JPS63186763U - - Google Patents
Info
- Publication number
- JPS63186763U JPS63186763U JP2090287U JP2090287U JPS63186763U JP S63186763 U JPS63186763 U JP S63186763U JP 2090287 U JP2090287 U JP 2090287U JP 2090287 U JP2090287 U JP 2090287U JP S63186763 U JPS63186763 U JP S63186763U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- vapor deposition
- vacuum
- jig
- slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2090287U JPS63186763U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-16 | 1987-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2090287U JPS63186763U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-16 | 1987-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63186763U true JPS63186763U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-11-30 |
Family
ID=30816844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2090287U Pending JPS63186763U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-16 | 1987-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63186763U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003293122A (ja) * | 1999-12-27 | 2003-10-15 | Semiconductor Energy Lab Co Ltd | 表示装置の作製方法 |
| US7309269B2 (en) | 2002-04-15 | 2007-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device |
| US7517551B2 (en) | 2000-05-12 | 2009-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a light-emitting device |
-
1987
- 1987-02-16 JP JP2090287U patent/JPS63186763U/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003293122A (ja) * | 1999-12-27 | 2003-10-15 | Semiconductor Energy Lab Co Ltd | 表示装置の作製方法 |
| JP2011117083A (ja) * | 1999-12-27 | 2011-06-16 | Semiconductor Energy Lab Co Ltd | 発光装置の作製方法 |
| JP2013147754A (ja) * | 1999-12-27 | 2013-08-01 | Semiconductor Energy Lab Co Ltd | 成膜方法 |
| US8968823B2 (en) | 1999-12-27 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a light emitting device |
| JP2018066066A (ja) * | 1999-12-27 | 2018-04-26 | 株式会社半導体エネルギー研究所 | 成膜方法 |
| US7517551B2 (en) | 2000-05-12 | 2009-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a light-emitting device |
| US7309269B2 (en) | 2002-04-15 | 2007-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device |
| US9209427B2 (en) | 2002-04-15 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device |