JPS63158744U

JPS63158744U -

Info

Publication number: JPS63158744U
Application number: JP5132187U
Authority: JP
Priority date: 1987-04-03
Filing date: 1987-04-03
Publication date: 1988-10-18

Description

[Brief explanation of the drawing]

第１〜５図は本考案に係る真空吸着装置の第１
実施例を示す図であり、第１図はその全体構成図
、第２図はその圧力調整室の部分を示す平面断面
図、第３図はその圧力調整室の部分を示す側面図
、第４図ａ〜ｃは正常な吸着状態の作用を示すそ
の全体構成図、第５図ａ，ｂは吸着ミス状態の作
用を示すその全体構成図、第６図ａ，ｂは本考案
に係る真空吸着装置の第２実施例を示す圧力調整
室の部分の平面断面図、第７図は本考案に係る真
空吸着装置の第３実施例を示す圧力調整室の部分
の平面断面図、第８，９図は本考案に係る真空吸
着装置の第４実施例を示す図であり、第８図はそ
の正面図、第９図はその部分下面図である。２…圧力調整室、３…パツト通路、４…パツト
通路、５…吸着パツト、６…吸着パツト、７…真
空ポンプ、１０…ワーク、１１…ブラダ（容積可
変部材）、１２…ブラダ（容積可変部材）。 Figures 1 to 5 show the first part of the vacuum suction device according to the present invention.
FIG. 1 is a diagram showing the overall configuration of the embodiment, FIG. 2 is a plan sectional view showing the pressure adjustment chamber portion, FIG. 3 is a side view showing the pressure adjustment chamber portion, and FIG. 4 is a side view showing the pressure adjustment chamber portion. Figures a to c are the overall configuration diagrams showing the operation in a normal suction state, Figures 5 a and b are the overall configuration diagrams showing the operation in an incorrect suction state, and Figures 6 a and b are vacuum suction diagrams according to the present invention. FIG. 7 is a plan sectional view of the pressure adjustment chamber portion showing the second embodiment of the device; FIG. 7 is a plan sectional view of the pressure adjustment chamber portion showing the third embodiment of the vacuum adsorption device according to the present invention; The figures show a fourth embodiment of the vacuum suction device according to the present invention, with FIG. 8 being a front view thereof and FIG. 9 being a partial bottom view thereof. 2...Pressure adjustment chamber, 3...Put passage, 4...Put passage, 5...Suction pad, 6...Suction pad, 7...Vacuum pump, 10...Workpiece, 11...Bladder (volume variable member), 12...Bladder (volume variable) Element).

Claims

[Scope of utility model registration request]

A plurality of pad passages are connected to a sealed pressure adjustment chamber, a suction pad is provided at the tip of each pad passage, and the pressure inside the pressure adjustment chamber is suctioned with a vacuum pump to maintain a negative pressure state inside the suction pad. , a vacuum suction device for suctioning and holding a workpiece, characterized in that a variable volume member is provided at the base end of the part passageway and has a closed space that is expandable and contractible and whose volume can be varied within the pressure adjustment chamber. Vacuum suction device.