JPS63170935U - - Google Patents
Info
- Publication number
- JPS63170935U JPS63170935U JP6436687U JP6436687U JPS63170935U JP S63170935 U JPS63170935 U JP S63170935U JP 6436687 U JP6436687 U JP 6436687U JP 6436687 U JP6436687 U JP 6436687U JP S63170935 U JPS63170935 U JP S63170935U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- retaining plate
- developing
- temperature
- developed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6436687U JPS63170935U (xx) | 1987-04-27 | 1987-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6436687U JPS63170935U (xx) | 1987-04-27 | 1987-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170935U true JPS63170935U (xx) | 1988-11-07 |
Family
ID=30900457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6436687U Pending JPS63170935U (xx) | 1987-04-27 | 1987-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170935U (xx) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS552213A (en) * | 1978-06-19 | 1980-01-09 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Developing method |
| JPS5972136A (ja) * | 1982-10-19 | 1984-04-24 | Toshiba Corp | レジスト・パタ−ン形成方法 |
| JPS5950439B2 (ja) * | 1975-12-27 | 1984-12-08 | アイダエンジニアリング カブシキガイシヤ | コウソクカイテンニオイテ ドウテキニバランススルプレスキカイ |
| JPS60158626A (ja) * | 1984-01-30 | 1985-08-20 | Canon Inc | 半導体露光装置 |
| JPS61281527A (ja) * | 1985-06-06 | 1986-12-11 | Mitsubishi Electric Corp | 半導体ウエハ加熱処理装置 |
-
1987
- 1987-04-27 JP JP6436687U patent/JPS63170935U/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950439B2 (ja) * | 1975-12-27 | 1984-12-08 | アイダエンジニアリング カブシキガイシヤ | コウソクカイテンニオイテ ドウテキニバランススルプレスキカイ |
| JPS552213A (en) * | 1978-06-19 | 1980-01-09 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Developing method |
| JPS5972136A (ja) * | 1982-10-19 | 1984-04-24 | Toshiba Corp | レジスト・パタ−ン形成方法 |
| JPS60158626A (ja) * | 1984-01-30 | 1985-08-20 | Canon Inc | 半導体露光装置 |
| JPS61281527A (ja) * | 1985-06-06 | 1986-12-11 | Mitsubishi Electric Corp | 半導体ウエハ加熱処理装置 |