JPS63177956U - - Google Patents
Info
- Publication number
- JPS63177956U JPS63177956U JP6702987U JP6702987U JPS63177956U JP S63177956 U JPS63177956 U JP S63177956U JP 6702987 U JP6702987 U JP 6702987U JP 6702987 U JP6702987 U JP 6702987U JP S63177956 U JPS63177956 U JP S63177956U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- sample
- door
- forming container
- taking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6702987U JPS63177956U (enExample) | 1987-05-02 | 1987-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6702987U JPS63177956U (enExample) | 1987-05-02 | 1987-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177956U true JPS63177956U (enExample) | 1988-11-17 |
Family
ID=30905569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6702987U Pending JPS63177956U (enExample) | 1987-05-02 | 1987-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177956U (enExample) |
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1987
- 1987-05-02 JP JP6702987U patent/JPS63177956U/ja active Pending