JPS63183267U - - Google Patents
Info
- Publication number
- JPS63183267U JPS63183267U JP7329287U JP7329287U JPS63183267U JP S63183267 U JPS63183267 U JP S63183267U JP 7329287 U JP7329287 U JP 7329287U JP 7329287 U JP7329287 U JP 7329287U JP S63183267 U JPS63183267 U JP S63183267U
- Authority
- JP
- Japan
- Prior art keywords
- chemical conversion
- semiconductor wafer
- head
- chemical
- corrosion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000007797 corrosion Effects 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000007743 anodising Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Landscapes
- Chemical Treatment Of Metals (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329287U JPH0713213Y2 (ja) | 1987-05-15 | 1987-05-15 | 化成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329287U JPH0713213Y2 (ja) | 1987-05-15 | 1987-05-15 | 化成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63183267U true JPS63183267U (enExample) | 1988-11-25 |
| JPH0713213Y2 JPH0713213Y2 (ja) | 1995-03-29 |
Family
ID=30917498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7329287U Expired - Lifetime JPH0713213Y2 (ja) | 1987-05-15 | 1987-05-15 | 化成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713213Y2 (enExample) |
-
1987
- 1987-05-15 JP JP7329287U patent/JPH0713213Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0713213Y2 (ja) | 1995-03-29 |