JPS63169730A - ボンダ−用ツ−ル保持機構 - Google Patents

ボンダ−用ツ−ル保持機構

Info

Publication number
JPS63169730A
JPS63169730A JP212387A JP212387A JPS63169730A JP S63169730 A JPS63169730 A JP S63169730A JP 212387 A JP212387 A JP 212387A JP 212387 A JP212387 A JP 212387A JP S63169730 A JPS63169730 A JP S63169730A
Authority
JP
Japan
Prior art keywords
leaf spring
tool
fixed
free state
bonder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP212387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0474864B2 (enrdf_load_stackoverflow
Inventor
Yasunobu Suzuki
鈴木　安信
Motohiko Kato
元彦 加藤
Hisao Ishida
久雄 石田
Kimiharu Sato
公治 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP212387A priority Critical patent/JPS63169730A/ja
Publication of JPS63169730A publication Critical patent/JPS63169730A/ja
Publication of JPH0474864B2 publication Critical patent/JPH0474864B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP212387A 1987-01-08 1987-01-08 ボンダ−用ツ−ル保持機構 Granted JPS63169730A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP212387A JPS63169730A (ja) 1987-01-08 1987-01-08 ボンダ−用ツ−ル保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP212387A JPS63169730A (ja) 1987-01-08 1987-01-08 ボンダ−用ツ−ル保持機構

Publications (2)

Publication Number Publication Date
JPS63169730A true JPS63169730A (ja) 1988-07-13
JPH0474864B2 JPH0474864B2 (enrdf_load_stackoverflow) 1992-11-27

Family

ID=11520574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP212387A Granted JPS63169730A (ja) 1987-01-08 1987-01-08 ボンダ−用ツ−ル保持機構

Country Status (1)

Country Link
JP (1) JPS63169730A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5190205A (en) * 1990-10-31 1993-03-02 Kabushiki Kaisha Shinkawa Bonding head assembly
WO2016072266A1 (ja) * 2014-11-06 2016-05-12 オムロン株式会社 吸着ヘッドおよびそれを備える貼付装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5190205A (en) * 1990-10-31 1993-03-02 Kabushiki Kaisha Shinkawa Bonding head assembly
WO2016072266A1 (ja) * 2014-11-06 2016-05-12 オムロン株式会社 吸着ヘッドおよびそれを備える貼付装置
JP2016088576A (ja) * 2014-11-06 2016-05-23 オムロン株式会社 吸着ヘッドおよびそれを備える貼付装置
CN106715276A (zh) * 2014-11-06 2017-05-24 欧姆龙株式会社 吸附头以及具备该吸附头的粘贴装置

Also Published As

Publication number Publication date
JPH0474864B2 (enrdf_load_stackoverflow) 1992-11-27

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