JPH02132936U - - Google Patents
Info
- Publication number
- JPH02132936U JPH02132936U JP4168989U JP4168989U JPH02132936U JP H02132936 U JPH02132936 U JP H02132936U JP 4168989 U JP4168989 U JP 4168989U JP 4168989 U JP4168989 U JP 4168989U JP H02132936 U JPH02132936 U JP H02132936U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cylindrical body
- heat treatment
- treatment apparatus
- wafer heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 8
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4168989U JPH02132936U (cs) | 1989-04-11 | 1989-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4168989U JPH02132936U (cs) | 1989-04-11 | 1989-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02132936U true JPH02132936U (cs) | 1990-11-05 |
Family
ID=31552574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4168989U Pending JPH02132936U (cs) | 1989-04-11 | 1989-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02132936U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5143673A (en) * | 1974-10-11 | 1976-04-14 | Sharp Kk | Handotaiuehano fujunbutsukakusansochi |
| JPS6343315A (ja) * | 1986-08-11 | 1988-02-24 | Kokusai Electric Co Ltd | 減圧ｃｖｄ装置 |
-
1989
- 1989-04-11 JP JP4168989U patent/JPH02132936U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5143673A (en) * | 1974-10-11 | 1976-04-14 | Sharp Kk | Handotaiuehano fujunbutsukakusansochi |
| JPS6343315A (ja) * | 1986-08-11 | 1988-02-24 | Kokusai Electric Co Ltd | 減圧ｃｖｄ装置 |