JPS63178320U - - Google Patents
Info
- Publication number
- JPS63178320U JPS63178320U JP6910987U JP6910987U JPS63178320U JP S63178320 U JPS63178320 U JP S63178320U JP 6910987 U JP6910987 U JP 6910987U JP 6910987 U JP6910987 U JP 6910987U JP S63178320 U JPS63178320 U JP S63178320U
- Authority
- JP
- Japan
- Prior art keywords
- lens
- sample surface
- movable stage
- air density
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6910987U JPS63178320U (sv) | 1987-05-09 | 1987-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6910987U JPS63178320U (sv) | 1987-05-09 | 1987-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63178320U true JPS63178320U (sv) | 1988-11-18 |
Family
ID=30909530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6910987U Pending JPS63178320U (sv) | 1987-05-09 | 1987-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63178320U (sv) |
-
1987
- 1987-05-09 JP JP6910987U patent/JPS63178320U/ja active Pending