JPS63177035U - - Google Patents
Info
- Publication number
- JPS63177035U JPS63177035U JP6652787U JP6652787U JPS63177035U JP S63177035 U JPS63177035 U JP S63177035U JP 6652787 U JP6652787 U JP 6652787U JP 6652787 U JP6652787 U JP 6652787U JP S63177035 U JPS63177035 U JP S63177035U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- film
- view
- films
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
- 230000002265 prevention Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6652787U JPH0635467Y2 (ja) | 1987-04-30 | 1987-04-30 | 縦型ｃｖｄ装置用石英製ウェ−ハホルダ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6652787U JPH0635467Y2 (ja) | 1987-04-30 | 1987-04-30 | 縦型ｃｖｄ装置用石英製ウェ−ハホルダ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63177035U true JPS63177035U (el) | 1988-11-16 |
| JPH0635467Y2 JPH0635467Y2 (ja) | 1994-09-14 |
Family
ID=30904615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6652787U Expired - Lifetime JPH0635467Y2 (ja) | 1987-04-30 | 1987-04-30 | 縦型ｃｖｄ装置用石英製ウェ−ハホルダ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635467Y2 (el) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09186227A (ja) * | 1995-12-14 | 1997-07-15 | Cvd Inc | 半導体ウエファ支持用サセプタ |
| JP2009267422A (ja) * | 2005-07-29 | 2009-11-12 | Nuflare Technology Inc | 気相成長装置及び気相成長方法 |
| JP2010258288A (ja) * | 2009-04-27 | 2010-11-11 | Sanyo Electric Co Ltd | 固定治具およびそれを用いた半導体装置の製造方法 |
| JP2014060403A (ja) * | 2013-09-24 | 2014-04-03 | Kokusai Electric Semiconductor Service Inc | 基板保持具及びウェーハ支持方法 |
-
1987
- 1987-04-30 JP JP6652787U patent/JPH0635467Y2/ja not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09186227A (ja) * | 1995-12-14 | 1997-07-15 | Cvd Inc | 半導体ウエファ支持用サセプタ |
| JP2009267422A (ja) * | 2005-07-29 | 2009-11-12 | Nuflare Technology Inc | 気相成長装置及び気相成長方法 |
| JP2010258288A (ja) * | 2009-04-27 | 2010-11-11 | Sanyo Electric Co Ltd | 固定治具およびそれを用いた半導体装置の製造方法 |
| JP2014060403A (ja) * | 2013-09-24 | 2014-04-03 | Kokusai Electric Semiconductor Service Inc | 基板保持具及びウェーハ支持方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635467Y2 (ja) | 1994-09-14 |