JPS62110261U - - Google Patents
Info
- Publication number
- JPS62110261U JPS62110261U JP20154785U JP20154785U JPS62110261U JP S62110261 U JPS62110261 U JP S62110261U JP 20154785 U JP20154785 U JP 20154785U JP 20154785 U JP20154785 U JP 20154785U JP S62110261 U JPS62110261 U JP S62110261U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- vapor deposition
- deposition material
- crucible
- shielding plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20154785U JPS62110261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20154785U JPS62110261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62110261U true JPS62110261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-14 |
Family
ID=31165104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20154785U Pending JPS62110261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62110261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5746131A (en) * | 1980-09-05 | 1982-03-16 | Toshiba Corp | Detector for abnormality in optical transmission system |
| JPS58210166A (ja) * | 1982-06-02 | 1983-12-07 | Hitachi Ltd | スパツタ装置 |
-
1985
- 1985-12-27 JP JP20154785U patent/JPS62110261U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5746131A (en) * | 1980-09-05 | 1982-03-16 | Toshiba Corp | Detector for abnormality in optical transmission system |
| JPS58210166A (ja) * | 1982-06-02 | 1983-12-07 | Hitachi Ltd | スパツタ装置 |
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