JPS63177049U - - Google Patents
Info
- Publication number
- JPS63177049U JPS63177049U JP6789687U JP6789687U JPS63177049U JP S63177049 U JPS63177049 U JP S63177049U JP 6789687 U JP6789687 U JP 6789687U JP 6789687 U JP6789687 U JP 6789687U JP S63177049 U JPS63177049 U JP S63177049U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chuck
- ventilation pipe
- pore
- pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011148 porous material Substances 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000002441 reversible effect Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6789687U JPS63177049U (de) | 1987-05-08 | 1987-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6789687U JPS63177049U (de) | 1987-05-08 | 1987-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177049U true JPS63177049U (de) | 1988-11-16 |
Family
ID=30907216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6789687U Pending JPS63177049U (de) | 1987-05-08 | 1987-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177049U (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003017550A (ja) * | 2001-06-27 | 2003-01-17 | Shin Sti Technology Kk | 基板固定用チャックおよびこのチャックからの基板剥離方法 |
| JP2007274003A (ja) * | 2002-11-15 | 2007-10-18 | Ebara Corp | 基板保持装置、基板処理装置及び基板保持装置への基板着脱方法 |
| JP2009290006A (ja) * | 2008-05-29 | 2009-12-10 | Lintec Corp | 半導体ウエハの搬送装置及び搬送方法 |
-
1987
- 1987-05-08 JP JP6789687U patent/JPS63177049U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003017550A (ja) * | 2001-06-27 | 2003-01-17 | Shin Sti Technology Kk | 基板固定用チャックおよびこのチャックからの基板剥離方法 |
| JP4681763B2 (ja) * | 2001-06-27 | 2011-05-11 | 住友化学株式会社 | 基板固定用チャックおよびこのチャックからの基板剥離方法 |
| JP2007274003A (ja) * | 2002-11-15 | 2007-10-18 | Ebara Corp | 基板保持装置、基板処理装置及び基板保持装置への基板着脱方法 |
| JP2009290006A (ja) * | 2008-05-29 | 2009-12-10 | Lintec Corp | 半導体ウエハの搬送装置及び搬送方法 |
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