JPS63177960U - - Google Patents
Info
- Publication number
- JPS63177960U JPS63177960U JP6763387U JP6763387U JPS63177960U JP S63177960 U JPS63177960 U JP S63177960U JP 6763387 U JP6763387 U JP 6763387U JP 6763387 U JP6763387 U JP 6763387U JP S63177960 U JPS63177960 U JP S63177960U
- Authority
- JP
- Japan
- Prior art keywords
- crystal growth
- epitaxial crystal
- growth apparatus
- cassette
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 3
- 239000007791 liquid phase Substances 0.000 claims 1
- 230000005484 gravity Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6763387U JPS63177960U (enExample) | 1987-05-06 | 1987-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6763387U JPS63177960U (enExample) | 1987-05-06 | 1987-05-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177960U true JPS63177960U (enExample) | 1988-11-17 |
Family
ID=30906717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6763387U Pending JPS63177960U (enExample) | 1987-05-06 | 1987-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177960U (enExample) |
-
1987
- 1987-05-06 JP JP6763387U patent/JPS63177960U/ja active Pending
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