姿勢を制御するので、ピツチン
グ方向に対する安定性に優れ、磁気ヘツドによる
良好な磁気記録再生を可能ならしめる。また、ス
ライダを安定に浮上させ得るので記録媒体による
摩耗を大幅に軽減し得る。これ故、長期に亘つて
その信頼性を確保し、安定動作を行わしめること
が可能となる。
Furthermore, as described above, since each groove generates pressure to control the attitude of the slider, stability in the pitching direction is excellent, and good magnetic recording and reproduction by the magnetic head is possible. Furthermore, since the slider can be stably floated, wear caused by the recording medium can be significantly reduced. Therefore, it is possible to ensure reliability and perform stable operation over a long period of time.

また前記各溝は、前述したようにエツチング技
術を用いることによつて容易に、且つ高精度に形
成することができる。従つてその製造が容易であ
り、歩留り良く安価に浮動ヘツドスライダを製作
することができ、その実用的利点は絶大である。
Further, each of the grooves can be formed easily and with high precision by using the etching technique as described above. Therefore, it is easy to manufacture, and the floating head slider can be manufactured at low cost with good yield, and its practical advantages are enormous.

尚、本発明は上述した実施例にのみ限定される
ものではない。例えば昇圧用溝および減圧用溝の
滑面における形成位置、その個数、形状、溝深さ
等は、それぞれ仕様に応じて相互の兼ね合いを考
慮した上で定めればよいものである。要するに本
発明はその要旨を逸脱しない範囲で種々変形して
実施することができる。
Note that the present invention is not limited to the above-described embodiments. For example, the formation positions of the pressure increasing grooves and pressure reducing grooves on the smooth surface, their number, shape, groove depth, etc. may be determined in consideration of mutual balance according to the respective specifications. In short, the present invention can be implemented with various modifications without departing from the gist thereof.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の浮動ヘツドスライダを示す図、
第2図a,bは第1図に示すヘツドの姿勢と浮上
隙間を形成する圧力の分布を示す図、第3図は本
発明の一実施例に係る浮動ヘツドスライダを示す
図、第4図a,bは実施例スライダの姿勢と浮上
隙間を形成する圧力の分布を示す図、第5図a〜
eは昇圧用溝および減圧用溝の溝形状を示す図、
第6図a,bは昇圧用溝の特性を示す図、第7図
a,bは減圧用溝の特性を示す図である。 1a,1b……滑面、2……スライダ本体、3
……磁気ヘツド、5……記録媒体、11a,11
b,12a,12b……昇圧用溝、13a,13
b……減圧用溝。
Figure 1 shows a conventional floating head slider;
2a and 2b are diagrams showing the attitude of the head shown in FIG. 1 and the pressure distribution forming the floating gap, FIG. 3 is a diagram showing a floating head slider according to an embodiment of the present invention, and FIG. a and b are diagrams showing the attitude of the slider of the embodiment and the distribution of pressure forming the floating gap, FIGS.
e is a diagram showing the groove shapes of the pressure increasing groove and the pressure reducing groove;
6A and 6B are diagrams showing the characteristics of the pressure increasing groove, and FIGS. 7A and 7B are diagrams showing the characteristics of the pressure reducing groove. 1a, 1b...smooth surface, 2...slider body, 3
...Magnetic head, 5...Recording medium, 11a, 11
b, 12a, 12b...pressure boosting groove, 13a, 13
b...Groove for pressure reduction.

Claims (1)

【特許請求の範囲】[Claims] 1 磁気ヘツドを記録媒体に対向させて保持し上
記記録媒体との対向面を滑面としたスライダ本体
と、このスライダ本体の上記滑面に設けられた昇
圧用溝および減圧用溝とを具備し、上記昇圧用溝
は前記磁気ヘツド側から所定の角度で開いた輪郭
形状を有し、その溝深さを前記滑面と記録媒体と
の浮上隙間に対して1.5〜5.0倍に定めたものであ
つて、且つ前記減圧用溝は前記昇圧用溝の形状に
対して逆の輪郭形状を有し、その溝深さを前記浮
上隙間に対して5〜20倍に設定したことを特徴と
する浮動ヘツドスライダ。
1. A slider body that holds a magnetic head facing a recording medium and has a smooth surface facing the recording medium, and a pressure increasing groove and a pressure decreasing groove provided on the smooth surface of the slider body. The boosting groove has a profile opening at a predetermined angle from the magnetic head side, and the groove depth is set to be 1.5 to 5.0 times the floating gap between the smooth surface and the recording medium. Floating device, wherein the depressurizing groove has a contour shape opposite to that of the pressurizing groove, and the groove depth is set to be 5 to 20 times as large as the floating gap. head slider.
JP6167683A 1983-04-08 1983-04-08 Floating head slider Granted JPS59186171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6167683A JPS59186171A (en) 1983-04-08 1983-04-08 Floating head slider

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6167683A JPS59186171A (en) 1983-04-08 1983-04-08 Floating head slider

Publications (2)

Publication Number Publication Date
JPS59186171A JPS59186171A (en) 1984-10-22
JPH0435832B2 true JPH0435832B2 (en) 1992-06-12

Family

ID=13178088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6167683A Granted JPS59186171A (en) 1983-04-08 1983-04-08 Floating head slider

Country Status (1)

Country Link
JP (1) JPS59186171A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4700248A (en) * 1986-03-17 1987-10-13 Polaroid Corporation Magnetic head assembly with angled slots
US5086360A (en) * 1990-09-06 1992-02-04 Applied Magnetics Corporation Constant flying height slider

Also Published As

Publication number Publication date
JPS59186171A (en) 1984-10-22

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