JPH0284257U - - Google Patents
Info
- Publication number
- JPH0284257U JPH0284257U JP16473188U JP16473188U JPH0284257U JP H0284257 U JPH0284257 U JP H0284257U JP 16473188 U JP16473188 U JP 16473188U JP 16473188 U JP16473188 U JP 16473188U JP H0284257 U JPH0284257 U JP H0284257U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- solid source
- heater wire
- source
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Description
第１図ａは、この考案の一実施例の固体ソース
蒸発源の平面図、第１図ｂは断面図である。第２
図ａは従来の固体ソース蒸発源の平面図、第２図
ｂは断面図である。
１…るつぼ、２…筒、３…ヒーター線、５…ノ
ズル、５ａ…ノズルの基部、Ｓ…固体ソース。
FIG. 1a is a plan view of a solid source evaporation source according to an embodiment of the invention, and FIG. 1b is a sectional view. Second
Figure a is a plan view of a conventional solid source evaporation source, and Figure 2b is a cross-sectional view. DESCRIPTION OF SYMBOLS 1... Crucible, 2... Cylinder, 3... Heater wire, 5... Nozzle, 5a... Base of nozzle, S... Solid source.
Claims (1)
により加熱し蒸気化させ、さらに蒸気をノズルに
より導く構造をもつ固体ソース蒸発源において、 前記ノズルの基部を筒の内側に取り付けると共
に、ヒーター線をノズル周辺にまで密に巻きつけ
たことを特徴とする固体ソース蒸発源。[Claims for Utility Model Registration] A solid source evaporation source having a structure in which a solid source filled in a crucible is heated and vaporized by a heater wire, and the vapor is further guided through a nozzle, the base of the nozzle being placed inside the cylinder. A solid source evaporation source characterized by a heater wire wrapped tightly around the nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473188U JPH0284257U (en) | 1988-12-19 | 1988-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473188U JPH0284257U (en) | 1988-12-19 | 1988-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0284257U true JPH0284257U (en) | 1990-06-29 |
Family
ID=31450586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16473188U Pending JPH0284257U (en) | 1988-12-19 | 1988-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0284257U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018003137A (en) * | 2016-07-08 | 2018-01-11 | 株式会社ジャパンディスプレイ | Film deposition apparatus and film deposition method |
-
1988
- 1988-12-19 JP JP16473188U patent/JPH0284257U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018003137A (en) * | 2016-07-08 | 2018-01-11 | 株式会社ジャパンディスプレイ | Film deposition apparatus and film deposition method |