JPS63180921U - - Google Patents
Info
- Publication number
- JPS63180921U JPS63180921U JP7149587U JP7149587U JPS63180921U JP S63180921 U JPS63180921 U JP S63180921U JP 7149587 U JP7149587 U JP 7149587U JP 7149587 U JP7149587 U JP 7149587U JP S63180921 U JPS63180921 U JP S63180921U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- epitaxial growth
- disk
- taper
- frequency induction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006698 induction Effects 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7149587U JPS63180921U (zh) | 1987-05-13 | 1987-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7149587U JPS63180921U (zh) | 1987-05-13 | 1987-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63180921U true JPS63180921U (zh) | 1988-11-22 |
Family
ID=30914102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7149587U Pending JPS63180921U (zh) | 1987-05-13 | 1987-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63180921U (zh) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52136573A (en) * | 1976-05-10 | 1977-11-15 | Matsushita Electronics Corp | Cvd apparatus |
| JPS6058613A (ja) * | 1983-09-12 | 1985-04-04 | Hitachi Ltd | エピタキシャル装置 |
-
1987
- 1987-05-13 JP JP7149587U patent/JPS63180921U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52136573A (en) * | 1976-05-10 | 1977-11-15 | Matsushita Electronics Corp | Cvd apparatus |
| JPS6058613A (ja) * | 1983-09-12 | 1985-04-04 | Hitachi Ltd | エピタキシャル装置 |