JPS63172586U - - Google Patents

Info

Publication number
JPS63172586U
JPS63172586U JP6411287U JP6411287U JPS63172586U JP S63172586 U JPS63172586 U JP S63172586U JP 6411287 U JP6411287 U JP 6411287U JP 6411287 U JP6411287 U JP 6411287U JP S63172586 U JPS63172586 U JP S63172586U
Authority
JP
Japan
Prior art keywords
suction port
vacuum suction
expands
comes
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6411287U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6411287U priority Critical patent/JPS63172586U/ja
Publication of JPS63172586U publication Critical patent/JPS63172586U/ja
Pending legal-status Critical Current

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  • Sheets, Magazines, And Separation Thereof (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の一実施例を示すもので、第1図
はチヤツク本体の縦断面図、第2図はパツトが脹
らんだ状態を示すチヤツク本体の縦断面図、第3
図は吸着状態を示すチヤツク本体の縦断面図、第
4図は全体の斜視図である。 図中、5はチヤツク本体、6は吸着部、8は真
空吸引口、10はパツトを示す。
The drawings show an embodiment of the present invention, and FIG. 1 is a longitudinal sectional view of the chuck body, FIG. 2 is a longitudinal sectional view of the chuck body showing the inflated state, and FIG.
The figure is a longitudinal sectional view of the chuck main body showing the chuck in the adsorbed state, and FIG. 4 is a perspective view of the entire chuck. In the figure, 5 is the chuck body, 6 is the suction part, 8 is the vacuum suction port, and 10 is the pad.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 負圧源に接続される真空吸引口と、この真空吸
引口の周囲に配設され気圧により伸縮して被搬送
物に当接するパツトと、このパツトに気体を供給
する気体供給装置とを具備することを特徴とする
チヤツク装置。
It is equipped with a vacuum suction port connected to a negative pressure source, a part arranged around the vacuum suction port that expands and contracts due to atmospheric pressure and comes into contact with the conveyed object, and a gas supply device that supplies gas to this part. A chuck device characterized by:
JP6411287U 1987-04-30 1987-04-30 Pending JPS63172586U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6411287U JPS63172586U (en) 1987-04-30 1987-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6411287U JPS63172586U (en) 1987-04-30 1987-04-30

Publications (1)

Publication Number Publication Date
JPS63172586U true JPS63172586U (en) 1988-11-09

Family

ID=30899974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6411287U Pending JPS63172586U (en) 1987-04-30 1987-04-30

Country Status (1)

Country Link
JP (1) JPS63172586U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0359190U (en) * 1989-10-12 1991-06-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0359190U (en) * 1989-10-12 1991-06-11

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