JPS63170946A - セラミツク基板の気密接合構造 - Google Patents

セラミツク基板の気密接合構造

Info

Publication number
JPS63170946A
JPS63170946A JP233287A JP233287A JPS63170946A JP S63170946 A JPS63170946 A JP S63170946A JP 233287 A JP233287 A JP 233287A JP 233287 A JP233287 A JP 233287A JP S63170946 A JPS63170946 A JP S63170946A
Authority
JP
Japan
Prior art keywords
container
ceramic substrate
damper
ceramic
joint structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP233287A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0558666B2 (enrdf_load_stackoverflow
Inventor
Shigeki Okamoto
岡本　茂樹
Katsuhide Natori
名取　勝英
Kyoichiro Kono
河野　恭一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP233287A priority Critical patent/JPS63170946A/ja
Publication of JPS63170946A publication Critical patent/JPS63170946A/ja
Publication of JPH0558666B2 publication Critical patent/JPH0558666B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP233287A 1987-01-08 1987-01-08 セラミツク基板の気密接合構造 Granted JPS63170946A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP233287A JPS63170946A (ja) 1987-01-08 1987-01-08 セラミツク基板の気密接合構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP233287A JPS63170946A (ja) 1987-01-08 1987-01-08 セラミツク基板の気密接合構造

Publications (2)

Publication Number Publication Date
JPS63170946A true JPS63170946A (ja) 1988-07-14
JPH0558666B2 JPH0558666B2 (enrdf_load_stackoverflow) 1993-08-27

Family

ID=11526353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP233287A Granted JPS63170946A (ja) 1987-01-08 1987-01-08 セラミツク基板の気密接合構造

Country Status (1)

Country Link
JP (1) JPS63170946A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332437U (enrdf_load_stackoverflow) * 1989-08-04 1991-03-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332437U (enrdf_load_stackoverflow) * 1989-08-04 1991-03-29

Also Published As

Publication number Publication date
JPH0558666B2 (enrdf_load_stackoverflow) 1993-08-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees