JPS63182849U - - Google Patents
Info
- Publication number
- JPS63182849U JPS63182849U JP1732987U JP1732987U JPS63182849U JP S63182849 U JPS63182849 U JP S63182849U JP 1732987 U JP1732987 U JP 1732987U JP 1732987 U JP1732987 U JP 1732987U JP S63182849 U JPS63182849 U JP S63182849U
- Authority
- JP
- Japan
- Prior art keywords
- respect
- orientation flat
- thickness
- semiconductor substrate
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1732987U JPS63182849U (enExample) | 1987-02-09 | 1987-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1732987U JPS63182849U (enExample) | 1987-02-09 | 1987-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63182849U true JPS63182849U (enExample) | 1988-11-25 |
Family
ID=30809990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1732987U Pending JPS63182849U (enExample) | 1987-02-09 | 1987-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63182849U (enExample) |
-
1987
- 1987-02-09 JP JP1732987U patent/JPS63182849U/ja active Pending