JPH0254225U - - Google Patents
Info
- Publication number
- JPH0254225U JPH0254225U JP13367088U JP13367088U JPH0254225U JP H0254225 U JPH0254225 U JP H0254225U JP 13367088 U JP13367088 U JP 13367088U JP 13367088 U JP13367088 U JP 13367088U JP H0254225 U JPH0254225 U JP H0254225U
- Authority
- JP
- Japan
- Prior art keywords
- target
- thin film
- disposed
- holder
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13367088U JPH0254225U (no) | 1988-10-13 | 1988-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13367088U JPH0254225U (no) | 1988-10-13 | 1988-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0254225U true JPH0254225U (no) | 1990-04-19 |
Family
ID=31391748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13367088U Pending JPH0254225U (no) | 1988-10-13 | 1988-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0254225U (no) |
-
1988
- 1988-10-13 JP JP13367088U patent/JPH0254225U/ja active Pending