JPH0186229U - - Google Patents
Info
- Publication number
- JPH0186229U JPH0186229U JP18312487U JP18312487U JPH0186229U JP H0186229 U JPH0186229 U JP H0186229U JP 18312487 U JP18312487 U JP 18312487U JP 18312487 U JP18312487 U JP 18312487U JP H0186229 U JPH0186229 U JP H0186229U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- plasma cvd
- cvd apparatus
- vacuum chamber
- preheating heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18312487U JPH0186229U (no) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18312487U JPH0186229U (no) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186229U true JPH0186229U (no) | 1989-06-07 |
Family
ID=31474556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18312487U Pending JPH0186229U (no) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186229U (no) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62131523A (ja) * | 1985-12-03 | 1987-06-13 | Hitachi Electronics Eng Co Ltd | Ｃｖｄ薄膜形成装置 |
-
1987
- 1987-11-30 JP JP18312487U patent/JPH0186229U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62131523A (ja) * | 1985-12-03 | 1987-06-13 | Hitachi Electronics Eng Co Ltd | Ｃｖｄ薄膜形成装置 |