JPS63170951U - - Google Patents
Info
- Publication number
- JPS63170951U JPS63170951U JP6267787U JP6267787U JPS63170951U JP S63170951 U JPS63170951 U JP S63170951U JP 6267787 U JP6267787 U JP 6267787U JP 6267787 U JP6267787 U JP 6267787U JP S63170951 U JPS63170951 U JP S63170951U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- wafer
- heat treatment
- core tube
- support boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 238000005245 sintering Methods 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062677U JPH0322908Y2 (cs) | 1987-04-27 | 1987-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062677U JPH0322908Y2 (cs) | 1987-04-27 | 1987-04-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170951U true JPS63170951U (cs) | 1988-11-07 |
| JPH0322908Y2 JPH0322908Y2 (cs) | 1991-05-20 |
Family
ID=30897176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987062677U Expired JPH0322908Y2 (cs) | 1987-04-27 | 1987-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322908Y2 (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62109444U (cs) * | 1985-12-26 | 1987-07-13 |
-
1987
- 1987-04-27 JP JP1987062677U patent/JPH0322908Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62109444U (cs) * | 1985-12-26 | 1987-07-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0322908Y2 (cs) | 1991-05-20 |
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