JPS63183275U - - Google Patents

Info

Publication number
JPS63183275U
JPS63183275U JP7475287U JP7475287U JPS63183275U JP S63183275 U JPS63183275 U JP S63183275U JP 7475287 U JP7475287 U JP 7475287U JP 7475287 U JP7475287 U JP 7475287U JP S63183275 U JPS63183275 U JP S63183275U
Authority
JP
Japan
Prior art keywords
liquid phase
phase epitaxial
epitaxial growth
chamber
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7475287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7475287U priority Critical patent/JPS63183275U/ja
Publication of JPS63183275U publication Critical patent/JPS63183275U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP7475287U 1987-05-19 1987-05-19 Pending JPS63183275U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7475287U JPS63183275U (enrdf_load_stackoverflow) 1987-05-19 1987-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7475287U JPS63183275U (enrdf_load_stackoverflow) 1987-05-19 1987-05-19

Publications (1)

Publication Number Publication Date
JPS63183275U true JPS63183275U (enrdf_load_stackoverflow) 1988-11-25

Family

ID=30920260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7475287U Pending JPS63183275U (enrdf_load_stackoverflow) 1987-05-19 1987-05-19

Country Status (1)

Country Link
JP (1) JPS63183275U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6051695A (ja) * 1983-08-29 1985-03-23 Hitachi Cable Ltd 液相エピタキシャル結晶成長方法とその装置
JPS6131385A (ja) * 1984-07-23 1986-02-13 Showa Denko Kk 液相エピタキシヤル成長方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6051695A (ja) * 1983-08-29 1985-03-23 Hitachi Cable Ltd 液相エピタキシャル結晶成長方法とその装置
JPS6131385A (ja) * 1984-07-23 1986-02-13 Showa Denko Kk 液相エピタキシヤル成長方法

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