JPS63170466U - - Google Patents
Info
- Publication number
- JPS63170466U JPS63170466U JP6182387U JP6182387U JPS63170466U JP S63170466 U JPS63170466 U JP S63170466U JP 6182387 U JP6182387 U JP 6182387U JP 6182387 U JP6182387 U JP 6182387U JP S63170466 U JPS63170466 U JP S63170466U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- wafer boat
- conduction plate
- reduced pressure
- pressure cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 7
- 239000004020 conductor Substances 0.000 claims 3
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6182387U JPH0441177Y2 (cs) | 1987-04-23 | 1987-04-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6182387U JPH0441177Y2 (cs) | 1987-04-23 | 1987-04-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63170466U true JPS63170466U (cs) | 1988-11-07 |
JPH0441177Y2 JPH0441177Y2 (cs) | 1992-09-28 |
Family
ID=30895511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6182387U Expired JPH0441177Y2 (cs) | 1987-04-23 | 1987-04-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0441177Y2 (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002060947A (ja) * | 2000-07-07 | 2002-02-28 | Asm Internatl Nv | 原子層のcvd |
-
1987
- 1987-04-23 JP JP6182387U patent/JPH0441177Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002060947A (ja) * | 2000-07-07 | 2002-02-28 | Asm Internatl Nv | 原子層のcvd |
Also Published As
Publication number | Publication date |
---|---|
JPH0441177Y2 (cs) | 1992-09-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS63170466U (cs) | ||
JPH01104022U (cs) | ||
JP2000150403A (ja) | 保温筒および縦型熱処理装置 | |
JPS60111037U (ja) | 縦形半導体熱処理炉 | |
JPH0379238U (cs) | ||
JPH038959Y2 (cs) | ||
JPS63195722U (cs) | ||
JPS6329945U (cs) | ||
JP2535564Y2 (ja) | 縦型反応炉 | |
JP2553902Y2 (ja) | ヒータ移載装置 | |
JPH0158930U (cs) | ||
JPS6439634U (cs) | ||
JPS63178519A (ja) | 半導体熱処理装置 | |
JPH0322844U (cs) | ||
JPS6395240U (cs) | ||
JPS635624U (cs) | ||
JPH02132936U (cs) | ||
JPH01177262U (cs) | ||
JPS6244438U (cs) | ||
JPS63183121U (cs) | ||
JPH0427392U (cs) | ||
JPH0160528U (cs) | ||
JPH01173153U (cs) | ||
JPS6321827U (cs) | ||
JPH01143119U (cs) |