JPS63187327U - - Google Patents
Info
- Publication number
- JPS63187327U JPS63187327U JP7907587U JP7907587U JPS63187327U JP S63187327 U JPS63187327 U JP S63187327U JP 7907587 U JP7907587 U JP 7907587U JP 7907587 U JP7907587 U JP 7907587U JP S63187327 U JPS63187327 U JP S63187327U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- thin film
- electrodes
- vacuum container
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7907587U JPS63187327U (no) | 1987-05-26 | 1987-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7907587U JPS63187327U (no) | 1987-05-26 | 1987-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63187327U true JPS63187327U (no) | 1988-11-30 |
Family
ID=30928603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7907587U Pending JPS63187327U (no) | 1987-05-26 | 1987-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63187327U (no) |
-
1987
- 1987-05-26 JP JP7907587U patent/JPS63187327U/ja active Pending