JPH02101529U - - Google Patents

Info

Publication number
JPH02101529U
JPH02101529U JP870389U JP870389U JPH02101529U JP H02101529 U JPH02101529 U JP H02101529U JP 870389 U JP870389 U JP 870389U JP 870389 U JP870389 U JP 870389U JP H02101529 U JPH02101529 U JP H02101529U
Authority
JP
Japan
Prior art keywords
vapor phase
reaction tube
phase growth
bulges
barrel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP870389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP870389U priority Critical patent/JPH02101529U/ja
Publication of JPH02101529U publication Critical patent/JPH02101529U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP870389U 1989-01-27 1989-01-27 Pending JPH02101529U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP870389U JPH02101529U (zh) 1989-01-27 1989-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP870389U JPH02101529U (zh) 1989-01-27 1989-01-27

Publications (1)

Publication Number Publication Date
JPH02101529U true JPH02101529U (zh) 1990-08-13

Family

ID=31214813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP870389U Pending JPH02101529U (zh) 1989-01-27 1989-01-27

Country Status (1)

Country Link
JP (1) JPH02101529U (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62212295A (ja) * 1986-03-12 1987-09-18 Toshiba Corp 気相成長装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62212295A (ja) * 1986-03-12 1987-09-18 Toshiba Corp 気相成長装置

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