JPS6316972Y2 - - Google Patents

Info

Publication number
JPS6316972Y2
JPS6316972Y2 JP1981087800U JP8780081U JPS6316972Y2 JP S6316972 Y2 JPS6316972 Y2 JP S6316972Y2 JP 1981087800 U JP1981087800 U JP 1981087800U JP 8780081 U JP8780081 U JP 8780081U JP S6316972 Y2 JPS6316972 Y2 JP S6316972Y2
Authority
JP
Japan
Prior art keywords
signal
recorder
memory
range
scaling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981087800U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57199815U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981087800U priority Critical patent/JPS6316972Y2/ja
Publication of JPS57199815U publication Critical patent/JPS57199815U/ja
Application granted granted Critical
Publication of JPS6316972Y2 publication Critical patent/JPS6316972Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Recording Measured Values (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
JP1981087800U 1981-06-15 1981-06-15 Expired JPS6316972Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981087800U JPS6316972Y2 (OSRAM) 1981-06-15 1981-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981087800U JPS6316972Y2 (OSRAM) 1981-06-15 1981-06-15

Publications (2)

Publication Number Publication Date
JPS57199815U JPS57199815U (OSRAM) 1982-12-18
JPS6316972Y2 true JPS6316972Y2 (OSRAM) 1988-05-13

Family

ID=29882996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981087800U Expired JPS6316972Y2 (OSRAM) 1981-06-15 1981-06-15

Country Status (1)

Country Link
JP (1) JPS6316972Y2 (OSRAM)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1014830A (en) * 1972-11-15 1977-08-02 Klaus C. Wiemer Method of forming doped dielectric layers utilizing reactive plasma deposition
JPS6030098B2 (ja) * 1976-04-19 1985-07-15 富士通株式会社 スパツタエツチング方法
JPS53116076A (en) * 1977-03-22 1978-10-11 Hitachi Ltd Plasma processing method and its unit
JPS54131865A (en) * 1978-04-03 1979-10-13 Nec Corp Wafer scribing device

Also Published As

Publication number Publication date
JPS57199815U (OSRAM) 1982-12-18

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