JPS6270430U - - Google Patents
Info
- Publication number
- JPS6270430U JPS6270430U JP16134285U JP16134285U JPS6270430U JP S6270430 U JPS6270430 U JP S6270430U JP 16134285 U JP16134285 U JP 16134285U JP 16134285 U JP16134285 U JP 16134285U JP S6270430 U JPS6270430 U JP S6270430U
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- substrate
- vacuum container
- held
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
Landscapes
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16134285U JPS6270430U (no) | 1985-10-23 | 1985-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16134285U JPS6270430U (no) | 1985-10-23 | 1985-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6270430U true JPS6270430U (no) | 1987-05-02 |
Family
ID=31087564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16134285U Pending JPS6270430U (no) | 1985-10-23 | 1985-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6270430U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01312065A (ja) * | 1988-06-13 | 1989-12-15 | Hitachi Ltd | 磁性膜形成装置 |
-
1985
- 1985-10-23 JP JP16134285U patent/JPS6270430U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01312065A (ja) * | 1988-06-13 | 1989-12-15 | Hitachi Ltd | 磁性膜形成装置 |