JPS63185223U - - Google Patents
Info
- Publication number
- JPS63185223U JPS63185223U JP7553487U JP7553487U JPS63185223U JP S63185223 U JPS63185223 U JP S63185223U JP 7553487 U JP7553487 U JP 7553487U JP 7553487 U JP7553487 U JP 7553487U JP S63185223 U JPS63185223 U JP S63185223U
- Authority
- JP
- Japan
- Prior art keywords
- support plates
- wafer boat
- heat treatment
- treatment equipment
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7553487U JPS63185223U (enExample) | 1987-05-20 | 1987-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7553487U JPS63185223U (enExample) | 1987-05-20 | 1987-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185223U true JPS63185223U (enExample) | 1988-11-29 |
Family
ID=30921766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7553487U Pending JPS63185223U (enExample) | 1987-05-20 | 1987-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185223U (enExample) |
-
1987
- 1987-05-20 JP JP7553487U patent/JPS63185223U/ja active Pending
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