JPS63179060A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPS63179060A
JPS63179060A JP903887A JP903887A JPS63179060A JP S63179060 A JPS63179060 A JP S63179060A JP 903887 A JP903887 A JP 903887A JP 903887 A JP903887 A JP 903887A JP S63179060 A JPS63179060 A JP S63179060A
Authority
JP
Japan
Prior art keywords
thin film
substrate
electrode
generation source
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP903887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543783B2 (forum.php
Inventor
Hiromoto Ito
弘基 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP903887A priority Critical patent/JPS63179060A/ja
Publication of JPS63179060A publication Critical patent/JPS63179060A/ja
Publication of JPH0543783B2 publication Critical patent/JPH0543783B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP903887A 1987-01-20 1987-01-20 薄膜形成装置 Granted JPS63179060A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP903887A JPS63179060A (ja) 1987-01-20 1987-01-20 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP903887A JPS63179060A (ja) 1987-01-20 1987-01-20 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS63179060A true JPS63179060A (ja) 1988-07-23
JPH0543783B2 JPH0543783B2 (forum.php) 1993-07-02

Family

ID=11709479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP903887A Granted JPS63179060A (ja) 1987-01-20 1987-01-20 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS63179060A (forum.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5100526A (en) * 1990-06-18 1992-03-31 Mitsubishi Denki Kabushiki Kaisha Apparatus for forming thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5100526A (en) * 1990-06-18 1992-03-31 Mitsubishi Denki Kabushiki Kaisha Apparatus for forming thin film

Also Published As

Publication number Publication date
JPH0543783B2 (forum.php) 1993-07-02

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