JPS6197832U - - Google Patents
Info
- Publication number
- JPS6197832U JPS6197832U JP18233484U JP18233484U JPS6197832U JP S6197832 U JPS6197832 U JP S6197832U JP 18233484 U JP18233484 U JP 18233484U JP 18233484 U JP18233484 U JP 18233484U JP S6197832 U JPS6197832 U JP S6197832U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer holder
- core tube
- suspension member
- longitudinal dimension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 8
- 239000000725 suspension Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18233484U JPS6197832U (cs) | 1984-12-03 | 1984-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18233484U JPS6197832U (cs) | 1984-12-03 | 1984-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6197832U true JPS6197832U (cs) | 1986-06-23 |
Family
ID=30739871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18233484U Pending JPS6197832U (cs) | 1984-12-03 | 1984-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6197832U (cs) |
-
1984
- 1984-12-03 JP JP18233484U patent/JPS6197832U/ja active Pending