JPS63186764U - - Google Patents
Info
- Publication number
- JPS63186764U JPS63186764U JP7665987U JP7665987U JPS63186764U JP S63186764 U JPS63186764 U JP S63186764U JP 7665987 U JP7665987 U JP 7665987U JP 7665987 U JP7665987 U JP 7665987U JP S63186764 U JPS63186764 U JP S63186764U
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- vapor deposition
- vapor
- deposition
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 13
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案に係る蒸着用ペレツトの一実施
例を示す平面図、第２図は同断面図である。
１…第１のペレツト、２…第２のペレツト。
FIG. 1 is a plan view showing an embodiment of a pellet for vapor deposition according to the present invention, and FIG. 2 is a sectional view thereof. 1...first pellet, 2...second pellet.
Claims (1)
用ペレツトにおいて、ＥＬ素子の発光中心材料か
らなる第１のペレツトと、発光母材料からなり前
記第１のペレツトの上に重ねて配置される第２の
ペレツトとを備え、前記第２のペレツトの表面に
前記第１のペレツトに達する貫通穴を設けて、前
記第１のペレツトからは前記貫通穴を通して蒸着
を行うように構成したことを特徴とする蒸着用ペ
レツト。 In a vapor deposition pellet whose surface is vapor-deposited by applying an electron beam to its surface, a first pellet made of a luminescent center material of an EL element, and a second pellet made of a luminescent base material and placed over the first pellet are stacked on top of the first pellet. pellets, a through hole reaching the first pellet is provided on the surface of the second pellet, and vapor deposition is performed from the first pellet through the through hole. Pellet for deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7665987U JPS63186764U (en) | 1987-05-21 | 1987-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7665987U JPS63186764U (en) | 1987-05-21 | 1987-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63186764U true JPS63186764U (en) | 1988-11-30 |
Family
ID=30923946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7665987U Pending JPS63186764U (en) | 1987-05-21 | 1987-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63186764U (en) |
-
1987
- 1987-05-21 JP JP7665987U patent/JPS63186764U/ja active Pending
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