JPS6373355U - - Google Patents
Info
- Publication number
- JPS6373355U JPS6373355U JP16850586U JP16850586U JPS6373355U JP S6373355 U JPS6373355 U JP S6373355U JP 16850586 U JP16850586 U JP 16850586U JP 16850586 U JP16850586 U JP 16850586U JP S6373355 U JPS6373355 U JP S6373355U
- Authority
- JP
- Japan
- Prior art keywords
- bias voltage
- voltage application
- vacuum chamber
- ion plating
- application electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007733 ion plating Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims 4
- 238000001704 evaporation Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- 230000005284 excitation Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16850586U JPS6373355U (no) | 1986-11-01 | 1986-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16850586U JPS6373355U (no) | 1986-11-01 | 1986-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373355U true JPS6373355U (no) | 1988-05-16 |
Family
ID=31101438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16850586U Pending JPS6373355U (no) | 1986-11-01 | 1986-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373355U (no) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63109159A (ja) * | 1986-10-23 | 1988-05-13 | Babcock Hitachi Kk | 孔を有する無機質担体への触媒用金属の担持方法 |
-
1986
- 1986-11-01 JP JP16850586U patent/JPS6373355U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63109159A (ja) * | 1986-10-23 | 1988-05-13 | Babcock Hitachi Kk | 孔を有する無機質担体への触媒用金属の担持方法 |