JPS63177049U - - Google Patents

Info

Publication number
JPS63177049U
JPS63177049U JP6789687U JP6789687U JPS63177049U JP S63177049 U JPS63177049 U JP S63177049U JP 6789687 U JP6789687 U JP 6789687U JP 6789687 U JP6789687 U JP 6789687U JP S63177049 U JPS63177049 U JP S63177049U
Authority
JP
Japan
Prior art keywords
wafer
chuck
ventilation pipe
pore
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6789687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6789687U priority Critical patent/JPS63177049U/ja
Publication of JPS63177049U publication Critical patent/JPS63177049U/ja
Pending legal-status Critical Current

Links

JP6789687U 1987-05-08 1987-05-08 Pending JPS63177049U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6789687U JPS63177049U (ko) 1987-05-08 1987-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6789687U JPS63177049U (ko) 1987-05-08 1987-05-08

Publications (1)

Publication Number Publication Date
JPS63177049U true JPS63177049U (ko) 1988-11-16

Family

ID=30907216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6789687U Pending JPS63177049U (ko) 1987-05-08 1987-05-08

Country Status (1)

Country Link
JP (1) JPS63177049U (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017550A (ja) * 2001-06-27 2003-01-17 Shin Sti Technology Kk 基板固定用チャックおよびこのチャックからの基板剥離方法
JP2007274003A (ja) * 2002-11-15 2007-10-18 Ebara Corp 基板保持装置、基板処理装置及び基板保持装置への基板着脱方法
JP2009290006A (ja) * 2008-05-29 2009-12-10 Lintec Corp 半導体ウエハの搬送装置及び搬送方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017550A (ja) * 2001-06-27 2003-01-17 Shin Sti Technology Kk 基板固定用チャックおよびこのチャックからの基板剥離方法
JP4681763B2 (ja) * 2001-06-27 2011-05-11 住友化学株式会社 基板固定用チャックおよびこのチャックからの基板剥離方法
JP2007274003A (ja) * 2002-11-15 2007-10-18 Ebara Corp 基板保持装置、基板処理装置及び基板保持装置への基板着脱方法
JP2009290006A (ja) * 2008-05-29 2009-12-10 Lintec Corp 半導体ウエハの搬送装置及び搬送方法

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