JPS6318522A - Manufacturing device for magnetic recording medium - Google Patents

Abstract

PURPOSE:To attain the long time operation of a manufacturing device of a magnetic recording medium by providing one or plural pans in the equipment so as to reduce the deterioration in the quality due to dust and flakes stuck onto a base. CONSTITUTION:A base 9 is fed to a can 5 from a supply roll 2 via guide rolls 4a, 4b, targets 7a, 7b and is used to form a magnetic thin film by the sputtering method in an equipment having the structure that the targets 7a, 7b apply sputtering from the left/right side of the can 5 in a vacuum film forming chamber 1 and is wound on a winding roll 3 via guide rolls 4c, 4d. The dust generated in sputtering is spread over inside the vacuum film forming equipment. A sticking preventing plate 6 is placed above the can 5 in order to prevent the dust and flakes from the ceiling of the vacuum film forming chamber falling down and stuck to the base 9 and the can 5. Further, in providing pans 8, the sticking of the dust and flames onto the base is prevented. Further, a magnet 10 is provided near the lower face of the pan to aggregate and fix the dust and flakes collected at the bottom of the pan.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic recording medium manufacturing device that forms a magnetic film on a substrate using a vacuum film forming device (for example, a sputtering device, a vapor deposition device, etc.). be.

[Conventional technology]

Conventionally, in magnetic recording media manufacturing equipment using vacuum film deposition equipment, dust and agglomerated flakes generated in the film deposition chamber during production adhere to the surface of the substrate and the substrate conveyance equipment, causing the magnetic recording to be manufactured. This often resulted in significant deterioration of the quality of the media. As a device for solving this problem, there is a device described in Japanese Unexamined Patent Publication No. 59-139137. That is, in the above-mentioned device, permanent magnets are arranged opposite to important surfaces of the substrate and the substrate conveyance equipment in order to remove magnetic dust and flakes adhering to the surface of the substrate or the substrate conveyance equipment.

(Problems to be Solved by the Invention) However, in the above-mentioned device, dust and flakes adhere directly to the magnet, making it unsuitable for long-term production, and improvements have been desired.

An object of the present invention is to provide an apparatus that can stably manufacture magnetic recording media over a long period of time.

[Means for solving problems]

The present invention forms a magnetic thin film on a substrate to be transported in vacuum,
This is an apparatus for manufacturing a magnetic recording medium, characterized in that one or more receivers are disposed within the apparatus.

The saucer of the present invention prevents dust and flakes generated in the manufacturing equipment from falling onto the gas conveyed into the equipment,
They are placed at various locations within the device to store them. Needless to say, the installation location and shape of the tray are determined for each device used. The material of the saucer is not particularly limited as long as it does not emit gas harmful to the manufacture of magnetic recording media into the vacuum apparatus, and preferable examples include various ceramics, various metals, and alloys.

Preferably, a magnet is disposed at the bottom of the saucer of the present invention. By disposing the magnet, magnetic dust and flakes can be fixed on the tray.

The magnet may be placed in close contact with the bottom surface of the saucer, or may be placed at some distance from the bottom surface.

It doesn't matter whether the magnet is a permanent magnet or an electromagnet.
Also, the strength of the magnetic pole is determined by the manufacturing equipment and the expected powder g!
and is appropriately determined depending on the type and amount of flakes.

(Function) In the present invention, by providing a tray to prevent the dust and flakes generated in the film-forming chamber from falling onto the substrate, most of the dust and flakes generated in the film-forming chamber fall onto the tray. Therefore, the amount of dust and flakes adhering to the substrate and conveyance equipment can be significantly reduced compared to the conventional method.Furthermore, by arranging the magnet at the bottom of the tray, dust and flakes can easily collect at the bottom of the tray. The amount of dust and flakes coagulated and captured by the magnet can be increased over a longer period of time.

〔Example〕

An embodiment of the present invention will be described with reference to FIG.

This device has a structure in which targets 7a and 7b are sputtered from the left and right sides of a can 5 in a vacuum film forming chamber 1.
is sent from the delivery roll 2 to the can 5 via the guide rolls 4a and 4b, and a magnetic thin film is formed by sputtering using the targets 7a and 7b.
d and then wound onto a take-up roll 3. Dust generated during sputtering spreads within the vacuum film forming apparatus.

An anti-adhesion plate 6 is installed above the can 5 to prevent dust and flakes from falling and adhering to the substrate 9 and the can 5 from the ceiling surface of the vacuum film forming chamber.

Further, in this embodiment, as shown in the figure (by installing the receiving tray 8), it is possible to prevent dust and flakes from adhering to the substrate.

Also, a magnet 10 was placed close to the bottom of the saucer to coagulate and fix the dust and flakes collected at the bottom of the saucer.

Since most of the dust and flakes can be captured by this catcher I, the amount of dust that passes through the gap between the catcher 8 and the can 5 and adheres to the base 9 is significantly reduced.

〔Effect of the invention〕

By providing a tray to prevent the dust generated in the film forming chamber of the present invention from falling onto the substrate, and by arranging a magnet at the bottom of the tray, quality deterioration due to dust and flakes adhering to the substrate can be prevented. This has enabled long-term operation of magnetic recording media manufacturing equipment and improved productivity.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of an embodiment of a magnetic recording medium manufacturing apparatus according to the present invention. 1... Vacuum film forming chamber 2... Delivery roll 3... Take-up roll 5... Can 6... Anti-adhesion plates 7a, 7b... Target 8... Receiver 9... Substrate 10.11... Magnet

Claims (2)

[Claims] (1) Manufacture of a magnetic recording medium in an apparatus for manufacturing a magnetic recording medium by forming a magnetic thin film on a substrate to be transported in a vacuum, characterized in that one or more trays are disposed in the apparatus. Device. (2) The apparatus for manufacturing a magnetic recording medium according to claim 1, wherein a magnet is disposed at the bottom of the saucer.