JPS63175313A - Impregnated cathode and its manufacture - Google Patents
Impregnated cathode and its manufactureInfo
- Publication number
- JPS63175313A JPS63175313A JP62007795A JP779587A JPS63175313A JP S63175313 A JPS63175313 A JP S63175313A JP 62007795 A JP62007795 A JP 62007795A JP 779587 A JP779587 A JP 779587A JP S63175313 A JPS63175313 A JP S63175313A
- Authority
- JP
- Japan
- Prior art keywords
- particles
- tungsten
- oxide
- iridium
- impregnated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 36
- 239000002245 particle Substances 0.000 claims abstract description 33
- 229910052741 iridium Inorganic materials 0.000 claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 19
- 229910000765 intermetallic Inorganic materials 0.000 claims abstract description 12
- 229910052762 osmium Inorganic materials 0.000 claims abstract description 12
- 229910052702 rhenium Inorganic materials 0.000 claims abstract description 9
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 7
- 239000011148 porous material Substances 0.000 claims abstract description 6
- 239000000843 powder Substances 0.000 claims abstract description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 37
- 239000010937 tungsten Substances 0.000 claims description 34
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 25
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 10
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 10
- 229910052707 ruthenium Inorganic materials 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 7
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 claims description 6
- 238000005245 sintering Methods 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 239000000470 constituent Substances 0.000 claims description 2
- HJGMWXTVGKLUAQ-UHFFFAOYSA-N oxygen(2-);scandium(3+) Chemical class [O-2].[O-2].[O-2].[Sc+3].[Sc+3] HJGMWXTVGKLUAQ-UHFFFAOYSA-N 0.000 claims description 2
- 238000010298 pulverizing process Methods 0.000 claims description 2
- 229910052788 barium Inorganic materials 0.000 abstract description 10
- 229910052791 calcium Inorganic materials 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 229910052765 Lutetium Inorganic materials 0.000 abstract 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract 2
- 239000004615 ingredient Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 229910052706 scandium Inorganic materials 0.000 abstract 1
- 229910052711 selenium Inorganic materials 0.000 abstract 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 9
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 4
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 2
- 235000012255 calcium oxide Nutrition 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Solid Thermionic Cathode (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は進行波管、クロイストロン、マグネトロン等の
電子管用陰極およびその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cathode for an electron tube such as a traveling wave tube, a cloistron, or a magnetron, and a method for manufacturing the same.
活性酸化物質、特に酸化バリウムを含む多孔性の金属基
体より成る含浸型陰極が長い間知られてきた。これは長
年の研究開発の結果、タングステンの多孔性金属に酸化
バリウム、酸化アルミニウム、酸化カルシウムを含浸さ
せたカソードとして実用化されている。この陰極の場合
ICl112当りIA以上の電子放出が可能となってお
り現在はさらに多くの電子放出が可能な陰極の開発が進
められている。その−例として米国海軍の開発研究所の
実験によりタングステンとイリジウムの混合金属を基体
とする陰極は、有望な結果を示したという、タングステ
ンとイリジウムによって金属多孔体を形成する工程にお
いて、金属間化合物が形成される。この金属間化合物単
独では、バリウムとの反応による熱電子生成量は、タン
グステンとバリウムとによる生成量に比べ、はるかに少
ないものである。しかし、金属間化合物がタングステン
、バリウムと共に存在する場合においては、タングステ
ンとバリウムとによる生成量を数倍上まわる熱電子生成
量が得られることは一般的に知られている。この最適値
はタングステンとイリジウム比が4=1の時である。し
かし実際の試作においては、金属多孔体形成時の加熱に
より第6図に示すように焼結が進み、金属多孔体のバリ
ウム等の入る空間が減少してしまい、良好な結果が得ら
れなかった。実験において最も良い場合でもタングステ
ン、イリジウム比20:1の時で、タングステンのみの
場合に比べ数十パーセント増にとどまっていた。それ故
に金属間化合物の形成量及び形成面積の制御が必要不可
欠となり、その−例として金属多孔体の形成工程におい
てまず、タングステン粒子の集合体を作りこれとイリジ
ウムとを混合形成する方法が発表されている(特開昭5
3−13348参照)。Impregnated cathodes consisting of porous metal substrates containing active oxidants, in particular barium oxide, have long been known. As a result of many years of research and development, this cathode has been put into practical use as a porous tungsten metal impregnated with barium oxide, aluminum oxide, and calcium oxide. This cathode is capable of emitting more than IA of electrons per 112 ICl, and development of cathodes capable of emitting even more electrons is currently underway. For example, experiments at the U.S. Navy's research laboratory have shown that a cathode based on a mixed metal of tungsten and iridium has shown promising results. is formed. When this intermetallic compound is used alone, the amount of thermionic electrons produced by the reaction with barium is much smaller than that produced by tungsten and barium. However, it is generally known that when an intermetallic compound exists together with tungsten and barium, the amount of thermionic electrons produced is several times higher than the amount produced by tungsten and barium. The optimum value is when the tungsten to iridium ratio is 4=1. However, in the actual prototype, sintering progressed due to heating during the formation of the porous metal body, as shown in Figure 6, and the space in the porous metal body for barium etc. was reduced, and good results could not be obtained. . In experiments, even in the best case, when the ratio of tungsten to iridium was 20:1, the increase was only several tens of percent compared to the case of using only tungsten. Therefore, it is essential to control the amount and area of intermetallic compounds formed.For example, in the process of forming a porous metal body, a method has been announced in which an aggregate of tungsten particles is first formed and iridium is mixed with the aggregate. (Unexamined Japanese Patent Publication No. 5
3-13348).
上述した従来の含浸型陰極では有効な金属多孔体を必要
とするため、金属多孔体形成工程において、充分高温に
加熱することができなかった。Since the conventional impregnated cathode described above requires an effective metal porous body, it was not possible to heat the cathode to a sufficiently high temperature in the process of forming the metal porous body.
又、そのため各混合物質は第5図に示すように゛充分拡
散することができず、本来の熱電子陰極の性能を充分発
揮するまでにはいたらなかった。Moreover, as a result, each mixed substance could not be sufficiently diffused as shown in FIG. 5, and the original performance of the thermionic cathode could not be fully exhibited.
含浸型陰極が充分な性質を発揮するには、オスミウム、
イリジウム、ルテニウム等がタングステンに拡散した面
とタングステンのままの面を必要とする。しかし、オス
ミウム、イリジウム、ルテニウム等を充分拡散するまで
加熱すれば、第6図に示すように焼結が進みすぎ、アル
ミニウム、バリウム、カルシウムの酸化物が含浸される
空間が減少してしまうという欠点があった。又、オスミ
ウム、イリジウム、ルテニウム等の混合物質の拡散の度
合いは加温温度時間等により制御されるが、粒子形状及
び粒子表面の酸化及び汚染の状態のバラツキにより良好
な再現性を得ることが困難であるという欠点があった。In order for an impregnated cathode to exhibit sufficient properties, osmium,
It requires a surface in which iridium, ruthenium, etc. are diffused into tungsten, and a surface in which tungsten remains. However, if osmium, iridium, ruthenium, etc. are heated until they are sufficiently diffused, sintering will proceed too much as shown in Figure 6, and the space in which aluminum, barium, and calcium oxides can be impregnated will decrease. was there. In addition, the degree of diffusion of mixed substances such as osmium, iridium, and ruthenium is controlled by heating temperature and time, but it is difficult to obtain good reproducibility due to variations in particle shape and oxidation and contamination state on the particle surface. It had the disadvantage of being.
本発明はオスミウム、イリジウム、ルテニウム、レニウ
ムおよびスカンジウム酸化物の少なくとも1つの物質と
タングステンとを構成要素として有する金属多孔体から
なり、この金属多孔体の細孔はアルミニウムと少なくと
も1つのアルカリ土類元素を有する酸化物によってほぼ
充満されている含浸型陰極において、金属多孔体構成粒
子がタングスン粒子と、タングステン粒子表面にオスミ
ウム、イリジウム、ルテニウム、レニウムおよびスカン
ジウム酸化物の少なくとも1つの物質で被覆した粒子と
からなるか、またはタングステン粒子と、タングステン
とオスミウム1.イリジウム、ルテニウム、レニウム及
びスカンジウム酸化物の少なくとも1つの物質との金属
間化合物からなる粒子とからなることを特徴とする。ま
た本発明によれば、タングステン粒子と、オスミウム。The present invention comprises a porous metal body containing at least one of osmium, iridium, ruthenium, rhenium, and scandium oxides and tungsten as constituent elements, and the pores of the porous metal body contain aluminum and at least one alkaline earth element. In an impregnated cathode that is almost filled with an oxide having or tungsten particles, tungsten and osmium1. It is characterized by comprising particles made of an intermetallic compound with at least one substance of iridium, ruthenium, rhenium, and scandium oxide. Also according to the invention, tungsten particles and osmium.
イリジウム、ルテニウム、レニウム及びスカンジウム酸
化物の少なくとも1つの物質を混合し焼結する工程と、
焼結体を粉砕する工程と、粉砕した粉末と、タングステ
ン粉末を混合焼結する工程とを含む含浸型陰極の製造方
法が得られる。mixing and sintering at least one substance of iridium, ruthenium, rhenium and scandium oxide;
A method for manufacturing an impregnated cathode is obtained, which includes a step of pulverizing a sintered body, and a step of mixing and sintering the pulverized powder and tungsten powder.
次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第1図は本発明の一実施例の含浸型陰極の断面図を示す
。1はタングステン粒子、2は金属間化合物が被覆した
粒子、3は酸化物である。製法は、まず、粒径が5ない
し20ミクロンのタングステンとイリジウムを混合する
。その比率は、イリジウムが全体の45パーセント以下
、実質的に約20%とする。これを約1900℃で10
分間以上焼成し粉砕する0粒径は10ないし20ミクロ
ンとする。これによりタングステンとイリジウムとの金
属間化合物に被覆されたタングステン粒子を得る。この
イリジウム被覆タングステン粒子2とタングステン粒子
1を1:4の配合比で混合し加圧成形した後1750℃
で10分間焼結する。こうしてできた金属多孔体に、4
対1対1で混合したバリウム、アルミニウム、カルシウ
ムそれぞれの酸化物3を1750℃で含浸する。表面処
理をした含浸型陰極の縦断面図が第1図に示されており
、またこの拡大図を第2図に示す。FIG. 1 shows a sectional view of an impregnated cathode according to an embodiment of the present invention. 1 is a tungsten particle, 2 is a particle coated with an intermetallic compound, and 3 is an oxide. In the manufacturing method, first, tungsten and iridium having a particle size of 5 to 20 microns are mixed. The proportion of iridium is 45% or less, substantially about 20% of the total. This was heated to about 1900℃ for 10
The particle size to be fired and crushed for more than a minute is 10 to 20 microns. As a result, tungsten particles coated with an intermetallic compound of tungsten and iridium are obtained. After mixing the iridium-coated tungsten particles 2 and tungsten particles 1 at a mixing ratio of 1:4 and press-molding the mixture, the mixture was heated to 1750°C.
Sinter for 10 minutes. In the metal porous body made in this way, 4
It is impregnated with oxides 3 of barium, aluminum, and calcium mixed in a 1:1 ratio at 1750°C. A longitudinal cross-sectional view of a surface-treated impregnated cathode is shown in FIG. 1, and an enlarged view thereof is shown in FIG.
次に、別の実施例を示す。タングステンとイリジウムを
重量比で55対45に混合し3000℃で溶解する。こ
うしてできたインゴットを粉砕し10ないし20ミクロ
ンの粉末とする。この粉砕した金属間化合物粉末6とタ
ングステン粉末1を1対4の割合で混合し加圧成形した
後1750℃で10分間焼成する。こうしてできた金属
多孔体に、バリウム等の酸化物3を含浸させ表面処理し
て含浸型陰極を得る。この陰極の縦断面図が第3図であ
る。また、第4図は第3図の拡大図を示す、なお、上記
実施例ではタングステンとイリジウムを混合する場合に
ついて説明したが、これに限らず、タングステンとオス
ミウム、ルテニウム、レニウム、スカンジウム酸化物と
を混合しても同様の構造の金属多孔体を得ることができ
る。Next, another example will be shown. Tungsten and iridium are mixed at a weight ratio of 55:45 and melted at 3000°C. The ingot thus produced is ground into a powder of 10 to 20 microns. The pulverized intermetallic compound powder 6 and tungsten powder 1 were mixed in a ratio of 1:4, pressure-molded, and then fired at 1750° C. for 10 minutes. The metal porous body thus produced is impregnated with an oxide 3 such as barium and subjected to surface treatment to obtain an impregnated cathode. FIG. 3 is a longitudinal sectional view of this cathode. In addition, FIG. 4 shows an enlarged view of FIG. 3. Although the above embodiment describes the case where tungsten and iridium are mixed, the invention is not limited to this. A porous metal body with a similar structure can be obtained by mixing the two.
本発明を示す第2図、第3図と従来例の第5図、第6図
とを比較すれば明らかな様に、本発明により有効孔を確
保しながらもタングステンにオスミウム、イリジウム等
が拡散した表面及びタングステンのみの表面が任意の割
合で露出した理想的な金属多孔体を再現性よく得られる
効果がある。As is clear from a comparison between Figures 2 and 3 showing the present invention and Figures 5 and 6 showing the conventional example, the present invention allows osmium, iridium, etc. to diffuse into tungsten while ensuring effective pores. This method has the effect of obtaining an ideal porous metal body with a desired proportion of the exposed surface and the surface of only tungsten with good reproducibility.
第1図は本発明の含浸型陰極の一実施例の断面図、第2
図は第1図の拡大図、第3図は本発明の他の実施例の断
面図、第4図は第3図の拡大図、第5図および第6図は
従来の含浸型陰極の断面拡大図である。
1・・・タングステン粒子、2・・・タングステン粒子
表面にイリジウムとの金属間化合物が被覆した粒子、3
・・・アルミニウム、バリウム、カルシウム等の酸化物
、4,6・・・タングステンとイリジウムの金属間化合
物、5・・・タングステン、7・・・イリジウム粒子、
8・・・イリジウム。Fig. 1 is a sectional view of one embodiment of the impregnated cathode of the present invention, Fig.
The figure is an enlarged view of Fig. 1, Fig. 3 is a sectional view of another embodiment of the present invention, Fig. 4 is an enlarged view of Fig. 3, and Figs. 5 and 6 are cross sections of a conventional impregnated cathode. It is an enlarged view. 1... Tungsten particles, 2... Particles whose surfaces are coated with an intermetallic compound with iridium, 3
... Oxides of aluminum, barium, calcium, etc., 4,6... Intermetallic compounds of tungsten and iridium, 5... Tungsten, 7... Iridium particles,
8...Iridium.
Claims (3)
及びスカンジウム酸化物の少なくとも1つの物質とタン
グステンとを構成要素として有する金属多孔体からなり
、この金属多孔体の細孔はアルミニウムと少なくとも1
つのアルカリ土類元素を有する酸化物によってほぼ充満
されている含浸型陰極において、金属多孔体構成粒子が
タングスン粒子と、タングステン粒子表面にオスミウム
、イリジウム、ルテニウム、レニウムおよびスカンジウ
ム酸化物の少なくとも1つの物質で被覆した粒子とから
なることを特徴とする含浸型陰極。(1) A porous metal body containing at least one substance of osmium, iridium, ruthenium, rhenium, and scandium oxide and tungsten as constituent elements, and the pores of this metal porous body are composed of aluminum and at least one substance of scandium oxide.
In an impregnated cathode that is almost filled with an oxide containing two alkaline earth elements, the particles constituting the metal porous body are tungsten particles, and at least one substance of osmium, iridium, ruthenium, rhenium, and scandium oxide is present on the surface of the tungsten particles. An impregnated cathode characterized by comprising particles coated with.
グステンとオスミウム、イリジウム、ルテニウム、レニ
ウム及びスカンジウム酸化物の少なくとも1つの物質と
の金属間化合物からなる粒子とから構成される特許請求
の範囲第1項記載の含浸型陰極。(2) The first claim in which the particles constituting the metal porous body are composed of tungsten particles and particles made of an intermetallic compound of tungsten and at least one substance of osmium, iridium, ruthenium, rhenium, and scandium oxide. Impregnated cathode as described in section.
ルテニウム、レニウム及びスカンジウム酸化物の少なく
とも1つの物質を混合し焼結する工程と、焼結体を粉砕
する工程と、粉砕した粉末とタングステン粉末を混合焼
結する工程とを有することを特徴とする含浸型陰極の製
造方法。(3) Tungsten particles, osmium, iridium,
It is characterized by comprising the steps of mixing and sintering at least one substance of ruthenium, rhenium and scandium oxides, pulverizing the sintered body, and mixing and sintering the pulverized powder and tungsten powder. Method for manufacturing an impregnated cathode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62007795A JPS63175313A (en) | 1987-01-14 | 1987-01-14 | Impregnated cathode and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62007795A JPS63175313A (en) | 1987-01-14 | 1987-01-14 | Impregnated cathode and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63175313A true JPS63175313A (en) | 1988-07-19 |
Family
ID=11675579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62007795A Pending JPS63175313A (en) | 1987-01-14 | 1987-01-14 | Impregnated cathode and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63175313A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4895462A (en) * | 1987-08-17 | 1990-01-23 | Nippon Seiko Kabushiki Kaisha | Bearing assembly |
JPH0785782A (en) * | 1990-02-09 | 1995-03-31 | Thomson Tubes Electron | Impregnation-type-cathode manufacturing method, and cathode obtained thereby |
-
1987
- 1987-01-14 JP JP62007795A patent/JPS63175313A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4895462A (en) * | 1987-08-17 | 1990-01-23 | Nippon Seiko Kabushiki Kaisha | Bearing assembly |
JPH0785782A (en) * | 1990-02-09 | 1995-03-31 | Thomson Tubes Electron | Impregnation-type-cathode manufacturing method, and cathode obtained thereby |
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